Method of making self-cleaning substrates
First Claim
1. A method of making a self-cleaning substrate, the method comprisingdepositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate;
- sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100°
C. or less; and
, without heating above 100°
C., exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate.
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Accused Products
Abstract
A photocatalytically-assisted self-cleaning (“PASC”) coating on a substrate enables the substrate to shed dirt simply by rinsing with water. A method of making a PASC coating includes depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate; sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100° C. or less; and, without heating above 100° C., exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate. The sputter deposition of the ultraviolet radiation activated layer on the chemical vapor deposited alkali metal diffusion barrier layer allows the ultraviolet radiation activated layer to be activated upon exposure to UV radiation without first having been heated during and/or after deposition. The elimination of this step of heating the ultraviolet radiation activated layer results in significant process simplification and cost reduction.
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Citations
23 Claims
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1. A method of making a self-cleaning substrate, the method comprising
depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate; -
sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100°
C. or less; and
,without heating above 100°
C., exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
the alkali metal diffusion barrier layer comprises a bilayer including a layer of silicon oxycarbide and a layer of tin oxide; - and
the depositing comprises forming the layer of silicon oxycarbide on the substrate, and forming the layer of tin oxide on the layer of silicon oxycarbide.
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9. The method according to claim 1, wherein the sputtering comprises magnetron sputtering a target in an atmosphere comprising an inert gas.
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10. The method according to claim 9, wherein the target comprises titanium.
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11. The method according to claim 9, wherein the inert gas is argon.
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12. The method according to claim 9, wherein
the atmosphere further comprises O2; - and
a ratio of the inert gas to the O2 is from 2.95;
1 to 1.78;
1.
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13. The method according to claim 1, wherein
the ultraviolet radiation activated layer is sputtered at a temperature of 70° - C. or less; and
the ultraviolet radiation activated layer is exposed to ultraviolet radiation without heating above 70°
C.
- C. or less; and
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14. The method according the claim 1, wherein the ultraviolet radiation activated layer comprises a member of the group consisting of oxides of titanium, oxides of zinc, oxides of iron, oxides of silver, oxides of copper, oxides of tungsten, oxides of tin, oxides of bismuth, strontium titanate, and mixtures thereof.
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15. The method according to claim 1, wherein the ultraviolet radiation activated layer comprises a member of the group consisting of TiO2, ZnO, Fe2O3, WO3, SnO2, Bi2O3, and SrTiO3.
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16. The method according to claim 1, wherein the ultraviolet radiation activated layer comprises titanium oxide.
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17. The method according to claim 1, wherein the ultraviolet radiation activated layer is from 1 to 250 nm thick.
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18. The method according to claim 1, wherein the ultraviolet radiation activated layer is exposed to ultraviolet radiation having a wavelength in a range of from 300 to 400 nm.
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19. The method according to claim 1, wherein the ultraviolet radiation activated layer is exposed to ultraviolet radiation in sunlight.
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20. A method of making a self-cleaning substrate, the method comprising
depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate; -
sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer; and
exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate, wherein the sputtering heats the ultraviolet radiation activated layer to a plasma-induced temperature; and
the ultraviolet radiation activated layer is maintained at or below the plasma-induced temperature until the self-cleaning substrate is formed. - View Dependent Claims (21, 22)
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23. A method of making a self-cleaning substrate, the method comprising
a step for depositing by chemical vapor deposition an alkali metal diffusion barrier layer on a substrate; -
a step for sputtering an ultraviolet radiation activated layer on the alkali metal diffusion barrier layer at a temperature of 100°
C. or less; and
,without heating above 100°
C., a step for exposing the ultraviolet radiation activated layer to ultraviolet radiation to form the self-cleaning substrate.
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Specification