Jamin-type interferometers and components therefor

• US 6,678,056 B2
• Filed: 07/23/2001
• Issued: 01/13/2004
• Est. Priority Date: 07/27/2000
• Status: Active Grant

• Current Assignee: Angela Christine Downs, Qioptiq Photonics Ltd. (Excelitas Technologies Holdings LLC), Michael John Downs
• Original Assignee: Angela Christine Downs, Michael John Downs
• Inventors: Downs, Michael John
• Primary Examiner(s): Bruce, David V.
• Assistant Examiner(s): Artman, Thomas R
• Application Number:
  US09/911,567
• Publication Number:
  US 20020015153A1
• Time in Patent Office: 904 Days
• Field of Search: 356/450, 356/486, 356/487, 356/492, 356/493, 356/496, 356/498, 356/517, 359/529, 359/212, 359/857, 359/861, 359/726, 359/498, 359/487, 359/495, 359/629, 359/618, 359/639, 359/579, 359/485, 359/732, 359/834, 359/839
• US Class Current: 356/517
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 9/02056 Passive reduction of errors
• CPC Class Codes: G01B 9/02081 simultaneous quadrature detection, e.g. by spatial phase shifting
• CPC Class Codes: G02B 27/1073 characterized by manufacturing or alignment methods
• CPC Class Codes: G02B 27/144 using partially transparent surfaces without spectral selectivity G02B27/147 takes precedence
• CPC Class Codes: G02B 27/145 having sequential partially reflecting surfaces
• CPC Class Codes: G02B 5/122 cube corner, trihedral or triple reflector type

Abstract

A retroreflector has three mutually-orthogonal reflective surfaces arranged around an optical axis. The reflective surfaces stop short of the optical axis to provide a central region of the retroreflector which transmits incident light and a peripheral region of the retroreflector which retroreflects incident light. When the reflector is used in a Jamin-type interferometer with another reflector, this enables the interferometer to be used for measuring displacement between the reflectors.

In the interferometer, a projected beam is disposed between a pair of return beams and/or one of the return beams is disposed between a pair of the projected beams. This enables a first contiguous area of a face of a beam splitter to be provided with a phase-shifting coating to produce a phase quadrature relationship between a pair of interferogram beams. This simplifies the masking required when applying the coating.

In manufacture of the beam splitting member, a thin-film, beam-splitting, metal coating is applied to the member, and the member and coating are baked so as to modify the phase shift produced by the coating to enable the phase quadrature relationship. During baking a beam of light is projected at the coating with an angle of incidence of substantially π/4 radians so that the beam is split into a transmitted component and a reflected component. The intensities or phases of the transmitted and reflected components are monitored during baking, and the baking is terminated when the monitored intensities or phases have a predetermined relationship. This improves the reliability and/or accuracy of the resulting phase shift.

Claims

1. A reflector system comprising first and second relatively movable reflectors, wherein:

the first reflector is a retroreflector having three mutually-orthogonal reflective surfaces arranged around an optical axis, wherein the reflective surfaces stop short of the optical axis to provide a central region of the retroreflector which transmits incident light and a peripheral region of the retroreflector which retroreflects incident light; and

the reflectors are arranged so that light which is transmitted through the central region of the first reflector is reflected by the second reflector and transmitted back through the central region of the first reflector.

2. A system as claimed in claim 1, wherein the second reflector is a retroreflector.

3. A system as claimed in claim 2, wherein the second reflector has three mutually-orthogonal reflective surfaces arranged around a second optical axis.

4. A system as claimed in claim 3, wherein each of the reflective surfaces of the second reflector is arranged parallel to a respective one of the reflective surfaces of the first reflector.

5. A system claimed in claim 3, wherein the second reflector comprises a second body of optical material which provides the reflective surfaces by internal reflection in the second body.

6. A system as claimed in claim 5, wherein the second body has a transmitting surface for incident light which is generally, but not exactly, parallel to the second transmitting surface of the first reflector.

7. A system as claimed in claim 3, wherein the second reflector comprises three plane mirror elements arranged around the second optical axis.

8. A system as claimed in claim 1, wherein the first and second reflectors are joined by a piezo electric material.

9. A system as claimed in claim 1, wherein the second reflector comprises a plane mirror, the system further including a lens between the first and second reflectors.

