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Method of fabricating a micro-electro-mechanical fluid ejector

  • US 6,662,448 B2
  • Filed: 05/23/2001
  • Issued: 12/16/2003
  • Est. Priority Date: 10/15/1998
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a micro-electromechanical device, the device comprising a single semiconductor substrate having an insulating layer thereon, the method comprising:

  • disposing a conductor on the insulating layer, providing a polysilicon membrane, the membrane being formed by surface micromachining through the deposition and patterning of a polysilicon layer, the membrane comprising a membrane top and membrane sides, the membrane sides supporting the membrane above the conductor and the insulating layer, the membrane being conductive;

    the membrane being deflectable and arranged to move towards the conductor under electrostatic attraction in response to a power source connected to the conductor and the membrane;

    wherein the conductor and the membrane are formed by thin film deposition;

    and wherein the membrane comprises an actuator and the micro-electromechanical device comprises an actuator device.

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