Parallel kinematic micromanipulator

• US 6,671,975 B2
• Filed: 12/10/2001
• Issued: 01/06/2004
• Est. Priority Date: 12/10/2001
• Status: Expired due to Fees

• Current Assignee: ALIO Industries, Inc.
• Original Assignee: Hennessey C. William
• Inventors: Hennessey, C. William
• Primary Examiner(s): Fulton, Christopher W.
• Application Number:
  US10/014,956
• Publication Number:
  US 20030106230A1
• Time in Patent Office: 757 Days
• Field of Search: 336/45, 335/20, 335/33, 336/13, 336/44, 335/58, 335/61
• US Class Current: 33/645
• CPC Class Codes: B25J 17/0216 comprising a stewart mechanism
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: H02N 2/0095 producing combined linear and rotary motion, e.g. multi-direction positioners
• CPC Class Codes: H02N 2/026 by pressing one or more vibrators against the driven body

Abstract

A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

Claims

1. A parallel kinematic device, comprising:

a base plate;

a mobile plate; and

at least three kinematic links, wherein each of said kinematic links comprises;

a first end interconnected to said base plate by a first joint;

a second end interconnected to said mobile plate by a second joint;

a slide member;

a carrier member;

a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom, and wherein said first piezoelectric linear actuator assembly comprises;

a piezoelectric ceramic element comprising;

a first face;

a second face; and

at least a first edge;

a plurality of electrodes interconnected to said first face;

a single electrode interconnected to said second face; and

a finger interconnected to said at least a first edge, wherein selective electrical excitation of at least two of said plurality of electrodes causes said slide member to move relative to said carrier member.

2. The device of claim 1, wherein said piezoelectric actuator assembly comprises first and second piezoelectric ceramic actuators, wherein said first piezoelectric ceramic actuator comprises a finger acting on a first side of said slide member, and wherein said second piezoelectric ceramic actuator comprises a finger acting on a second side of said slide member.

3. The device of claim 1, wherein said at least three kinematic links comprise six kinematic links, and wherein said mobile plate can be moved with respect to said base plate with at least six degrees of freedom.

4. The device of claim 1, wherein said first joint comprises a universal joint.

5. The device of claim 1, wherein said second joint comprises:

a universal joint; and

a thrust bearing.

6. The device of claim 1, wherein at least one of said first and second joints comprise a spherical bearing.

7. The device of claim 1, wherein said slide member and said carrier member are interconnected by a prismatic joint.

8. The device of claim 7, wherein said prismatic joint comprises a cross roller bearing.

9. The device of claim 1, further comprising a controller wherein each of said kinematic links has a programmable length.

10. The device of claim 9, wherein each of said kinematic links further comprises an encoder, wherein a length of said kinematic links can be determined.

11. The device of claim 10, wherein said encoder comprises a high resolution optical encoder.

12. The device of claim 1, wherein said mobile plate is capable of being moved with respect to said base plate with a resolution of about 50 nm or less.

13. The device of claim 1, wherein said mobile plate is capable of being moved with respect to said base plate with a resolution of about 10 nm or less.

14. The device of claim 1, wherein said piezoelectric linear actuator assembly has a resolution of less than about 50 nanometers.

15. The device of claim 1, wherein a position of said mobile plate with respect to said base plate can be repeated to within at least 50 nanometers.

16. A method for positioning components comprising:

providing a mobile plate;

interconnecting a first component to said mobile plate;

providing a base plate;

providing a second component wherein a position of said second component is fixed relative to said base plate;

interconnecting said mobile plate and said base plate with a plurality of kinematic links, wherein each of said kinematic links comprises a linear piezoelectric actuator assembly;

providing electrical excitation to at least one of said linear piezoelectric actuator assemblies, wherein said first component is selectively placed in a first position relative to said second component with a repeatability of at least about 50 nm.

17. The method of claim 16, wherein said step of providing electrical excitation comprises:

determining a desired position of said mobile plate relative to said base plate;

calculating a length of each of said kinematic links required to place said mobile plate in said desired position relative to said base plate.

18. The method of claim 16, wherein said first component comprises a fiber optic cable, said method further comprising:

providing a test signal to said fiber optic cable;

monitoring an amplitude of said test signal received by said second component while said first component is in said first position, wherein a first amplitude is detected;

providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said first component is selectively placed in a second position relative to said second component;

monitoring an amplitude of said test signal received by said second component while said first component is in said second position, wherein a second amplitude is detected, and wherein said first amplitude is greater than said second amplitude;

providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said first component is returned to said first position relative to said second component.

19. The method of claim 18, wherein said first component is returned to said first position relative to said second component with a repeatability of at least about 50 nm.

20. A parallel kinematic device, comprising:

a base plate;

a mobile plate; and

at least three kinematic links, wherein each of said kinematic links comprises;

a first end interconnected to said base plate by a first joint;

a second end interconnected to said mobile plate by a second joint;

a slide member;

a carrier member;

a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and with a resolution of about 50 nm or less.

21. The device of claim 20, wherein said piezoelectric actuator assembly comprises first and second piezoelectric ceramic actuators, wherein said first piezoelectric ceramic actuator comprises a finger acting on a first side of said slide member, and wherein said second piezoelectric ceramic actuator comprises a finger acting on a second side of said slide member.

22. The device of claim 20, wherein said at least three kinematic links comprise six kinematic links, and wherein said mobile plate can be moved with respect to said base plate with at least six degrees of freedom.

23. The device of claim 20, wherein said first joint comprises a universal joint.

24. The device of claim 20, wherein said second joint comprises:

a universal joint; and

a thrust bearing.

