In-situ probe for optimizing electron beam inspection and metrology based on surface potential

• US 6,664,546 B1
• Filed: 02/10/2000
• Issued: 12/16/2003
• Est. Priority Date: 02/10/2000
• Status: Expired due to Fees

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Lauber, Jan, Fernandez, Jorge P., McCord, Mark A., Pei, Jun
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Quash, Anthony
• Application Number:
  US09/502,554
• Time in Patent Office: 1,405 Days
• Field of Search: 250/306, 250/310, 250/311, 250/397
• US Class Current: 250/397
• CPC Class Codes: H01J 2237/004 Charge control of objects or beams
• CPC Class Codes: H01J 2237/2594 Measuring electric fields or potentials
• CPC Class Codes: H01J 2237/2814 Measurement of surface topography
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

Disclosed is a method and apparatus for generating an image from a sample. The apparatus includes a charged particle beam generator arranged to generate and control a charged particle beam substantially towards a portion of the sample and a detector arranged to detect charged particles originating from the sample portion to allow generation of an image from the detected charged particles. The apparatus further includes a measurement device arranged to measure a characteristic of the sample portion to obtain a surface voltage value of the sample portion that is exposed to the charged particle beam. For example, the measurement device is an electrostatic voltmeter positioned to obtain a surface voltage value of the exposed sample portion. A charged particle beam is directed substantially towards a portion of the sample under a first set of operating conditions. A surface charge value of the sample portion is obtained under the first set of operating conditions. It is then determined whether an optimum set of operating conditions associated with a predetermined surface charge value have been found. When the optimum conditions have not been found, the operating conditions are adjusted and the charged particle beam is directed substantially towards the sample portion. When the optimum conditions have been found, the charged particle beam is directed substantially towards the sample portion under the found optimum operating conditions.

Claims

1. An apparatus for generating an image from a sample during an metrology or inspection procedure, comprising:

a charged particle beam generator arranged to direct a charged particle beam towards a portion of the sample;

a detector arranged to detect charged particles originating from the sample portion to allow generation of an image from the detected charged particles;

a measurement device arranged to obtain a surface voltage value of the sample portion that is exposed to the charged particle beam, wherein the detector is operationally independent from the measurement device; and

a processor and at least one memory operable to;

(a) cause the charged particle beam generator to direct a charged particle beam towards a portion of the sample under a set of operation conditions;

(b) obtain the surface voltage value of the sample portion from the measurement device;

(c) compare the obtained surface voltage to a predefined optimum surface voltage;

(d) when the obtained surface voltage is not substantially equal to the predefined optimum surface voltage, adjust one or more operating conditions of the charged particle beam generator so as to alter the obtained surface voltage value and repeat operations (a) through (d) until the obtained surface voltage is substantially equal to the predefined optimum surface voltage, and

(e) when the obtained surface voltage is substantially equal to the predefined optimum surface voltage, define the current operating conditions of the charged particle beam generator as the optimum operating conditions and inspect the sample portion with the charged particle beam under the optimum operating conditions.

2. An apparatus as recited in claim 1 wherein the measurement device is an electrostatic voltmeter arranged to measure a surface voltage of the sample portion.

3. An apparatus as recited in claim 2 wherein the measurement device is movable to a position adjacent to the sample portion and to a second position not adjacent to the sample portion.

4. An apparatus as recited in claim 2 wherein the sample is movable to a position adjacent to the measurement device and to a second position not adjacent to the measurement device.

5. An apparatus as recited in claim 2 wherein the electrostatic voltmeter takes a form of a Kelvin probe.

6. An apparatus as recited in claim 1 wherein the measurement device is a charge analyzer arranged to obtain an energy profile of the detected charged particles and the apparatus further comprises a processor arranged to determine the surface voltage of the sample portion from the energy profile of the detected charged particles.

7. An apparatus as recited in claim 6 wherein the charge analyzer is arranged at a different orientation than the detector and the apparatus further includes a beam deflector configurable to direct the charged particles originating from the sample either to the detector or the charge analyzer.

8. An apparatus as recited in claim 7 wherein the beam deflector is a Wien filter.

9. An apparatus as recited in claim 8 wherein the charge analyzer includes a mesh coupled to a voltage supply and a faraday cup arranged to collect charged particles originating from the sample portion that pass through the mesh.

10. An apparatus as recited in claim 6 wherein the measurement device and the detector are together configurable to measure the energy profile of the detected charged particles of the sample portion to obtain a surface voltage value of the sample portion.

