Manufacturing method of collective substrate of active-matrix substrates, manufacturing method of active-matrix substrates, and inspecting method of collective substrates of active-matrix substrates

• US 6,677,171 B1
• Filed: 11/14/2000
• Issued: 01/13/2004
• Est. Priority Date: 07/14/1998
• Status: Expired due to Term

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Yamashita, Toshihiro, Takahama, Manabu, Katayama, Mikio, Nagata, Hisashi
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US09/710,847
• Time in Patent Office: 1,155 Days
• Field of Search: 438/14, 438/16, 438/17, 438/18, 438/33, 438/30, 324/770, 324/765
• US Class Current: 438/17
• CPC Class Codes: G02F 1/1309 Repairing; Testing
• CPC Class Codes: G02F 1/133351 Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body

Abstract

A collective substrate of active-matrix substrates is divided into a first block and a second block. In cells of the first block and the second block, from a corresponding signal input pad group, an inspection scanning signal is inputted via a scanning-line short ring connecting line to scanning lines, an inspection display signal is inputted via a signal-line short ring connecting line to signal lines, and an auxiliary capacity wire signal is inputted via an auxiliary capacity wire main wire connecting line to auxiliary capacity wires. This arrangement makes it possible to perform an electrical inspection with high accuracy and efficiency on a large-format active-matrix substrate, and to manufacture an inspection probe frame in a simple manner at low cost.

Claims

1. A method for manufacturing a collective substrate of active-matrix substrates, comprising the steps of:

(1) forming a plurality of pixel electrodes, pixel switching elements, each being connected with each of said pixel electrodes, and a plurality of scanning lines and signal lines which drive said pixel electrodes via said pixel switching elements and are disposed in a lattice form, in each of said active-matrix substrates;

(2) forming a scanning-line common wire connected with said scanning lines and a signal-line common wire connected with said signal lines for each of said active-matrix substrates; and

(3) electrically connecting the scanning-line common wire to another and the signal-line common wire to another among a plurality of active-matrix substrates.

2. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, further comprising a step of anodizing said scanning-line common wire and said signal-line common wire.

3. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, wherein, in said step (2), said scanning-line common wire and said signal-line common wire are respectively formed in one of a scanning-line layer and a signal-line layer, that is lower than the other layer.

4. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, wherein, in said step (3), said scanning-line common wire and said signal-line common wire are respectively connected in one of a scanning-line layer and a signal-line layer, that is upper than the other layer.

5. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, wherein, in said step (3), said active-matrix substrates of said collective substrate are divided into a plurality of blocks, and as for the active-matrix substrates in each of the blocks, said scanning-line common wires are electrically connected with each other and said signal-line common wires are electrically connected with each other.

6. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 5, wherein, in said step (3), said scanning-line common wire and said signal-line common wire of one block are electrically connected respectively with said scanning-line common wire and said signal-line common wire of another block.

7. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, further comprising the step of supplying an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire so as to detect a pixel voltage in each of said active-matrix substrates.

8. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, further comprising the step of disposing a signal inputting section, which inputs an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire, at positions in common among a plurality of kinds of collective substrates.

9. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 8, further comprising the step of supplying the inspection scanning signal and the inspection display signal respectively to said scanning-line common wire and said signal-line common wire from the signal inputting section using inspection signal supplying means which is common to the plurality of kinds of collective substrates.

10. The method for manufacturing the collective substrate of the active-matrix substrates as defined in claim 1, further comprising a step of electrically cutting out said scanning-line common wire and said signal-line common wire in each of said active-matrix substrates.

11. A method for manufacturing active-matrix substrates, comprising the steps of:

(1) forming a plurality of pixel electrodes, pixel switching elements, each being connected with each of said pixel electrodes, and a plurality of scanning lines and signal lines which drive said pixel electrodes via said pixel switching elements and are disposed in a lattice form, in each of the plurality of active-matrix substrates with respect to a single collective substrate including the plurality of active-matrix substrates;

(2) forming a scanning-line common wire connected with said scanning lines and a signal-line common wire connected with said signal lines for each of said active-matrix substrates;

(3) electrically connecting the scanning-line common wire to another and the signal-line common wire to another among a plurality of active-matrix substrates; and

(4) cutting the collective substrate for each of the plurality of active-matrix substrates.

12. The method for manufacturing active-matrix substrates as defined in claim 11, further comprising the step of anodizing said scanning-line common wire and said signal-line common wire.

13. The method for manufacturing active-matrix substrates as defined in claim 11, wherein, in said step (2), said scanning-line common wire and said signal-line common wire are respectively formed in one of a scanning-line layer and a signal-line layer, that is lower than the other layer.

14. The method for manufacturing active-matrix substrates as defined in claim 11, wherein, in said step (3), said scanning-line common wire and the signal-line common wire are respectively connected in one of a scanning-line layer and a signal-line layer, that is upper than the other layer.

15. The method for manufacturing active-matrix substrates as defined in claim 11, wherein, in said step (3), said active-matrix substrates of said collective substrate are divided into a plurality of blocks, and as for the active-matrix substrates in each of the blocks, said scanning-line common wires are electrically connected with each other and said signal-line common wires are electrically connected with each other.

16. The method for manufacturing active-matrix substrates as defined in claim 15, wherein, in said step (3), said scanning-line common wire and said signal-line common wire of one block are electrically connected respectively with said scanning-line common wire and said signal-line common wire of another block.

17. The method for manufacturing active-matrix substrates as defined in claim 11, further comprising the step of supplying an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire so as to detect a pixel voltage in each of said active-matrix substrates.

18. The method for manufacturing active-matrix substrates as defined in claim 11, further comprising the step of disposing a signal inputting section, which inputs an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire, at positions in common among a plurality of kinds of collective substrates.

19. The method for manufacturing active-matrix substrates as defined in claim 18, further comprising the step of disposing a signal inputting section, which inputs the inspection scanning signal and the inspection display signal respectively to said scanning-line common wire and said signal-line common wire, at positions in common among the plurality of kinds of collective substrates.

20. The method for manufacturing active-matrix substrates as defined in claim 11, further comprising a step of electrically cutting out said scanning-line common wire and said signal-line common wire in each of said active-matrix substrates.

21. A method for inspecting a collective substrate of active-matrix substrates, a plurality of said active-matrix substrates, each including:

on an insulating substrate,

a plurality of pixel electrodes;

pixel switching elements, each being connected with each of said pixel electrodes;

a plurality of scanning lines and signal lines which drive said pixel electrode via said pixel switching element and are disposed in a lattice form;

a scanning-line common wire which is connected with said scanning lines; and

a signal-line common wire which is connected with said signal lines,

wherein said scanning-line common wires are electrically connected with each other and said signal-line common wires are electrically connected with each other so as to form said collective substrate,

said method comprising a step of supplying an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire so as to detect a pixel voltage in each of said active-matrix substrates.

22. The method for inspecting a collective substrate of active-matrix substrates as defined in claim 21, wherein inspection signal supplying means which is common to a plurality of kinds of collective substrates is used to inspect the collective substrates on which is disposed a signal inputting section, which inputs an inspection scanning signal and an inspection display signal respectively to said scanning-line common wire and said signal-line common wire, at positions in common among the plurality of kinds of collective substrates.