Electroless copper deposition method for preparing copper seed layers

• US 6,664,122 B1
• Filed: 11/27/2001
• Issued: 12/16/2003
• Est. Priority Date: 10/19/2001
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation), The Great Outdoors Grill Co. (Ontario Teachers' Pension Plan Board)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Webb, Eric G., Andryuschenko, Tatyana N., Reid, Jonathan D., Mayer, Steven T.
• Primary Examiner(s): PERT, EVAN T
• Application Number:
  US09/996,425
• Time in Patent Office: 749 Days
• Field of Search: 438/10, 438/12, 438/17, 438/678, 438/687, 427/96, 427/98, 427/8, 427/9, 427/10
• US Class Current: 438/17
• CPC Class Codes: C23C 18/1617 Purification and regeneration of coating baths
• CPC Class Codes: C23C 18/1669 Agitation, e.g. air introduction
• CPC Class Codes: C23C 18/1675 Process conditions
• CPC Class Codes: C23C 18/1676 Heating of the solution
• CPC Class Codes: C23C 18/168 Control of temperature, e.g. temperature of bath, substrate
• CPC Class Codes: C23C 18/1692 Heat-treatment
• CPC Class Codes: C23C 18/40 using reducing agents
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76864 Thermal treatment
• CPC Class Codes: H01L 21/76868 Forming or treating discontinuous thin films, e.g. repair, enhancement or reinforcement of discontinuous thin films
• CPC Class Codes: H01L 21/76873 for electroplating
• CPC Class Codes: H01L 2221/1089 Stacks of seed layers
• CPC Class Codes: Y10S 977/89 Deposition of materials, e.g. coating, cvd, or ald

Abstract

Disclosed is a procedure for deposition of a thin and relatively continuous electroless copper film on the substrate of sub-micron integrated circuit features. The electroless copper film is deposited onto a previously deposited PVD copper film, which may be discontinuous. The continuous film formed by electroless deposition allows for sufficient filling of the sub-micron integrated circuit features by electrodeposition. The electroless bath employed to form the continuous electroless copper film may be composed of a reducing agent, a complexing agent, a source of copper ions, a pH adjuster, and optionally one or more surfactants and/or stabilizers. In one example, the reducing agent contains an aldehyde moiety.

Claims

1. A method of forming a copper seed layer on a substrate surface, the method comprising:

providing a substrate having dielectric layer on its surface and recesses in said dielectric layer, the substrate further comprising a partially complete copper seed layer formed in at least some recesses of the substrate surface;

contacting the substrate surface with an electroless plating bath comprising a reducing agent and a source of copper ions, to deposit additional copper on the substrate surface; and

monitoring the plating rate via a potential between the substrate and a reference electrode.

2. The method of claim 1, wherein the reducing agent comprises an aldehyde moiety.

3. The method of claim 1, wherein the reducing agent comprises glyoxylic acid.

4. The method of claim 1, wherein the reducing agent is present in a molar concentration of between about 0.01 and 0.2.

5. The method of claim 1, wherein the electroless plating bath is alkaline.

6. The method of claim 5, wherein electroless plating bath further comprises a hydroxide pH adjuster that does not contain alkali metal ions.

7. The method of claim 6, wherein the pH adjuster is tetramethyl ammonium hydroxide.

8. The method of claim 1, wherein the electroless plating bath further comprises a complexing agent for copper ions.

9. The method of claim 8, wherein the complexing agent is EDTA.

10. The method of claim 1, wherein depositing the additional copper by an electroless copper deposition process is performed at a temperature of between about 25 and 80 degrees C.

11. The method of claim 1, wherein the electroless plating bath further comprises one or more of a surfactant and a stabilizer.

12. The method of claim 11, wherein the surfactant is a polyethylene glycol.

13. The method of claim 1, further comprising flowing the electroless plating bath over the substrate surface during at least a portion of the depositing.

14. The method of claim 1, further comprising rotating the substrate in the electroless plating bath during at lease a portion of the depositing.

15. The method of claim 1, further comprising determining that the electroless plating rate has dropped to approximately zero when the voltage between the reference electrode and the substrate reaches a defined value.

16. The method of claim 15, wherein the reference electrode is a calomel reference electrode and wherein the deposition rate is determined to have dropped to approximately zero when the voltage between the reference electrode and the substrate drops to about 0.6 volts or below.

17. The method of claim 1, further comprising measuring the thickness of the seed layer during deposition of the additional copper by measuring the resistivity of the seed layer.

18. The method of claim 17, wherein a multi-point probe measures the resistivity of the seed layer.

19. The method of claim 1, further comprising annealing the substrate to thereby stabilize the deposited additional copper on the substrate surface.

20. The method of claim 1, wherein at least some of the recesses in said dielectric layer have an aspect ratio of at least about 4:

1.

21. A process by which a substrate with a non-continuous physical vapor deposited seed layer is plated with an electroless copper layer comprising:

placing the substrate in an electroless plating bath in a face down orientation while rotating;

allowing the substrate to undergo electroless plating while flow to the substrate surface is controlled, at least in part, by the rotation rate of the substrate; and

monitoring the resistivity of the copper layer to determine the thickness of the copper layer during electroless plating.

22. The process of claim 21, wherein placing the substrate in the electroless plating bath is performed while the substrate is tilted at an angle so as to displace gas from the substrate face.

23. The process of claim 21, further comprising monitoring a voltage between the substrate and a reference electrode during electroless plating.

24. The process of claim 21, further comprising controlling the temperature of the electroless plating bath to thereby control the rate of the electroless plating process.

25. The process of claim 24, wherein the temperature in the plating cell is controlled by a heat exchanger in the plating cell or outside the plating cell.

26. The process of claim 21, wherein the PVD seed layer has a nominal thickness as at least about 250 angstroms.

27. The process of claim 21, wherein the electroless plating process is allowed to continue until the electroless plated copper layer attains a thickness of between about 30-300 angstroms.

28. The process of claim 21, further comprising replenishing the electroless plating bath with make up plating solution.

29. The process of claim 28, wherein the replenishing takes place on a regular basis, following a set time or substrate count.

30. The process of claim 21, wherein the electroless plating bath comprises a surfactant.

31. The process of claim 21, further comprising rinsing the deposited electroless copper layer with water.

32. The process of claim 31, further comprising:

drying the substrate; and

electroplated the substrate at a later time.

33. The process of claim 31, further comprising electroplated the substrate immediately after electroless deposition and rinsing.

34. The process of claim 21, further comprising annealing the substrate to thereby stabilize the electroless copper layer.