Method of making self-cleaning substrates

• US 6,679,978 B2
• Filed: 02/22/2002
• Issued: 01/20/2004
• Est. Priority Date: 02/22/2002
• Status: Expired due to Fees

• Current Assignee: AGC Flat Glass North America Incorporated (AGC, Inc.)
• Original Assignee: AFG Industries Incorporated (AGC, Inc.)
• Inventors: Ford, Mark, Johnson, Herb
• Primary Examiner(s): VerSteeg, Steven H.
• Application Number:
  US10/079,454
• Publication Number:
  US 20030162033A1
• Time in Patent Office: 697 Days
• Field of Search: 204/192.12, 204/192.15, 204/192.22, 427/585, 427/558, 427/419.2, 250/492.1, 428/426
• US Class Current: 204/192.22
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 17/3441 comprising carbon, a carbide or oxycarbide
• CPC Class Codes: C03C 2217/71 Photocatalytic coatings
• CPC Class Codes: C23C 14/024 Deposition of sublayers, e.g. to promote adhesion of the coating C23C14/027 takes precedence
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium

Abstract

A photocatalytically-assisted self-cleaning (“PASC”) coating on a substrate enables the substrate to shed dirt simply by rinsing with water. A method of making a PASC coating includes depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate; sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100° C. or less; and, without heating above 100° C., exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate. The sputter deposition of the ultraviolet radiation activated layer on the chemical vapor deposited alkali metal diffusion barrier layer allows the ultraviolet radiation activated layer to be activated upon exposure to UV radiation without first having been heated during and/or after deposition. The elimination of this step of heating the ultraviolet radiation activated layer results in significant process simplification and cost reduction.

Claims

1. A method of making a self-cleaning substrate, the method comprising

depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate;

sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100°

C. or less; and

,

without heating above 100°

C., exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate.

2. The method according to claim 1, wherein the substrate is transparent to visible radiation.

3. The method according to claim 1, wherein the substrate comprises a glass.

4. The method according to claim 1, wherein the alkali metal diffusion barrier layer has a thickness in a range of from 10 to 500 nm.

5. The method according to claim 1, wherein the alkali metal diffusion barrier layer is deposited at a temperature above 350 °

C.

6. The method according to claim 1, wherein the alkali metal diffusion barrier layer is deposited at a temperature in a range of from 400 to 800 °

C.

7. The method according to claim 1, wherein the alkali metal diffusion barrier layer comprises a material selected from the group consisting of silicon oxycarbide, oxides of tin, oxides of titanium, oxides of aluminum, and mixtures thereof.

8. The method according to claim 1, wherein

the alkali metal diffusion barrier layer comprises a bilayer including a layer of silicon oxycarbide and a layer of tin oxide; and

the depositing comprises

forming the layer of silicon oxycarbide on the substrate, and

forming the layer of tin oxide on the layer of silicon oxycarbide.

9. The method according to claim 1, wherein the sputtering comprises magnetron sputtering a target in an atmosphere comprising an inert gas.

10. The method according to claim 9, wherein the target comprises titanium.

11. The method according to claim 9, wherein the inert gas is argon.

12. The method according to claim 9, wherein

the atmosphere further comprises O₂;

and

a ratio of the inert gas to the O₂ is from 2.95;

1 to 1.78;

1.

13. The method according to claim 1, wherein

the ultraviolet radiation activated layer is sputtered at a temperature of 70°

C. or less; and

the ultraviolet radiation activated layer is exposed to ultraviolet radiation without heating above 70°

C.

14. The method according the claim 1, wherein the ultraviolet radiation activated layer comprises a member of the group consisting of oxides of titanium, oxides of zinc, oxides of iron, oxides of silver, oxides of copper, oxides of tungsten, oxides of tin, oxides of bismuth, strontium titanate, and mixtures thereof.

15. The method according to claim 1, wherein the ultraviolet radiation activated layer comprises a member of the group consisting of TiO₂, ZnO, Fe₂O₃, WO₃, SnO₂, Bi₂O₃, and SrTiO₃.

16. The method according to claim 1, wherein the ultraviolet radiation activated layer comprises titanium oxide.

17. The method according to claim 1, wherein the ultraviolet radiation activated layer is from 1 to 250 nm thick.

18. The method according to claim 1, wherein the ultraviolet radiation activated layer is exposed to ultraviolet radiation having a wavelength in a range of from 300 to 400 nm.

19. The method according to claim 1, wherein the ultraviolet radiation activated layer is exposed to ultraviolet radiation in sunlight.

20. A method of making a self-cleaning substrate, the method comprising

depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate;

sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer; and

exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate, wherein

the sputtering heats the ultraviolet radiation activated layer to a plasma-induced temperature; and

the ultraviolet radiation activated layer is maintained at or below the plasma-induced temperature until the self-cleaning substrate is formed.

21. The method according to claim 20, wherein the plasma-induced temperature is 100°

C. or less.

22. The method according to claim 20, wherein the plasma-induced temperature is 70°

C. or less.

23. A method of making a self-cleaning substrate, the method comprising

a step for depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate;

a step for sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100°

C. or less; and

,

without heating above 100°

C., a step for exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate.