Robotic storage buffer system for substrate carrier pods

• US 6,678,583 B2
• Filed: 08/02/2002
• Issued: 01/13/2004
• Est. Priority Date: 08/06/2001
• Status: Expired due to Fees

• Current Assignee: Seminet Inc.
• Original Assignee: Seminet Inc.
• Inventors: Kabbani, Samer, Nasr, Amro
• Primary Examiner(s): Beaulieu, Yonel
• Assistant Examiner(s): Marc, McDieunel, Marc, McDieunel
• Application Number:
  US10/211,184
• Publication Number:
  US 20030040841A1
• Time in Patent Office: 529 Days
• Field of Search: 700/245, 700/254, 700/264, 700/229, 318/568.1, 414/217, 414/277, 414/200, 414/201, 206/710, 206/711
• US Class Current: 700/245
• CPC Class Codes: B25J 9/046 Revolute coordinate type
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor.

Claims

1. A storage system for the stocking of objects in a process environment comprising:

a storage enclosure for storing objects comprising a plurality of storage shelves, each shelf having at least one storage location;

a removable service cart to engage with the storage enclosure;

a multi-axis robot mounted to the removable service cart in an inverted orientation;

an end effector connected to the robot suitable for grasping the objects;

at least one load port; and

a controller for controlling the robot movement;

whereby the robot transfers objects between the load port and the storage locations under control of the controller.

2. The storage system of claim 1 wherein each storage shelf further comprises a sensor to detect the presence or absence of an object.

3. The storage system of claim 1 further comprising a process station for performing a process on the stored objects.

4. The storage system of claim 1 wherein the end effector has one additional degree of freedom.

5. The storage system of claim 1 wherein the controller executes a teaching sequence to map the location of features within the storage enclosure.

6. A storage system for the stocking of substrate carrier pods in a process environment comprising:

a storage enclosure for storing objects comprising a plurality of storage shelves, each shelf having at least one storage location and a sensor to detect the presence or absence of an object;

a removable service cart to engage with the storage enclosure;

a multi-axis robot mounted to the removable service cart in an inverted orientation;

an end effector suitable for grasping the objects connected to the robot and having at least one axis of motion;

at least one load port; and

a controller for controlling the robot movement;

whereby the robot transfers objects between the load port and the storage locations under control of the controller.

7. The storage system of claim 6 further comprising a process station for performing a process on the substrate carrier pods.

8. The storage system of claim 6 further comprising a sliding door with a first position substantially covering the load port and a second position allowing access to the load port.