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Method and apparatus for device linearization

  • US 6,674,563 B2
  • Filed: 05/14/2001
  • Issued: 01/06/2004
  • Est. Priority Date: 04/13/2000
  • Status: Expired due to Term
First Claim
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1. Apparatus for linearization of an output signal comprising:

  • a first input node adapted to receive an input signal for providing electrostatic control of a micromechanical device, the micromechanical device having a nonlinear response to increasing input signals;

    a correction signal according to the formula x/(a+x), wherein x is a variable and a is a constant; and

    an output node for providing an output signal responsive to a combination of the input signal and the correction signal, the output signal providing linearized electrostatic control of the micromechanical device.

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