Planar-constructed spatial micro-stage

• US 6,675,671 B1
• Filed: 05/22/2002
• Issued: 01/13/2004
• Est. Priority Date: 05/22/2002
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Allen, James J., Benavides, Gilbert L., Jokiel, Bernhard Jr., Bieg, Lothar F.
• Primary Examiner(s): Bucci, David A.
• Assistant Examiner(s): MCANULTY, TIMOTHY P
• Application Number:
  US10/153,109
• Time in Patent Office: 601 Days
• Field of Search: 744/900.1, 744/900.7, 744/900.9, 414/729, 901/28, 901/29
• US Class Current: 74/490.09
• CPC Class Codes: B23Q 1/5462 with one supplementary sliding pair
• CPC Class Codes: B23Q 1/5468 a single rotating pair followed parallelly by a single rotating pair
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: B25J 9/1065 with parallelograms
• CPC Class Codes: B81C 99/002 Apparatus for assembling MEMS, e.g. micromanipulators micromanipulators per se B25J7/00
• CPC Class Codes: Y10T 74/20354 Planar surface with orthogonal movement only

Abstract

A multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate can, when activated, move out of the plane of the substrate without additional manufacturing steps. The platform is connected to the substrate by at least three linkages, each linkage being pivotally connected to the platform and the base. At least two of the base connections are to powered traveling devices that are manufactured at one end of a path and which may be moved to locations along the path to cause the platform to move to predetermined positions. The entire assembly, including hinges, is manufactured as planar structures; preferably by a thin film technology such as MEMS.

Claims

1. A micro-electro mechanical multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate, comprising:

a moveable planar platform having three connection points, said connection points defining a platform triangle, said platform being capable of being moved away from the plane of said substrate;

three fixed-length linkages capable of being moved away from the plane of said substrate,

each linkage having one end pivotally connected to one of said platform connection points through a platform joint, each connection point being connected to only one linkage; and

each linkage having an opposed end pivotally connected to said substrate;

at least one linear drive, each drive including a traveling member capable of controlled movement along a linear path adjacent said substrate; and

each traveling member being pivotally connected to an opposed end of one of said linkages through a base joint, each linkage being connected to only one traveling member;

wherein when each of said opposed ends are in a predetermined position, said linkages and said platform are coplanar to and adjacent to said substrate, and when any of said traveling members is in any other position along said linear path, at least the linkage connected to that member and said platform is neither coplanar to nor adjacent to said substrate.

2. The platform assembly of claim 1 wherein three linear paths define a drive triangle concentric with said platform triangle;

and one traveling member is connected through a base joint to the opposed end of each linkage.

3. The platform assembly of claim 2 wherein

each base joint comprises a hinge having a first part rigidly affixed to said traveling member and a mating part rotatable around an axis parallel to the adjacent drive path;

each platform joint comprises a hinge having a first part rigidly affixed to said platform and a mating part rotatable around an X axis parallel to the adjacent drive path;

each mating part includes a rotatable member affixed thereto, said rotatable member rotating about a Z axis perpendicular to and spaced from the X axis, and

the ends of said linkages being connected to said rotatable members.

4. The platform assembly of claim 3 wherein each linkage consists of two parallel links and each mating part of each hinge has two rotatable members, each rotatable member being connected to one link.

5. The platform assembly of claim 4 wherein said joints, linkages, and substrate are silicon.

6. The platform assembly of claim 1 wherein said platform assembly is silicon.

7. The platform assembly of claim 1 wherein the three linear paths radiate from a central point, each path being spaced 120°

from each other path, and the one end of each path is the end furthest from the central point.

8. The platform assembly of claim 7 wherein said platform assembly is silicon.

9. The platform assembly of claim 7 wherein each base joint comprises

a hinge having a first part rigidly affixed to said traveling member and a rotatable member affixed thereto, said rotatable member rotating about a Z axis perpendicular to said substrate;

and

a yolk rotatably connected to said rotatable member along an X axis perpendicular to and intersecting said Z axis, said yolk having an outer surface extending around and not touching said rotatable member, and spaced ends which rotatably connect to said rotatable member along said second axis, said yolk being connected to said linkage.

10. The platform assembly of claim 7 wherein each platform joint comprises

a pivoting member rigidly connected to said platform;

a receiving member adjacent and pivotally connected to said pivoting member for rotation about a Y axis extending radially from said platform;

a linkage-connecting member pivotally connected to and rotatable about said receiving member along an X axis perpendicular to and intersecting said Y axis;

said linkage-connecting member being rigidly attached to an end of a linkage.

11. The platform assembly of claim 10 wherein said linkage-connecting member is a yolk having a cross-member rigidly connected to an end of a linkage;

two parallel spaced end pieces extending from said cross-member; and

a pair of axially aligned pins, one pin extending from each end piece into pockets in said receiving member along said X axis;

said receiving structure having a shape configured to fit within and not touch said yolk.

12. The platform assembly of claim 9 wherein each platform joint comprises

a pivoting member rigidly connected to said platform;

a receiving member adjacent and pivotally connected to said pivoting member for rotation about a Y axis extending radially from said platform;

a linkage-connecting member pivotally connected to and rotatable about said receiving member along an X axis perpendicular to and intersecting said Y axis;

said linkage-connecting member being rigidly attached to an end of a linkage.

13. The platform assembly of claim 9 wherein said platform assembly is silicon.

14. The platform assembly of claim 12 wherein said platform assembly is silicon.

15. The platform assembly of claim 9 wherein said base joint further comprises a pivoting member pivotally connected to said yolk for rotation about a Y axis perpendicular to and intersecting each of said X and Z axes.

16. The platform assembly of claim 15 wherein each platform joint comprises a hinge having a first part affixed to said platform and a second part affixed to said linkage, said first and second parts being pivotally connected to each other about an axis.

17. The platform assembly of claim 16 wherein said platform assembly is silicon.

18. The platform assembly of claim 5 wherein each traveling member is powered by an electrostatic motor affixed to said substrate.

19. The platform assembly of claim 6 wherein each traveling member is powered by an electrostatic motor affixed to said substrate.

20. The platform assembly of claim 13 wherein each traveling member is powered by an electrostatic motor affixed to said substrate.

21. The platform assembly of claim 19 wherein said traveling member is affixed to a moveable rack aligned with said drive path, said rack having a plurality of teeth extending along its length;

said electrostatic motor comprising three parallel electrostatic motors, each said motor having a pusher having teeth for engaging said rack, each motor being controllable when energized to move its pusher into and out of contact with said rack teeth, said pushers being spaced along said rack such that by energizing said pushers in either of two predetermined orders, said rack can be moved in either of two directions along said drive path.

22. The platform assembly of claim 21 wherein said rack is constrained against lateral movement by a bracket adjacent each pusher, said bracket having a vertical member extending from said substrate on the opposite side of said rack from said pusher.

23. The platform assembly of claim 21 wherein for N≧

3 pushers, each pusher pressing teeth into said rack causes said rack to move 1/N the distance between adjacent teeth, said pushers being spaced such that after each pusher has been actuated and has moved said rack, another pusher is in the same relative position to said rack as the previously actuated pusher.