Flexure assemblies and methods of making the same

• US 6,674,585 B1
• Filed: 02/04/2002
• Issued: 01/06/2004
• Est. Priority Date: 02/04/2002
• Status: Expired due to Term

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: SIIMPEL CORPORATION (Adeia Inc.)
• Inventors: Calvet, Robert J., Gutierrez, Roman C., Tang, Tony Kai
• Primary Examiner(s): Sugarman, Scott J.
• Assistant Examiner(s): Collins, Darryl J.
• Application Number:
  US10/067,597
• Time in Patent Office: 701 Days
• Field of Search: 359/811, 359/819, 359/821, 359/822, 359/823
• US Class Current: 359/822
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81C 2203/054 using structural alignment aids, e.g. spacers, interposers, male/female parts, rods or balls
• CPC Class Codes: B81C 3/005 Passive alignment, i.e. without a detection of the position of the elements or using only structural arrangements or thermodynamic forces
• CPC Class Codes: G02B 7/00 Mountings, adjusting means, or light-tight connections, for optical elements
• CPC Class Codes: Y10S 977/932 for electronic or optoelectronic application

Abstract

Micromachined passive alignment assemblies and methods of using and making the same are provided. The alignment assemblies are used to align at least one optical element. The alignment assemblies may be configured with kinematic, pseudo-kinematic, redundant or degenerate support structures. One alignment assembly comprises a base and a payload, which supports at least one optical element. The payload may be coupled to the base via connecting structures. The base, the payload and/or the connecting structures may have internal flexure assemblies for preloading a connection, thermal compensation and/or strain isolation.

Claims

1. A micromachined flexure assembly formed in a first structure of an optical element alignment assembly, the flexure assembly comprising:

a set of motion flexures; and

a preloader stage coupled to the set of motion flexures, wherein the set of motion flexures allows the preloader stage to deflect away from a second structure when the second structure comes in contact with the first structure and apply a load against the second structure to constrain the second structure in at least one degree of freedom with respect to the first structure, the second structure being mechanically separate from the first structure.

2. The micromachined flexure assembly of claim 1, further comprising a micromachined hole in the first structure on one side of the preloader stage, the hole being configured to receive the second structure and a preloader pin configured to deflect the preloader stage and apply a load to constrain the second structure.

3. The micromachined flexure assembly of claim 1, wherein the motion flexures and the preloader stage are fabricated using a lithographic micromachining process.

4. The micromachined flexure assembly of claim 1, wherein the set of motion flexures allows the preloader stage to move in at least one degree of freedom and constrains the preloader stage in at most five other degrees of freedom.

5. The micromachined flexure assembly of claim 1, further comprising a structure configured to limit an amount of deflection of the micromachined flexure assembly caused by loads applied to the second structure in the optical element alignment assembly.

6. The micromachined flexure assembly of claim 1, wherein the second structure is configured to support at least one optical element.

7. The micromachined flexure assembly of claim 1, wherein the first structure is configured to support at least one optical element.

8. The micromachined flexure assembly of claim 1, wherein the first structure and the second structure are configured to align at least one optical element.

9. The micromachined flexure assembly of claim 1, wherein the micromachined flexure assembly is formed in a tab portion of the first structure.

10. The micromachined flexure assembly of claim 1, wherein the micromachined flexure assembly is formed near a slot in the first structure, the slot being configured to receive a part of the second structure.

11. The micromachined flexure assembly of claim 10, wherein the micromachined flexure assembly and slot constrain the second structure in about one degree of freedom.

12. The micromachined flexure assembly of claim 1, wherein at least one of the first and second structures is configured to support an optical fiber.

13. The micromachined flexure assembly of claim 1, wherein at least one of the first and second structures is configured to support a lens.

14. The micromachined flexure assembly of claim 1, wherein at least one of the first and second structures is configured to support a mirror.

15. The micromachined flexure assembly of claim 1, where the motion flexures comprise one or more sets of planar elongated pieces integrated with the first structure.

16. A micromachined thermal compensation flexure assembly formed in a first structure of an optical element alignment assembly, the flexure assembly comprising:

a set of collinear flexures; and

a center stage coupled to the set of collinear flexures, wherein the set of collinear flexures and the center stage are configured to limit distortions in one direction due to a temperature change in an optical element supported by the first structure from affecting the first structure.

17. A micromachined thermal compensation flexure assembly formed in a first structure that is a part of an optical element alignment assembly, the flexure assembly comprising:

a set of collinear flexures; and

a center stage coupled to the set of collinear flexures, wherein the set of collinear flexures and the center stage are configured to limit distortions in one direction due to a temperature change in the first structure from affecting an optical element supported by the first structure.

18. The assembly of claim 17, wherein the first structure is configured to centrate the optical element.

19. A micromachined strain isolation flexure assembly formed in a first structure that is a part of an optical element alignment assembly, the flexure assembly comprising:

a set of collinear flexures; and

a center stage coupled to the set of collinear flexures, wherein the set of collinear flexures and the center stage are configured to limit strains in one direction in a supporting structure from transferring to the first structure.

20. A micromachined strain isolation flexure assembly formed in a first structure that is a part of an optical element alignment assembly, the flexure assembly comprising:

a set of collinear flexures; and

a center stage coupled to the set of collinear flexures, wherein the set of collinear flexures and the center stage are configured to limit strains in one direction in the first structure from affecting a second structure supported by the first structure.

21. A micromachined flexure assembly formed in a first structure of an optical element alignment assembly, the flexure assembly comprising at least two flexures coupled to a mounting tab and a body of the first structure, the mounting tab being configured to attach to a second structure of the alignment assembly, wherein the flexure assembly provides at least two degrees of freedom that are stiffer than other degrees of freedom.

22. A micromachined flexure assembly formed in a first structure of an optical element alignment assembly, the flexure assembly comprising at least one flexure coupled to a mounting tab and a body of the first structure, the mounting tab being configured to attach to a second structure of the alignment assembly, wherein the flexure assembly provides at least one degree of freedom that is stiffer than other degrees of freedom.

23. A method of making a micromachined flexure assembly in a first structure that is a part of an optical element alignment assembly, the method comprising:

using lithography to form a pattern on a substrate for the first structure, the pattern outlining a set of collinear, planar flexures attached to the first structure, a center stage coupled to the set of collinear flexures, and a hole adjacent to the center stage, the hole being configured to receive a second structure which is separate from the first structure; and

etching the substrate to form the set of collinear, planar flexures, center stage and hole according to the pattern.

24. The method of claim 23, wherein the substrate comprises a silicon wafer.

25. The method of claim 23, wherein using lithography to form the pattern comprises:

applying a photoresist layer onto a surface of the substrate;

aligning a pre-designed mask near the surface of the substrate;

exposing the surface of the substrate to a source of radiation; and

removing parts of the photoresist layer from the surface of the substrate.