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Sputtering target, method of making same, and high-melting metal powder material

  • US 6,676,728 B2
  • Filed: 08/21/2002
  • Issued: 01/13/2004
  • Est. Priority Date: 07/07/1999
  • Status: Expired due to Term
First Claim
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1. A method of refining a metal powder comprising the steps of:

  • passing a metal into a thermal plasma into which a-hydrogen gas is introduced; and

    refining the metal powder to have a purity of not less than 99.999% and an oxygen concentration of not more than 100 ppm.

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