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Angular accelerometer having balanced inertia mass

  • US 6,666,092 B2
  • Filed: 02/28/2002
  • Issued: 12/23/2003
  • Est. Priority Date: 02/28/2002
  • Status: Expired due to Fees
First Claim
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1. An angular accelerometer comprising:

  • a substrate;

    a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates;

    a rotational inertia mass suspended over a cavity and including a central opening and a plurality of movable capacitive plates arranged to provide a capacitive coupling with said first plurality of fixed capacitive plates;

    a central member fixed to said substrate and located substantially in the central opening of said rotational inertia mass;

    a slot formed in said rotational inertia mass;

    a signal line extending within the slot formed in the rotational inertia mass;

    a plurality of support arms extending between the central member and the rotational inertia mass for supporting the rotational inertia mass relative to the fixed electrode and allowing rotational movement of the rotational inertia mass upon experiencing an angular acceleration about a sensing axis; and

    one or more apertures formed in the rotational inertia mass so as to balance the rotational inertia mass to compensate for the slot and provide a center of mass substantially centered about the rotational inertia mass.

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