Mirror positioning assembly with vertical force component compensation
First Claim
Patent Images
1. A mirror positioning system, comprising:
- a substrate;
a mirror;
a first lever movably interconnected with said substrate, wherein said first lever comprises a first lever end that is movable relative to said substrate, and wherein said mirror is interconnected with a portion of said first lever that is movable relative to said substrate;
an actuator assembly movably interconnected with said substrate for movement at least generally along a first path;
a coupling assembly comprising first and second coupling ends, wherein said first coupling end is interconnected with a portion of said first lever that is movable relative to said substrate, wherein said second coupling end is interconnected with said actuator assembly, and wherein said first lever end moves at least generally away from or toward said substrate depending upon a direction which said actuator assembly moves relative to said substrate along said first path; and
means for transmitting a force that is exerted on said coupling assembly by at least one of said first lever and said mirror to achieve both first and second conditions, wherein said first condition is that said force is transmitted to said actuator assembly at least generally along said first path, and wherein said second condition is that no portion of said coupling assembly is deflected into contact with any underlying structure.
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Abstract
A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.
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Citations
32 Claims
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1. A mirror positioning system, comprising:
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a substrate;
a mirror;
a first lever movably interconnected with said substrate, wherein said first lever comprises a first lever end that is movable relative to said substrate, and wherein said mirror is interconnected with a portion of said first lever that is movable relative to said substrate;
an actuator assembly movably interconnected with said substrate for movement at least generally along a first path;
a coupling assembly comprising first and second coupling ends, wherein said first coupling end is interconnected with a portion of said first lever that is movable relative to said substrate, wherein said second coupling end is interconnected with said actuator assembly, and wherein said first lever end moves at least generally away from or toward said substrate depending upon a direction which said actuator assembly moves relative to said substrate along said first path; and
means for transmitting a force that is exerted on said coupling assembly by at least one of said first lever and said mirror to achieve both first and second conditions, wherein said first condition is that said force is transmitted to said actuator assembly at least generally along said first path, and wherein said second condition is that no portion of said coupling assembly is deflected into contact with any underlying structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
said first path is at least substantially linear.
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3. A mirror positioning system, as claimed in claim 1, wherein:
said first path is at least generally parallel with said substrate.
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4. A mirror positioning system, as claimed in claim 1, wherein:
said first lever is movably interconnected with said substrate for movement of said first lever end at least substantially along a second path.
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5. A mirror positioning system, as claimed in claim 4, wherein:
said second path comprises a component that is at least substantially normal to said substrate.
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6. A mirror positioning system, as claimed in claim 4, wherein:
said second path is at least generally arcuate.
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7. A mirror positioning system, as claimed in claim 1, wherein:
said coupling assembly comprises an elongated tether located between said first lever and actuator assembly.
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8. A mirror positioning system, as claimed in claim 7, wherein:
said coupling assembly further comprises a pivotless compliant microstructure, wherein said pivotless compliant microstructure comprises input and an output sections, wherein said input section is interconnected with said actuator assembly and said output section is interconnected with said elongated tether.
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9. A mirror positioning system, as claimed in claim 8, wherein:
said pivotless compliant microstructure comprises a relief structure disposed between and interconnecting said pivotless compliant microstructure and said tether, wherein said means for transmitting in relation to said second condition further comprises said relief structure.
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10. A mirror positioning system, as claimed in claim 8, wherein:
said means for transmitting in relation to said second condition comprises a frame assembly pivotally interconnected with said substrate, wherein said pivotless compliant microstructure is mounted on said frame assembly.
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11. A mirror positioning system, as claimed in claim 10, wherein:
said frame assembly microstructure is rigid and of one-piece construction.
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12. A mirror positioning system, as claimed in claim 10, wherein:
said frame assembly microstructure comprises a plurality of individual frame members that are each individually pivotally interconnected with said substrate, wherein each frame member is prestressed so as to move away from said substrate without an application of any external force to said frame member.
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13. A mirror positioning system, as claimed in claim 8, wherein:
said pivotless compliant microstructure is interconnected with said substrate by a first pivotable connection, wherein said means for transmitting in relation to said second condition comprises said first pivotable connection.
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14. A mirror positioning system, as claimed in claim 8, wherein:
said means for transmitting in relation to said second condition further comprises at least one cavity formed in said substrate under at least a portion of said pivotless compliant microstructure.
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15. A mirror positioning system, as claimed in claim 8, wherein:
said means for transmitting in relation to said second condition further comprises a cavity formed in said substrate, wherein an entirety of said pivotless compliant microstructure is disposed within said cavity.
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16. A mirror positioning system, as claimed in claim 8, wherein:
said pivotless compliant microstructure is anchored to said substrate at least at four anchor locations, wherein said means for transmitting in relation to said second condition comprises a location of at least two of said anchor locations.
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17. A mirror positioning system, as claimed in claim 1, wherein:
said means for transmitting comprises at least one doubly clamped beam.
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18. A mirror positioning system, as claimed in claim 17, wherein:
said at least one doubly clamped beam comprises a plurality of vertically spaced and rigidly interconnected structural layers.
