Radio frequency telemetry system for sensors and actuators
First Claim
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1. A microelectromechanical (MEM) radio frequency (RF) transmitting system having no directly connected power source comprising:
- a) a planar substrate having a first planar surface and a second parallel opposing surface, said second surface having a cavity etched therein b) a first capacitive plate positioned upon said first surface opposite said cavity, c) a second capacitive plate positioned upon said second surface such that said second capacitive plate extends across the opening of said cavity, e) a planar inductor coil affixed to said first surface whereby said inductor coil circumscribes said first capacitive plate, f) said first and second capacitive plates cooperating with said inductor coil to form a micro-miniature oscillating circuit whereby said microminiature oscillating circuit acts to charge the capacitor formed by said first and second opposing capacitive plates when said inductor coil is subjected to an electromagnetic field and transmits an RF signal when said electromagnetic field is removed, said RF signal being determined by the capacitive value of said capacitor.
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Abstract
The present invention discloses and teaches apparatus for combining Radio Frequency (RF) technology with novel micro-inductor antennas and signal processing circuits for RF telemetry of real time, measured data, from microelectromechanical system (MEMS) sensors, through electromagnetic coupling with a remote powering/receiving device. Such technology has many applications, but is especially useful in the biomedical area.
205 Citations
11 Claims
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1. A microelectromechanical (MEM) radio frequency (RF) transmitting system having no directly connected power source comprising:
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a) a planar substrate having a first planar surface and a second parallel opposing surface, said second surface having a cavity etched therein b) a first capacitive plate positioned upon said first surface opposite said cavity, c) a second capacitive plate positioned upon said second surface such that said second capacitive plate extends across the opening of said cavity, e) a planar inductor coil affixed to said first surface whereby said inductor coil circumscribes said first capacitive plate, f) said first and second capacitive plates cooperating with said inductor coil to form a micro-miniature oscillating circuit whereby said microminiature oscillating circuit acts to charge the capacitor formed by said first and second opposing capacitive plates when said inductor coil is subjected to an electromagnetic field and transmits an RF signal when said electromagnetic field is removed, said RF signal being determined by the capacitive value of said capacitor. - View Dependent Claims (2, 3, 4, 5)
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6. A microelectromechanical (MEM) radio frequency (RF) transmitting system having no directly connected power source comprising:
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a) a first planar substrate having a top planar surface and a bottom parallel opposing surface, said top surface having a cavity etched therein, said cavity having an opening in said top planar surface, b) a second planar substrate having a top planar surface and a bottom parallel opposing surface, said bottom surface having a cavity etched therein, said cavity having an opening in said bottom planar surface, c) said first planar substrate overlying said second planar substrate whereby said top surface of said second planar substrate is juxtaposed said bottom surface of said first planar substrate, thereby positioning said cavity in said first planar substrate opposite said cavity of said second planar substrate, e) a first flexible capacitive plate extending over the opening of said cavity of said first planar substrate, f) a second flexible capacitive plate extending over the opening of said cavity of said second planar substrate, g) a third rigid capacitive plate between said first and second planar substrates whereby said third capacitor plate lies between said first and second capacitive plates, h) a planar induction coil between said first and second planar substrates, said planar induction coil encircling said third capacitive plate, i) said first capacitive plate forming a first micro capacitor with said third capacitive plate and said second capacitive plate forming a second micro-capacitor with said third capacitive plate, each of said micro-capacitors forming a first and second oscillator circuit with said induction coil, j) a microprocessor in electrical communication with said first and second micro-capacitors wherein upon electromagnetic activation of said inductor coil, said microprocessor determines the difference C3 between the capacitance of said first and second micro-capacitors, k) said microprocessor in combination with said planar inductor coil forming a micro-miniature RF oscillating circuit whereby said micro-miniature oscillating circuit resonates at a RF frequency proportional to the capacitance value of C3 upon removal of electromagnetic activation. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification
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Current AssigneeUS Government As Represented By The Director National Security Agency
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Original AssigneeUnited States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration
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InventorsMiranda, Felix A., Simons, Rainee N.
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Primary Examiner(s)Ho, Tan
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Application NumberUS10/196,391Time in Patent Office490 DaysField of Search343/741, 343/742, 343/866, 343/867, 343/700.MS, 343/895, 340/572.1, 340/572.7, 340/825.54, 424/633, 333/66US Class Current343/895CPC Class CodesH01Q 1/2225 used in active tags, i.e. p...H01Q 7/005 with variable reactance for...
