System and method for constraining totally released microcomponents

• US 6,677,225 B1
• Filed: 07/14/2000
• Issued: 01/13/2004
• Est. Priority Date: 07/14/2000
• Status: Expired due to Fees

• Current Assignee: Zyvex Labs, Llc
• Original Assignee: Zyvex Corporation
• Inventors: Parker, Eric G., Skidmore, George D., Ellis, Matthew D.
• Primary Examiner(s): Smith, Matthew
• Assistant Examiner(s): Lee, Jr., Granvill D
• Application Number:
  US09/616,500
• Time in Patent Office: 1,278 Days
• Field of Search: 438/598, 438/619, 438/48-50, 438/254, 438/456, 438/733-739, 257/499, 257/414-417, 156/345, 385/14, 385/52
• US Class Current: 438/598
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 2203/055 Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60

Abstract

A system and method are disclosed which constrain a microcomponent that is totally released from a substrate for handling of such totally released microcomponent. A preferred embodiment provides a system and method which constrain a totally released microcomponent to a base (e.g., another microcomponent or a substrate). For example, a preferred embodiment provides constraining members that work to constrain a microcomponent to a substrate as such microcomponent is totally released from such substrate. Accordingly, such constraining members may aid in preserving the microcomponent with its substrate during the release of such microcomponent from its substrate during fabrication. Additionally, a preferred embodiment provides constraining members that are suitable for constraining a totally released microcomponent to a base for post-fabrication handling of the microcomponent. To further aid in post-fabrication handling of totally released microcomponents, a preferred embodiment may be implemented as a “pallet” having one or more microcomponents constrained thereto. Moreover, constraining members of a preferred embodiment enable the totally released microcomponent to be removed from such constraints when desired, but prevents the totally released microcomponent from inadvertently escaping such constraints. For instance, in one embodiment, the constraining members are implemented as moveable members that can be moved to unconstrain the totally released microcomponent from its base.

Claims

1. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

providing at least one constraining member in a predefined area to removably constrain said at least one released microcomponent to a said predefined area.

2. The method of claim 1 wherein said releasing of said at least one microcomponent from a said substrate of fabrication does not include breaking a physical coupling between said at least one microcomponent and said substrate of fabrication.

3. The method of claim 1 wherein said predefined area is a base.

4. The method of claim 3 wherein said base is a substrate.

5. The method of claim 3 wherein said base is a pallet.

6. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

providing at least one constraining member to constrain said at least one released microcomponent to a base, wherein said base is another microcomponent.

7. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

constraining said at least one released microcomponent to a base, wherein said constraining includes overhanging at least a portion of a vertical constraining member over said at least one released microcomponent to restrict vertical movement of said at least one released microcomponent relative to said base.

8. The method of claim 7 wherein said at least a portion of a vertical constraining member includes at least one flap overhanging said at least one released microcomponent.

9. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

constraining said at least one released microcomponent to a base, wherein said constraining includes arranging at least one horizontal constraining member to restrict lateral movement of said at least one released microcomponent relative to said base.

10. The method of claim 9 wherein said at least one horizontal constraining member restricts lateral translational movement of said at least one released microcomponent relative to said base.

11. The method of claim 9 wherein said at least one horizontal constraining member restricts lateral rotational movement of said at least one released microcomponent relative to said base.

12. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

constraining said at least one released microcomponent to a base, wherein said constraining permits an acceptable degree of movement of said at least one released microcomponent relative to said base.

13. The method of claim 12 wherein said constraining permits said at least one released microcomponent to move approximately 1 μ

m vertically relative to said base.

14. The method of claim 12 wherein said constraining permits said at least one released microcomponent to move approximately 1 μ

m laterally relative to said base.

15. A method of handling microcomponents, said method comprising:

fabricating at least one microcomponent on a substrate of fabrication;

releasing said at least one microcomponent from said substrate of fabrication; and

providing at least one constraining member in a predefined area to constrain said at least one released microcomponent to said predefined area, wherein said constraining includes constraining said at least one microcomponent to said predefined area during said fabricating.

