Continuously variable analog micro-mirror device

• US 6,666,561 B1
• Filed: 10/28/2002
• Issued: 12/23/2003
• Est. Priority Date: 10/28/2002
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Blakley, Daniel Robert
• Primary Examiner(s): SIKDER, MOHAMMAD YUNUS
• Application Number:
  US10/282,363
• Time in Patent Office: 421 Days
• Field of Search: 359/877, 359/221, 359/223, 359/224, 359/225, 359/226, 359/298, 359/198, 359/200, 359/871, 359/872
• US Class Current: 359/877
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micro-mirror device includes a substrate, a reflective element spaced from the surface of the substrate, a pair of electrodes disposed adjacent to the surface of the substrate, spaced apart from each other, and disposed adjacent to opposite ends of the reflective element, and including a dielectric liquid disposed at least between the reflective element and the pair of electrodes. The reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes.

Claims

1. A micro-mirror device, comprising:

a substrate having a surface;

a pair of electrodes disposed adjacent to the surface of the substrate and spaced apart from each other;

a reflective element including conductive material spaced from the surface of the substrate;

at least one post extending from the surface of the substrate and supporting the reflective element relative to the surface of the substrate and

a dielectric liquid disposed at least between the reflective element and the pair of electrodes, wherein the reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes and the conductive material.

2. The device of claim 1, wherein said first and second positions of the reflective element are oriented in directions on opposite sides of a neutral position of the micro-mirror device.

3. The device of claim 1, wherein said first position of the reflective element is a neutral position of the micro-mirror device.

4. The device of claim 1, wherein said second position of the reflective element is a neutral position of the micro-mirror device.

5. The device of claim 1, wherein said first position of the reflective element is oriented at an angle to the second position.

6. The device of claim 1, wherein said first position of the reflective element is oriented at an angle to a neutral third position between said first and second positions.

7. The device of claim 1, wherein said second position of the reflective element is oriented at an angle to a neutral third position between said first and second positions.

8. The device of claim 1, wherein the reflective element is positioned above the dielectric liquid.

9. The device of claim 1, wherein the reflective element is submerged in the dielectric liquid.

10. The device of claim 1, further comprising a transparent plate spaced parallel to the substrate.

11. The device of claim 1, wherein the dielectric liquid is transparent.

12. The device of claim 1, further comprising:

at least one hinge supporting the reflective element from the at least one post, wherein the at least one hinge is adapted to facilitate movement of the reflective element between the first position and the one second position.

13. The device of claim 12, wherein the at least one hinge includes a torsional member adapted to twist about a longitudinal axis thereof.

14. The device of claim 12, wherein the at least one hinge includes a flexure member adapted to bend along a longitudinal axis thereof.

15. The device of claim 1, further comprising:

a conductive via extending through the at least one post and being electrically coupled to the reflective element.

16. The device of claim 1, wherein the reflective element includes a substantially rectangular-shaped portion having four contiguous side portions, wherein the at least one post is positioned within the four contiguous side portions.

17. The device of claim 1, wherein the reflective element includes a substantially rectangular-shaped portion, wherein the at least one post is positioned to a side of the rectangular-shaped portion.

18. The device of claim 1, further comprising:

at least two conductors formed on the surface of the substrate and electrically coupled to the pair of electrodes for applying said analog electrical signals to the pair of electrodes.

19. The device of claim 1, wherein the reflective element includes a conductive material.

20. The device of claim 19, wherein the reflective element includes a reflective material disposed on the conductive material.

21. The device of claim 19, wherein the reflective element is adapted to move in response to application of an analog electrical signal to the conductive material.

22. The device of claim 1, wherein the dielectric liquid is adapted to increase an actuation force on the reflective element as generated by a given applied voltage.

23. The device of claim 1, wherein the dielectric liquid is adapted to transfer heat within the micro-mirror device.

24. The device of claim 1, wherein drive circuitry for the micro-mirror device is formed in the substrate.

25. The device of claim 1, wherein the pair of electrodes includes a first electrode formed on the surface of the substrate adjacent to a first end of the reflective element and a second electrode formed on the surface of the substrate adjacent to a second end of the reflective element opposite the first end thereof.

26. The device of claim 25, wherein the reflective element is adapted to move in a first direction in response to application of an electrical signal of a first polarity and to move in a second direction opposite the first direction in response to application of an electrical signal of a second polarity.

27. A display device including the micro-mirror device of claim 1.

28. A display comprising an array of the display devices of claim 27.