10. A system as claimed in claim 1, wherein the second reflector comprises a polarizing beam splitter, quarter-wave retardation plate, plane mirror and second retroreflector arranged such that:

light which is transmitted through the central region of the first reflector is transmitted through the beam splitter and quarter-wave plate to the mirror;

the light which is thus reflected by the mirror is transmitted through the quarter-wave plate, is reflected by the beam splitter, and is directed to the second retroreflector;

the light which is thus reflected by the retroreflector is reflected by the beam splitter and transmitted through the quarter-wave plate to the mirror; and

the light which is thus reflected by the mirror is transmitted through the quarter-wave plate, the beam splitter and the central region of the first reflector.

11. A reflector system as claimed in claim 1, and forming part of a Jamin-type interferometer.

12. A reflector system as claimed in claim 1, in combination with a beam splitter, wherein:

the beam splitter is arranged to split an incident beam of light into first and second generally-parallel, spaced-apart, projected beams;

the reflector system is arranged to reflect the first and second projected beams to produce first and second return beams, respectively, which are spaced apart from and generally parallel to each other and the first and second projected beams; and

the beam splitter is arranged to enable the first and second return beams to be superposed to produce at least one interferogram;

so as to form a Jamin-type interferometer.

13. A reflector system as claimed in claim 12, wherein:

the projected beams are projected from, and the return beams return to, a single face of the beam splitter; and

one of the projected beams is disposed between the return beams and/or one of the return beams is disposed between the projected beams.

14. A reflector system as claimed in claim 13, wherein a first contiguous area of the face of the beam splitter is provided with a phase-shifting coating, one of the projected beams being projected from, and one of the return beams returning to, the first area.

15. A reflector system as claimed in claim 14, wherein the coating produces a phase shift such that there is a phase difference of substantially π

/2 radians between the two interferogram beams.

16. A reflector system as claimed in claim 14, wherein the coating comprises a thin metal film.

17. A reflector system as claimed in claim 13, wherein a second contiguous area of the face of the beam splitter is devoid of any coating providing any substantial phase-shift, the other projected beam being projected from, and the other return beam returning to, the second area.

18. A reflector system as claimed in claim 12, further comprising a dual-chamber gas or liquid refractometer arranged so that the first projected and return beams pass through one chamber of the refractometer and the second projected and return beams pass through the other chamber of the refractometer.

19. A reflector system as claimed in claim 12, further including means for modulating the optical path length of one of the beams, or one of the projected beams and its respective return beam.

20. A reflector system as claimed in claim 19, wherein the modulating means comprises an optically-transmitting, varying-thickness plate disposed in the path of the beam(s) to be modulated, and means for rotating the plate.

21. A reflector system as claimed in claim 19, wherein the modulating means comprises a layer of optically-transmitting, flexible material sandwiched between a pair of optically-transmitting plates disposed in the path of the beam(s) to be modulated, and means for modulating the spacing of the plates.

22. A reflector system is claimed in claim 19, wherein the modulating means is disposed adjacent the beam splitter.

23. A reflector system as claimed in claim 1, wherein the first reflector comprises a body of optical material which provides the reflective surfaces by internal reflection in the body.

24. A reflector system as claimed in claim 23, wherein the first reflector is in the form of a solid cube corner having a first transmitting surface for incident light and a second transmitting surface which truncates the cube corner.

25. A reflector system as claimed in claim 24, and forming part of an optical apparatus having an optical axis, wherein the first transmitting surface is generally, but not exactly, orthogonal to the optical axis of the apparatus.

26. A reflector system as claimed in claim 24 wherein the first and second transmitting surfaces are generally, but not exactly, parallel.

27. A reflector system as claimed in claim 23, wherein the first reflector is in the form of a solid cube corner having a passageway extending therethrough generally in the direction of the optical axis of the first reflector to provide the central region.

28. A reflector system as claimed in claim 1, wherein the first reflector comprises three plane mirror elements arranged around the optical axis, each providing a respective one of the reflective surfaces.

29. A reflector system as claimed in claim 28, wherein the first reflector is in the form of a hollow truncated cube corner.