Microlens and photodetector
First Claim
Patent Images
1. A method comprising:
- forming a first photodefinable layer;
forming a second photodefinable layer over said first photodefinable layer;
defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure; and
enabling said stepped structure to act as a diffractive microlens.
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Abstract
An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined with low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask may be used to define a plurality of steps in the resulting microlens which have different diffractive characteristics.
53 Citations
16 Claims
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1. A method comprising:
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forming a first photodefinable layer;
forming a second photodefinable layer over said first photodefinable layer;
defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure; and
enabling said stepped structure to act as a diffractive microlens. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A structure comprising:
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a first photodefinable layer having a first length;
a second photodefinable layer positioned over said first photodefinable layer and having a second length, said second length being shorter than said first length; and
said first and second photodefinable layers to create a diffractive microlens. - View Dependent Claims (9, 10, 11, 12)
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13. A diffractive microlens comprising:
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a distinct first layer having a first length; and
a distinct second layer positioned over said first distinct layer having a second length, said second length being shorter than said first length, said first and second layers forming a diffractive microlens. - View Dependent Claims (14, 15, 16)
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Specification