25. The device of claim 20, wherein at least one of said first and second joints comprise a spherical bearing.

26. The device of claim 20, wherein said slide member and said carrier member are interconnected by a prismatic joint.

27. The device of claim 26, wherein said prismatic joint comprises a cross roller bearing.

28. The device of claim 20, further comprising a controller wherein each of said kinematic links has a programmable length.

29. The device of claim 28, wherein each of said kinematic links further comprises an encoder, wherein a length of said kinematic links can be determined.

30. The device of claim 29, wherein said encoder comprises a high resolution optical encoder.

31. The device of claim 20, wherein said mobile plate is capable of being moved with respect to said base plate with a resolution of about 10 nm or less.

32. The device of claim 20, wherein said piezoelectric linear actuator assembly has a resolution of less than about 50 nanometers.

33. The device of claim 20, wherein a position of said mobile plate with respect to said base plate can be repeated to within at least 50 nanometers.

34. A parallel kinematic device, comprising:

a base plate;

a mobile plate; and

at least three kinematic links, wherein each of said kinematic links comprises;

a first end interconnected to said base plate by a first joint;

a second end interconnected to said mobile plate by a second joint;

a slide member;

a carrier member;

a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and wherein said piezoelectric linear actuator assembly has a resolution of less than about 50 nanometers.

35. The device of claim 34, wherein said piezoelectric actuator assembly comprises first and second piezoelectric ceramic actuators, wherein said first piezoelectric ceramic actuator comprises a finger acting on a first side of said slide member, and wherein said second piezoelectric ceramic actuator comprises a finger acting on a second side of said slide member.

36. The device of claim 34, wherein said at least three kinematic links comprise six kinematic links, and wherein said mobile plate can be moved with respect to said base plate with at least six degrees of freedom.

37. The device of claim 34, wherein said first joint comprises a universal joint.

38. The device of claim 34, wherein said second joint comprises:

a universal joint; and

a thrust bearing.

39. The device of claim 34, wherein at least one of said first and second joints comprise a spherical bearing.

40. The device of claim 34, wherein said slide member and said carrier member are interconnected by a prismatic joint.

41. The device of claim 40, wherein said prismatic joint comprises a cross roller bearing.

42. The device of claim 34, further comprising a controller wherein each of said kinematic links has a programmable length.

43. The device of claim 42, wherein each of said kinematic links further comprises an encoder, wherein a length of said kinematic links can be determined.

44. The device of claim 43, wherein said encoder comprises a high resolution optical encoder.

45. The device of claim 34, wherein said mobile plate is capable of being moved with respect to said base plate with a resolution of about 10 nm or less.

46. The device of claim 34, wherein a position of said mobile plate with respect to said base plate can be repeated to within at least 50 nanometers.

47. A parallel kinematic device, comprising:

a base plate;

a mobile plate; and

at least three kinematic links, wherein each of said kinematic links comprises;

a first end interconnected to said base plate by a first joint;

a second end interconnected to said mobile plate by a second joint;

a slide member;

a carrier member;

a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and wherein a position of said mobile plate with respect to said base plate can be repeated to within at least 50 nanometers.

48. The device of claim 47, wherein said piezoelectric actuator assembly comprises first and second piezoelectric ceramic actuators, wherein said first piezoelectric ceramic actuator comprises a finger acting on a first side of said slide member, and wherein said second piezoelectric ceramic actuator comprises a finger acting on a second side of said slide member.

49. The device of claim 47, wherein said at least three kinematic links comprise six kinematic links, and wherein said mobile plate can be moved with respect to said base plate with at least six degrees of freedom.

50. The device of claim 47, wherein said first joint comprises a universal joint.

51. The device of claim 47, wherein said second joint comprises:

a universal joint; and

a thrust bearing.

52. The device of claim 47, wherein at least one of said first and second joints comprise a spherical bearing.

53. The device of claim 47, wherein said slide member and said carrier member are interconnected by a prismatic joint.

54. The device of claim 53, wherein said prismatic joint comprises a cross roller bearing.

55. The device of claim 47, further comprising a controller wherein each of said kinematic links has a programmable length.

56. The device of claim 55, wherein each of said kinematic links further comprises an encoder, wherein a length of said kinematic links can be determined.

57. The device of claim 56, wherein said encoder comprises a high resolution optical encoder.

58. The device of claim 47, wherein said mobile plate is capable of being moved with respect to said base plate with a resolution of about 10 nm or less.

59. A method for positioning components comprising:

providing a mobile plate;

interconnecting a fiber optic cable to said mobile plate;

providing a base plate;

providing a component wherein a position of said component is fixed relative to said base plate;

interconnecting said mobile plate and said base plate with a plurality of kinematic links, wherein each of said kinematic links comprises a linear piezoelectric actuator assembly;

providing electrical excitation to at least one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is selectively placed in a first position relative to said component;

providing a test signal to said fiber optic cable;

monitoring an amplitude of said test signal received by said component while said fiber optic cable is in said first position, wherein a first amplitude is detected;

providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is selectively placed in a second position relative to said component;

monitoring an amplitude of said test signal received by said component while said fiber optic cable is in said second position, wherein a second amplitude is detected, and wherein said first amplitude is greater than said second amplitude;

providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is returned to said first position relative to said component with a repeatability of at least about 50 nm.

60. The method of claim 59, wherein said step of providing electrical excitation comprises:

determining a desired position of said mobile plate relative to said base plate;

calculating a length of each of said kinematic links required to place said mobile plate in said desired position relative to said base plate.