Sputtering target, method of making same, and high-melting metal powder material
First Claim
1. A method of refining a metal powder comprising the steps of:
- passing a metal into a thermal plasma into which a-hydrogen gas is introduced; and
refining the metal powder to have a purity of not less than 99.999% and an oxygen concentration of not more than 100 ppm.
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Abstract
There is provided a method of making a high-melting metal powder which has high purity and excellent formability and, particularly, of a metal powder of spherical particles made of Ta, Ru, etc. having a higher melting point than iron. There is also provided a target of high-melting metal or its alloy, which is made by the sintering under pressure of these powders and which has high purity and a low oxygen concentration and shows high density and a fine and uniform structure. A powder metal material mainly composed of a high-melting metal material is introduced into a thermal plasma into which hydrogen gas has been introduced, thereby to accomplish refining and spheroidizing. Further, an obtained powder is pressed under pressure by hot isostatic pressing, etc.
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Citations
7 Claims
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1. A method of refining a metal powder comprising the steps of:
- passing a metal into a thermal plasma into which a-hydrogen gas is introduced; and
refining the metal powder to have a purity of not less than 99.999% and an oxygen concentration of not more than 100 ppm. - View Dependent Claims (2)
- passing a metal into a thermal plasma into which a-hydrogen gas is introduced; and
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3. A method of making a target comprising the steps of introducing a metal powder mainly composed of refractory metal into a thermal plasma into which hydrogen gas has been introduced, thereby to perform simultaneous refining of the metal powder and spheroidizing of the metal powder;
- and sintering the obtained metal powder under pressure.
- View Dependent Claims (4, 5, 6, 7)
Specification