High temperature probe card

• US 6,667,631 B2
• Filed: 12/27/2001
• Issued: 12/23/2003
• Est. Priority Date: 12/27/2001
• Status: Expired due to Term

• Current Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Inventors: Ivanov, Ivan E.
• Primary Examiner(s): Cuneo, Kamand
• Assistant Examiner(s): KOBERT, RUSSELL MARC
• Application Number:
  US10/034,624
• Publication Number:
  US 20030146770A1
• Time in Patent Office: 726 Days
• Field of Search: 324/754-758, 324/760-762, 324/765, 165/80.1, 165/80.2, 165/80.3, 165/104.33, 361/697, 361/701, 361/702, 257/712, 257/720, 257/722
• US Class Current: 324/750.09
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 1/07378 using an intermediate adapter, e.g. space transformers G01R1/07371 takes precedence

Abstract

The probe card of the present invention permits testing of a semiconductor device-under-test under high temperatures and includes a plurality of printed circuit boards stacked together to form a probe interface board having a top surface and a lower testing face. A heat sink is mounted on the probe interface board at the top surface and extends to the lower testing face. A needle supporting module is carried by the heat sink at the lower testing face and has a plurality of probe needles for electrically connecting to electrical contacts of a semiconductor device-under-test.

Claims

1. A probe card for testing a semiconductor device-under-test comprising:

a plurality of printed circuit boards stacked together to form a probe interface board having a top surface and lower testing face;

a heat sink mounted on the probe interface board at the top surface and extending to the lower testing face; and

a needle supporting module carried by the heat sink at the lower testing face and having a plurality of probe needles for electrically connecting to electrical contacts of a semiconductor device-under-test.

2. A probe card according to claim 1, wherein said needle supporting module further comprises a thermally conducting ceramic material.

3. A probe card according to claim 1, wherein said the lower testing face on the probe interface board further comprises electrical contacts for interfacing with testing components carried by said probe interface board and an electrical connector extending from said electrical contacts to the needle supporting module for electrically connecting probe needles to testing components carried by said probe interface board.

4. A probe card according to claim 1, wherein said probe interface board is formed to have a central opening and edge defined by said central opening along which said heat sink extends around onto said lower testing face.

5. A probe card according to claim 4, wherein said central opening is substantially rectangularly configured.

6. A probe card according to claim 4, wherein said heat sink includes an outer portion, a central portion, and at least one radial arm extending from said outer portion to said central portion.

7. A probe card according to claim 4, and further comprising a mount formed within said heat sink on the portion that extends on said lower testing face onto which said needle supporting module mounts.

8. A probe card according to claim 1, wherein said heat sink is formed of a metallic material.

9. A probe card according to claim 8, wherein said metallic material forming said heat sink comprises one of copper or steel.

10. A probe card for testing a semiconductor device-under-test comprising:

a plurality of printed circuit boards stacked together to form a probe interface board having a top surface and lower testing face;

a heat sink mounted on the probe interface board at the top surface and extending to the lower testing face;

at least one copper layer positioned within said probe interface board and interconnecting said heat sink to accumulate heat within said probe interface board and transfer heat to said heat sink and provide internal support to said probe interface board; and

a needle supporting module carried by the heat sink at the lower testing face and having a plurality of probe needles for electrically connecting to electrical contacts of a semiconductor device-under-test.

11. A probe card according to claim 10, and further comprising two, spaced copper layers positioned within said probe interface board and interconnecting said heat sink.

12. A probe card according to claim 10, wherein said copper layer is electrically insulated as having no electrical interconnection to any electrical components of a printed circuit board forming said probe interface board.

13. A probe card according to claim 10, wherein said copper layer is formed to have at least twice the thickness as a printed circuit board forming the probe interface board.

14. A probe card according to claim 10, wherein said needle supporting module further comprises a thermally conducting ceramic material.

15. A probe card according to claim 10, wherein said the lower testing face on the probe interface board further comprises electrical contacts for interfacing with testing components carried by said probe interface board and an electrical connector extending from said electrical contacts to the needle supporting module for electrically connecting probe needles to testing components carried by said probe interface board.

16. A probe card according to claim 10, wherein said probe interface board is formed to have a central opening and edge defined by said central opening along which said heat sink extends around onto said lower testing face.

17. A probe card according to claim 16, wherein said central opening is substantially rectangularly configured.

18. A probe card according to claim 16, wherein said heat sink includes an outer portion, a central portion, and at least one radial arm extending from said outer portion to said central portion.

19. A probe card according to claim 16, and further comprising a mount formed within said heat sink on the portion that extends on said lower testing face onto which said needle supporting module mounts.

20. A probe card according to claim 10, wherein said heat sink is formed of a metallic material.

21. A probe card according to claim 10, wherein said metallic material comprises one of copper or steel.

22. A probe card for testing a semiconductor device-under-test comprising:

a plurality of printed circuit boards stacked together to form a probe interface board having a top surface, a central opening forming an edge, and a lower testing face;

a heat sink mounted on the probe interface board at the top surface and extending along said edge defined by said central opening to the lower testing face;

at least one copper layer positioned within said probe interface board and interconnecting said heat sink to accumulate heat within said probe interface board and transfer heat to said heat sink and provide internal support to said probe interface board; and

a needle supporting module carried by the heat sink at the lower testing face and having a plurality of probe needles for electrically connecting to electrical contacts of a semiconductor device-under-test.

23. A probe card according to claim 22, wherein said central opening is substantially rectangularly configured.

24. A probe card according to claim 22, and further comprising two, spaced copper layers positioned within said probe interface board and interconnecting said heat sink.

25. A probe card according to claim 22, wherein said copper layer is electrically insulated as having no electrical interconnection to any electrical components of a printed circuit board forming said probe interface board.

26. A probe card according to claim 22, wherein said copper layer is formed at least twice the thickness as a printed circuit board forming the probe interface board.

27. A probe card according to claim 22, wherein said needle supporting module further comprises a thermally conducting ceramic material.

28. A probe card according to claim 22, wherein said the lower testing face on the probe interface board further comprises electrical contacts for interfacing with testing components carried by said probe interface board and an electrical connector extending from said electrical contacts to the needle supporting module for electrically connecting probe needles to testing components carried by said probe interface board.

29. A probe card according to claim 22, wherein said heat sink includes an outer portion, a central portion, and at least one radial arm extending from said outer portion to said central portion.

30. A probe card according to claim 29, and further comprising a mount formed within said heat sink on the portion that extends on said lower testing face onto which said needle supporting module mounts.

31. A probe card according to claim 22, wherein said heat sink is formed of a metallic material.

32. A probe card according to claim 31, wherein said metallic material comprises one of copper or steel.