16. The method of claim 15 wherein said constraining further includes:

constraining said at least one microcomponent during exposure of said at least one microcomponent to a releasing agent to release said microcomponent from said substrate of fabrication.

17. A method of handling microcomponents, said method comprising:

releasing at feast one microcomponent that is released from a substrate of fabrication; and

constraining said at least one released microcomponent to a predefined area with at least one constraining member provided in said predefined area; and

unconstraining said at least one released microcomponent.

18. The method of claim 17 wherein said unconstraining includes:

moving said at least one constraining member to remove said at least one released microcomponent from constraint of said at least one constraining member.

19. The method of claim 17 wherein said unconstraining includes:

applying sufficient force against said at least one constraining member to cause said at least one constraining member to flex to allow removal of said at least one released microcomponent from constraint of said at least one constraining member.

20. An apparatus for handling microcomponents, said apparatus comprising:

a base from which at least one microcomponent is released; and

at least one constraining member to constrain said at least one released microcomponent to said base, wherein said at least one constraining member is arranged to allow for unconstraining said at least one released microcomponent when desired.

21. The apparatus of claim 20 wherein said at least one constraining member is arranged to constrain said at least one microcomponent during release of said at least one microcomponent from a substrate.

22. The apparatus of claim 21 wherein said at least one constraining member is arranged to constrain said at least one microcomponent during exposure of said at least one microcomponent to a releasing agent to release said microcomponent from said substrate.

23. The apparatus of claim 20 wherein said at least one constraining member is moveable.

24. The apparatus of claim 23 wherein said at least one constraining member can be moved to unconstrain said at least one released microcomponent from said base.

25. The apparatus of claim 20 wherein said at least one constraining member is flexible.

26. The apparatus of claim 25 wherein said at least one constraining member can be flexed to unconstrain said at least one released microcomponent from said base.

27. The apparatus of claim 20 wherein said at least one constraining member is arranged to constrain said at least one released microcomponent to a predefined area.

28. The apparatus of claim 20 wherein said base is a substrate.

29. The apparatus of claim 20 wherein said base is another microcomponent.

30. The apparatus of claim 20 wherein said base is a pallet.

31. The apparatus of claim 20 wherein said at least one constraining member is arranged to permit an acceptable degree of movement of said at least one released microcomponent relative to said base.

32. The apparatus of claim 31 wherein said at least one constraining member is arranged to permit said at least one released microcomponent to move approximately 1 μ

m vertically relative to said base.

33. The apparatus of claim 31 wherein said at least one constraining member is arranged to permit said at least one released microcomponent to move approximately 1 μ

m laterally relative to said base.

34. An apparatus for handling microcomponents, said apparatus comprising:

a base from which at least one microcomponent is released; and

at least one constraining member to constrain said at least one released microcomponent to said base, wherein said at least one constraining member includes at least one vertical constraining member arranged such that at least a portion of said vertical constraining member overhangs at least a portion of said at least one microcomponent to restrict vertical movement of said at least one microcomponent relative to said base.

35. The apparatus of claim 34 wherein said at least a portion of said vertical constraining member includes at least one flap overhanging at least a portion of said at least one microcomponent.

36. The apparatus of claim 34 wherein said at least one constraining member is arranged to allow for unconstraining said at least one released microcomponent when desired.

37. An apparatus for handling microcomponents, said apparatus comprising:

a base from which at least one microcomponent is released; and

at least one constraining member to constrain said at least one released microcomponent to said base, wherein said at least one constraining member includes at least one horizontal constraining member arranged to restrict lateral movement of said at least one microcomponent relative to said base.

38. The apparatus of claim 37 wherein said at least one horizontal constraining member restricts lateral translational movement of said at least one microcomponent relative to said base.

39. The apparatus of claim 37 wherein said at least one horizontal constraining member restricts lateral rotational movement of said at least one microcomponent relative to said base.

