Electrothermal quadmorph microactuator

• US 6,679,055 B1
• Filed: 01/31/2002
• Issued: 01/20/2004
• Est. Priority Date: 01/31/2002
• Status: Expired due to Term

• Current Assignee: Adhawk Microsystems, Inc.
• Original Assignee: Zyvex Corporation
• Inventors: Ellis, Matthew D.
• Primary Examiner(s): Richter, Sheldon J.
• Application Number:
  US10/061,775
• Time in Patent Office: 719 Days
• Field of Search: 605/28, 605/27, 310/306, 310/309, 310/307
• US Class Current: 60/527
• CPC Class Codes: B81B 2201/032 Bimorph and unimorph actuators, e.g. piezo and thermo
• CPC Class Codes: B81B 3/0024 Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators electric motors using thermal effects H02N10/00
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: F03G 7/06 using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like using thermal expansion of non-vaporising liquids F01K
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0068 with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay
• CPC Class Codes: H01H 2061/008 Micromechanical actuator with a cold and a hot arm, coupled together at one end
• CPC Class Codes: H01H 61/04 wherein the thermally-sensitive member is only heated directly

Abstract

In a microactuator having substantially parallel beams, the free ends of the beams are detached from the substrate and rigidly interconnected with one another. Differential thermal expansion of the beams causes deflection of the free ends as a unit laterally away from the thermally expanded beam. Depending on the choice of thermally expanded beam, the deflection can be either in or out of the plane parallel to the substrate. Selective heating is achieved for example by passing electric current through a pair of beams in series. Each beam has an independent electrical contact pad at the base end, and all beams are connected together electrically at the free end. A voltage is applied across the selected beam pads, whereas the non-selected beam pads are disconnected. Multiple microactuators can be combined cooperatively, e.g., to move a stage in a plurality of directions.

Claims

1. A system operable to provide independently controllable movement in a plurality of directions, said system comprising:

at least one microactuator comprising a plurality of substantially parallel longitudinal beams, each of said beams having a cross-sectional area, a base end that is independently positionally fixed, and an opposing free end that is not positionally fixed, said plurality of beams being coupled together such that the free ends of all of said plurality of beams are interconnected physically with one another;

said plurality of beams controllably operable responsive to induced thermal expansion of at least one of said plurality of beams to move said interconnected free ends as a unit in at least one direction in each of at least two intersecting lateral planes; and

a stage interconnected with a plurality of said microactuators, said stage operable to move controllably in a plurality of directions in response to independently controllable movement of said interconnected free ends of said plurality of said microactuators.

2. The system of claim 1 wherein said plurality of directions comprise combinations of three translational degrees of freedom and three rotational degrees of freedom.

3. The system of claim 1 wherein said stage is interconnected via a flexure with each microactuator of said plurality of microactuators.

4. The system of claim 1 wherein said plurality of said microactuators comprise at least four said microactuators.

5. The system of claim 4 wherein said at least four microactuators are disposed in a substantially planar stepwise rotationally symmetric configuration about said stage.

6. A method operable to provide independently controllable movement in a plurality of directions, said method comprising the steps of:

in a microactuator comprising a plurality of substantially parallel longitudinal beams each of said beams having a cross-sectional area, a base end that is independently positionally fixed, and an opposing free end that is not positionally fixed, said plurality of beams being coupled together such that the free ends of all of said plurality of are interconnected physically with one another,

selectively thermally expanding at least one of said beams relative to all other beams of said plurality of beams;

via said differential thermal expansion, transmitting a bending moment to said plurality of beams;

in response to said bending moment, deflecting said interconnected free ends as a unit controllably in a selectable direction in either of at least two intersecting lateral planes; and

driving a stage interconnected with a plurality of said microactuators, said stage driven to move controllably in a plurality of directions in response to independently controllable movement of said plurality of said microactuators.

7. The method of claim 6 wherein said plurality of directions comprises combinations of three translational degrees of freedom and three rotational degrees of freedom.

8. The method of claim 6 wherein said plurality of said microactuators comprise at least four said microactuators.