Microgyroscope with electronic alignment and tuning
First Claim
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1. A micro-gyroscope having a resonator having mechanical x and y axes, said micro-gyroscope comprising:
- a plurality of electrodes spaced about a central hub and having electrical outputs, at least two electrodes on one side of said mechanical x axis being drive electrodes, and at least two electrodes on the other side of said x axis being sense electrodes, said resonator spaced from and located above said plurality of electrodes, whereby motion of said resonator is induced by said drive electrodes and sensed by said sense electrodes; and
a control circuit for aligning said electrical output of said electrodes with said mechanical axes, said control circuit electronically transforms control and sense voltages for said micro-gyroscope to eliminate a first harmonic signal.
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Abstract
A micro-gyroscope having electronic alignment by performing an electronic coordinate transformation on control voltages (VTX, VTy) through an attenuator network thereby canceling first and second harmonic signals from the output (Vthx, Vthy). The micro-gyroscope is tuned by automatic electronic compensation based on quadrature error that is applied to correct for variations in the gyroscope.
92 Citations
13 Claims
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1. A micro-gyroscope having a resonator having mechanical x and y axes, said micro-gyroscope comprising:
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a plurality of electrodes spaced about a central hub and having electrical outputs, at least two electrodes on one side of said mechanical x axis being drive electrodes, and at least two electrodes on the other side of said x axis being sense electrodes, said resonator spaced from and located above said plurality of electrodes, whereby motion of said resonator is induced by said drive electrodes and sensed by said sense electrodes; and
a control circuit for aligning said electrical output of said electrodes with said mechanical axes, said control circuit electronically transforms control and sense voltages for said micro-gyroscope to eliminate a first harmonic signal. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for electronically aligning a micro-gyroscope having a network of attenuators, said method comprising the steps of:
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determining the natural frequencies of the drive and sense modes Zx and Zy aligned with the mechanical drive axis and the mechanical sense axis;
setting all attenuators to nominal values;
verifying that all sum and difference functions in the micro-gyroscope control circuit have no significant phase shifts at Zx and Zy;
aligning an electrical output of said drive electrodes by adjusting a predetermined attenuator in said network of attenuators; and
aligning an electrical output of said sense electrodes by adjusting a predetermined attenuator in said network of attenuators. - View Dependent Claims (8, 9, 10, 11, 12, 13)
exciting a first drive electrode with a sinusoidal voltage at frequency Zy, adjusting said predetermined attenuator until a first harmonic component of a sense signal is at a minimum;
exciting a second drive electrode with a sinusoidal voltage at a frequency Zx; and
adjusting said predetermined attenuator until a first harmonic component of a second sense signal is at a minimum.
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9. The method as claimed in claim 8 wherein said steps of exciting a first and second drive electrode and adjusting an attenuator are repeated for refined alignment.
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10. The method as claimed in claim 8 wherein said step of aligning said sense electrodes further comprises the steps of:
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exciting a first drive electrode with a sinusoidal voltage at frequency Zx;
adjusting said predetermined attenuator until a first harmonic component of a sense signal is at a minimum;
exciting a second drive electrode with a sinusoidal voltage at a frequency Zy; and
adjusting said predetermined attenuator until a first harmonic component of a second sense signal is at a minimum.
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11. The method as claimed in claim 10 wherein said steps of exciting a first and second drive electrode and adjusting said predetermined attenuator are repeated for refined alignment.
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12. The method as claimed in claim 7 further comprising the step of electronically canceling a second harmonic component on said first sense electrode.
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13. The method as claimed in claim 12 wherein said step of electronically canceling a second harmonic component further comprises the steps of:
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squaring the drive signal; and
subtracting a fraction of said squared signal from said sensed signal.
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Specification