11. An apparatus as recited in claim 10 wherein the measurement device is a grid coupled to a voltage supply.

12. An apparatus as recited in claim 8 wherein the charge analyzer is a hemispherical spectrometer.

13. An apparatus as recited in claim 1 wherein the image is used for a metrology analysis of the sample.

14. An apparatus as recited in claim 1 wherein the image is used for an inspection of the sample.

15. A method of controlling charge on a sample, the method comprising:

(a) directing a charged particle beam substantially towards a portion of the sample under a set of operating conditions that result in a surface charge value on the sample portion;

(b) measuring the surface charge value of the sample portion under the first set of operating conditions;

(c) comparing the measured surface charge value to an optimum surface charge value;

(d) when the measured charge value does not substantially equal the optimum surface charge value and the optimum surface charge value cannot be extrapolated from previously measured charge values, adjusting the set of operating conditions to a current set of operating conditions and repeating operations (a) through (d); and

(e) when the measured charge value does substantially equal the optimum surface charge value or the optimum surface charge value can be extrapolated from previously measured charge values, defining the current set of operating conditions as an optimum set of operating conditions and inspecting the sample portion with the charged particle beam under the optimum set of operating conditions.

16. A method as recited in claim 15 wherein the set of operating conditions include a landing energy value of the charged particle beam.

17. A method as recited in claim 15 wherein the set of operating conditions include an electrode voltage of an electrode that is placed adjacent to the sample portion, the electrode being arranged to control charge on the sample portion.

18. A method as recited in claim 17 wherein the set of operating conditions include a configuration of the electrode.

19. A method as recited in claim 15 wherein the first operating conditions include a configuration of one or more lens of the source unit.

20. A method as recited in claim 15 wherein the first operating conditions include a sample type.

21. A method as recited in claim 20 wherein the sample type is selected from a group consisting of sample composition, sample thickness, and percentage coverage of insulator material over conductive material.

22. A method as recited in claim 15 wherein the surface voltage value is obtained by (i) generating a reference energy profile of the detected particles for a reference sample having the predetermined surface voltage value, (ii) generating a comparison energy profile for the detected particles for the sample portion under the first set of operating conditions, and (iii) comparing a peak of the reference energy profile with a peak of the comparison profile to obtain a voltage difference equal to a difference between the surface voltage value and the predetermined surface voltage.

23. A method as recited in claim 22 wherein the optimum operating condition is found when the difference is substantially zero.

24. A computer readable medium containing program instructions for controlling charge build up on a sample while an image is being generated of a portion of the sample with a charged particle device having a source unit for directing a charged particle beam substantially towards the sample, a detector for detecting particles that are output from the sample, and an image generator for generating the image of the sample from the detected particles, the computer readable medium comprising:

computer code for (a) directing a charged particle beam substantially towards a portion of the sample under a set of operating conditions that result in a surface charge value on the sample portion;

computer code for (b) measuring the surface charge value of the sample portion under the first set of operating conditions;

computer code for (c) comparing the measured surface charge value to an optimum surface charge value;

computer code for adjusting the set of operating conditions to a current set of operating conditions and repeating operations (a) through (d) when the measured charge value does not substantially equal the optimum surface charge value and the optimum surface charge value cannot be extrapolated from previously measured charge values; and

computer code for defining the current set of operating conditions as an optimum set of operating conditions and inspecting the sample portion with the charged particle beam under the optimum set of operating conditions when the measured charge value does substantially equal the optimum surface charge value or the optimum surface charge value can be extrapolated from previously measured charge values.

25. A method of controlling charge build up on a test sample that is to undergo a metrology or inspection procedure within a charged particle device, the method comprising:

(a) in a charged particle device, calibrating a focus setting of a charged particle device to obtain a first optimum image of a reference sample having a known surface charge value, the first optimum image corresponding to a first optimum focus setting;

(b) selecting a set of operating conditions for the charged particle device;

(c) in the charged particle device, directing a charged particle beam towards a test sample under the selected set of operating conditions, the test sample being the same or substantially identical to the reference sample;

(d) in the charged particle device, calibrating the focus setting of the charged particle device to obtain a second optimum image of the test sample, the second optimum image corresponding to a second optimum focus setting;

(e) comparing the second optimum focus setting to the first optimum focus setting;

(f) when the second optimum focus does not substantially equal the first optimum focus setting, adjusting the set of operating conditions and repeating operations (c) through (f) under the adjusted set of operating conditions; and

(f) when the second optimum focus setting substantially equals the first optimum focus setting, commencing with inspection or metrology of the test sample by directing the charged particle beam towards the test sample under the adjusted set of operating conditions to thereby result in the test sample having a surface charge substantially equal to the known surface charge value of the reference sample.

26. A method as recited in claim 25 wherein the test sample is the reference sample.

27. A method as recited in claim 25 wherein the test sample is substantially identical to the reference sample.

28. A method as recited in claim 25 wherein the focus setting is calibrated by altering a current value through an objective lens of the charged beam device.

29. A method as recited in claim 25 wherein the operating condition includes one or more voltage values of one or more charge control electrodes of the charged beam device.

30. A method as recited in claim 25 wherein the operating condition includes a lens configuration of the charged beam device.

31. A method as recited in claim 25 wherein the operating condition includes a voltage value of the sample.