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Continuously variable analog micro-mirror device

  • US 6,666,561 B1
  • Filed: 10/28/2002
  • Issued: 12/23/2003
  • Est. Priority Date: 10/28/2002
  • Status: Expired due to Fees
First Claim
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1. A micro-mirror device, comprising:

  • a substrate having a surface;

    a pair of electrodes disposed adjacent to the surface of the substrate and spaced apart from each other;

    a reflective element including conductive material spaced from the surface of the substrate;

    at least one post extending from the surface of the substrate and supporting the reflective element relative to the surface of the substrate and a dielectric liquid disposed at least between the reflective element and the pair of electrodes, wherein the reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes and the conductive material.

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