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Microlens and photodetector

  • US 6,665,014 B1
  • Filed: 11/25/1998
  • Issued: 12/16/2003
  • Est. Priority Date: 11/25/1998
  • Status: Expired due to Fees
First Claim
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1. A method comprising:

  • forming a first photodefinable layer;

    forming a second photodefinable layer over said first photodefinable layer;

    defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure; and

    enabling said stepped structure to act as a diffractive microlens.

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