Interferometric modulation of radiation
First Claim
Patent Images
1. A method of making arrays of microelectromechanical structure on a production line comprisingforming electronic features on a surface of a glass or plastic substrate that is at least as large as 14″
- ×
16″
, and micromachining electromechanical structures on the substrate.
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Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
1641 Citations
10 Claims
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1. A method of making arrays of microelectromechanical structure on a production line comprising
forming electronic features on a surface of a glass or plastic substrate that is at least as large as 14″ - ×
16″
, andmicromachining electromechanical structures on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
- ×
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8. A microelectromechanical systems device comprising:
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a substrate; and
an array of microelectromechanical structures formed on the substrate, wherein the array is at least as large as 14″
×
16″
.- View Dependent Claims (9, 10)
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Specification