40. A system comprising:

at least one microcomponent that is released from a substrate; and

means for constraining movement of said at least one microcomponent relative to a base, wherein said constraining means is moveable relative to said base.

41. The system of claim 40 wherein said means for constraining comprises at least one vertical constraining means arranged to restrict vertical movement of said at least one microcomponent relative to said base.

42. The system of claim 40 wherein said means for constraining comprises at least one horizontal constraining means arranged to restrict lateral movement of said at least one microcomponent relative to said base.

43. The system of claim 42 wherein said at least one horizontal constraining means restricts lateral translational movement of said at least one microcomponent relative to said base.

44. The system of claim 42 wherein said at least one horizontal constraining means restricts lateral rotational movement of said at least one microcomponent relative to said base.

45. The system of claim 40 wherein said constraining means is arranged to constrain movement of said at least one microcomponent during release of said at least one microcomponent from said substrate.

46. The system of claim 45 wherein said constraining means is arranged to constrain movement of said at least one microcomponent during exposure of said at least one microcomponent to a releasing agent to totally release said microcomponent from said substrate.

47. The system of claim 40 wherein said means for constraining is arranged to constrain movement of said at least one released microcomponent to a predefined area of said base.

48. The system of claim 40 wherein said base is a substrate.

49. The system of claim 40 wherein said base is another microcomponent.

50. The system of claim 40 wherein said base is a pallet.

51. The system of claim 40 wherein said means for constraining is arranged to permit an acceptable degree of movement of said at least one released microcomponent relative to said base.

52. The system of claim 51 wherein said means for constraining is arranged to permit said at least one released microcomponent to move approximately 1 μ

m vertically relative to said base.

53. The system of claim 51 wherein said means for constraining is arranged to permit said at least one released microcomponent to move approximately 1 μ

m laterally relative to said base.

54. The system of claim 40 further comprising:

at least one horizontal constraining means arranged to restrict lateral movement of said at least one microcomponent relative to said base.

55. The system of claim 54 wherein said at least one horizontal constraining means is moveable.

56. A system comprising:

at least one microcomponent that is released from a substrate; and

means for constraining, said at least one microcomponent to a base, wherein said constraining means is moveable for unconstraining said at least one microcomponent from said base.

57. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from all substrates; and

providing at least one constraining member in a predefined area for constraining movement of said at least one released microcomponent relative to said predefined area.

58. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

constraining movement of said at least one released microcomponent relative to said substrate of fabrication.

59. The method of claim 58 wherein said constraining comprises;

constraining movement of said at least one released microcomponent relative to a predefined area of said substrate of fabrication.

60. The method of claim 58 wherein said constraining comprises:

removably constraining said at least one released microcomponent to said substrate of fabrication.

61. The method of claim 58 wherein said constraining comprises:

overhanging at least a portion of a vertical constraining member over at least a portion of said at least one released microcomponent to restrict vertical movement of said at least one released microcomponent relative to said substrate of fabrication.

62. A method of handling microcomponents, said method comprising:

releasing at least one microcomponent from a substrate of fabrication; and

constraining said at least one released microcomponent to a base without bonding said at least one released microcomponent to said base.

63. An apparatus for handling microcomponents, said apparatus comprising:

a base from which at least one microcomponent is released; and

at least one constraining member to constrain said at least one released microcomponent to said base, wherein said at least one constraining member is moveable relative to said base.

64. The apparatus of claim 63 wherein said constraining member is moveable to a position for unconstraining said at least one released microcomponent when desired.

65. The apparatus of claim 63 wherein said base comprises a substrate on which said at least one released microcomponent is fabricated.

66. A system comprising:

at least one microcomponent that is released from a substrate of fabrication; and

means for constraining said at least one released microcomponent to said substrate of fabrication.

67. The system of claim 66 wherein said constraining means is moveable for unconstraining said at least one microcomponent from said substrate of fabrication.