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19. A mirror positioning system, as claimed in claim 1, wherein said means for transmitting in relation to said first condition comprises:
a pivotless compliant microstructure interconnected with said substrate and comprising input and output sections that are both movable relative to said substrate within a lateral dimension that is at least generally parallel with said substrate, wherein first lever is interconnected with said output section of said pivotless compliant microstructure and said input section of said pivotless compliant microstructure is interconnected with said actuator assembly, wherein a movement of said actuator assembly relative to said substrate along said first path displaces said input section of said pivotless complaint microstructure a first distance within said lateral dimension, and that in turn displaces said output section of said pivotless compliant microstructure a second distance in said lateral dimension, and wherein said first and second distances are selected from the group consisting essentially of equal and unequal magnitudes.
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20. A mirror positioning system, as claimed in claim 19, wherein:
said output section is formed from a single structural layer by surface micromachining and a remainder of said pivotless compliant microstructure is formed from at least two vertically spaced structural layers by surface micromachining and that are anchored to each other at a plurality of locations.
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21. A mirror positioning system, as claimed in claim 19, wherein:
a configuration of said output section and how said output section interconnects with a remainder of said pivotless compliant microstructure comprises said means for transmitting in relation to said second condition.
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22. A mirror positioning system, as claimed in claim 19, wherein:
said pivotless compliant microstructure comprises first and second beam microstructures that are attached to said output section of said pivotless compliant microstructure at a first location, and further extend away from said output section of said pivotless compliant microstructure in at least generally opposite directions, wherein said output section comprises first and second ends, and wherein said first location is disposed at an intermediate location between said first and second ends.
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23. A mirror positioning system, as claimed in claim 19, wherein:
said pivotless compliant microstructure comprises first and second beam microstructures that are attached to said output section of said pivotless compliant microstructure at a first longitudinal location, and further extend away from said output section of said pivotless compliant microstructure in at least generally opposite directions, wherein said output section extends from said first longitudinal location at least generally toward but not to said input section of said pivotless compliant microstructure.
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24. A mirror positioning system, as claimed in claim 19, wherein:
said means for transmitting in relation to said second condition comprises a rigid frame pivotally interconnected with said substrate and said pivotless compliant microstructure being mounted on said frame.
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25. A mirror positioning system, as claimed in claim 24, wherein:
said pivotless compliant microstructure comprises a first portion of said coupling assembly, wherein a second portion of said coupling assembly microstructure is disposed between said input section of said pivotless compliant microstructure and said actuator assembly, and wherein said means for transmitting in relation to said first condition comprises at least one doubly clamped beam that is attached to said second portion of said coupling assembly and that is anchored to said substrate on opposite sides of second portion of said coupling assembly.
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26. A mirror positioning system, as claimed in claim 19, wherein:
said means for transmitting in relation to said second condition comprises a plurality of prestressed elevation members pivotally interconnected with said substrate with said pivotless compliant microstructure being mounted on said plurality of prestressed elevation members.
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27. A mirror positioning system, as claimed in claim 26, wherein:
said pivotless compliant microstructure comprises a first portion of said coupling assembly, wherein a second portion of said coupling assembly microstructure is disposed between said input section of said pivotless compliant microstructure and said actuator assembly, and wherein said means for transmitting in relation to said first condition comprises at lease one doubly clamped beam that is attached to said second portion of said coupling assembly and that is anchored to said substrate on opposite sides of second portion of said coupling assembly.
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28. A mirror positioning system, as claimed in claim 19, wherein:
said means for transmitting in relation to said second condition comprises said pivotless compliant microstructure being interconnected with said substrate at only first and second locations, wherein said pivotless compliant microstructure is pivotally interconnected with said substrate at said first and second locations.
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29. A mirror positioning system, as claimed in claim 28, wherein:
said pivotless compliant microstructure comprises a first portion of said coupling assembly, wherein a second portion of said coupling assembly microstructure is disposed between said input section of said pivotless compliant microstructure and said actuator assembly, and wherein said means for transmitting in relation to said first condition comprises at lease one doubly clamped beam that is attached to said second portion of said coupling assembly and that is anchored to said substrate on opposite sides of second portion of said coupling assembly.
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30. A mirror positioning system, as claimed in claim 19, wherein:
said means for transmitting in relation to said second condition comprises first and second cavities formed in said substrate on opposite sides of a reference axis that extends between said input and output sections of said pivotless compliant microstructure, wherein first and second lateral extremes of said pivotless compliant microstructure are disposed above said first and second cavities, respectively.
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31. A mirror positioning system, as claimed in claim 19, wherein:
said pivotless compliant microstructure is disposed in spaced relation to said substrate and is anchored to said substrate at first and second locations, wherein said first and second anchor locations are disposed on opposite sides of a reference axis that extends between said input and output sections of said pivotless compliant microstructure and that defines a longitudinal dimension whereby said first and second anchor locations are laterally spaced, wherein said pivotless compliant microstructure further comprises first and second lateral extremes that are disposed on opposite sides of said reference axis, wherein said first and second anchor locations are disposed at a longitudinal position from said output section that is at least as great as a longitudinal position of said first and second lateral extremes, wherein said means for transmitting in relation to said second condition comprises a position of said first and second anchor locations relative to said first and second lateral extremes.
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32. A mirror positioning system, as claimed in claim 19, wherein:
said means for transmitting in relation to said second condition comprises a cavity in said substrate, wherein at least a substantial portion of said pivotless compliant microstructure is disposed within said cavity.
Specification