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Toroidal low-field reactive gas source

  • US 6,664,497 B2
  • Filed: 05/10/2002
  • Issued: 12/16/2003
  • Est. Priority Date: 06/26/1997
  • Status: Expired due to Term
First Claim
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1. A method for dissociating gases comprising:

  • a) confining a gas in a plasma chamber at a pressure;

    b) providing a transformer having a magnetic core surrounding a portion of the chamber and having a primary winding;

    c) generating an AC current using a solid state AC switching power supply comprising one or more switching semiconductor devices and having an output that is coupled, without requiring an impedance matching network, to the primary winding of the transformer; and

    d) inducing an AC potential inside the plasma chamber by supplying the current, without requiring the impedance matching network, to the primary winding of the transformer, the induced AC potential forming a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.

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