Semiconductor optical component utilizing leaky structures to match the mode of rib waveguides to that of the fiber

• US 6,681,069 B2
• Filed: 03/29/2002
• Issued: 01/20/2004
• Est. Priority Date: 03/29/2001
• Status: Expired due to Fees

• Current Assignee: Ghent University, Universidad Publica De Navarra
• Original Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International), Universidad Pública de Navarra, Universiteit Gent Vzw
• Inventors: De Mesel, Kurt, Aramburu, Candido, Galarza, Marko, Baets, Roel
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Song, Sarah U
• Application Number:
  US10/112,305
• Publication Number:
  US 20030007766A1
• Time in Patent Office: 662 Days
• Field of Search: 385/27, 385/39, 385/43, 385/50, 385/129-132
• US Class Current: 385/50
• CPC Class Codes: G02B 2006/12097 Ridge, rib or the like
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: H01S 5/1064 varying width along the optical axis
• CPC Class Codes: H01S 5/22 having a ridge or stripe structure
• CPC Class Codes: H01S 5/4031 Edge-emitting structures

Abstract

A waveguide component has a slab waveguide, a rib waveguide, and a mode transition section where the rib waveguide and the slab waveguide are adjacent, and where the rib waveguide is tapered, to provide optical coupling, and lateral confinement rib waveguides are provided along the slab waveguide in the mode transition section to confine light from spreading laterally. The lateral confinement ribs can be formed in the same step with the same mask as used for the taper, to ensure alignment with the taper. They can be arranged either side of the taper. The lateral confinement ribs are significant for enabling a mode transition section which couples with low loss. In particular, it reduces the need for the taper to be so fine, or the taper to be made in both vertical and horizontal axes, both of which cause fabrication difficulties.

Claims

1. A waveguide component having:

a slab waveguide, the slab waveguide including lateral confinement waveguides,

a rib waveguide, and

a mode transition section,

wherein the rib waveguide and the slab waveguide are adjacent,

wherein the rib waveguide is tapered, to provide optical coupling, and

wherein the lateral confinement waveguides are provided along the slab waveguide in the mode transition section to confine light from spreading laterally.

2. The waveguide component of claim 1, wherein the lateral confinement waveguides are located in a same plane as the tapered rib waveguide.

3. The waveguide component of claim 2, wherein the lateral confinement waveguides are arranged coaxially with, and along both sides of, the tapered rib waveguide.

4. The waveguide component of claim 2, wherein the lateral confinement waveguides are formed in a same manufacturing step as the tapered rib waveguide.

5. The waveguide component of claim 1, wherein the tapered rib waveguide has tapering which becomes finer as the rib becomes narrower.

6. The waveguide component of claim 1, wherein the slab waveguide includes an antiresonant reflection layer for vertical confinement of light in the slab waveguide.

7. The waveguide component of claim 1, wherein the lateral confinement waveguides comprise sets of rib waveguides symmetrically placed with respect to the tapered rib waveguide.

8. The waveguide component of claim 1, further comprising a substrate,

wherein the slab waveguide has a refractive index higher than a refractive index of the substrate, and

wherein the slab waveguide refractive index is lower than a refractive index of the tapered waveguide.

9. An active waveguide component having the waveguide component of claim 1, wherein the tapered rib waveguide has an active core, coupled to an electrode, the substrate, slab waveguide and tapered rib waveguide having an electrical doping, the waveguide component having a substrate coupled to another electrode.

10. An integrated waveguide component having an array of optical elements, and interfaces from each component to a respective fiber, or to another component, at least some of the interfaces having the waveguide component of claim 1.

11. A terminal for a wavelength division multiplexed optical network, having an array of transmitters or receivers each having the waveguide component of claim 1.

12. A node for an optical network having a number of the integrated waveguide components of claim 10.

13. A tapered rib waveguide, comprising:

a substrate;

a slab waveguide horizontally formed on said substrate;

a tapered rib formed on said slab waveguide;

two sets of rib waveguides formed on said slab waveguide longitudinally surrounding said tapered rib along a finite part of the length of said tapered rib and formed in the same fabrication step as said tapered rib.

14. A tapered rib waveguide according to claim 13, wherein said sets of rib waveguides are symmetrically placed with respect to said tapered rib.

15. A tapered rib waveguide according to claim 14, wherein said sets of rib waveguides are straight.

16. A tapered rib waveguide according to claim 15, wherein each set of said sets of rib waveguides has its waveguides periodically placed.

17. A tapered rib waveguide according to claim 13, wherein said tapered waveguide has an active core, said tapered waveguide covered by a metallic electrode and flanked in the lateral directions by an isolator material, said substrate, slab waveguide and tapered waveguide presenting a convenient electrical doping, said substrate having an electrode.

18. A tapered rib waveguide according to claim 13, wherein said tapered waveguide has a passive core.

19. A tapered rib waveguide according to claim 13, wherein said slab waveguide is formed by a material having a refractive index higher than the substrate, and

wherein said slab waveguide refractive index is lower than a refractive index of said tapered waveguide.

20. A tapered rib waveguide according to claim 13, wherein said slab waveguide is formed by alternation of different materials having different refractive indexes.

21. A tapered rib waveguide according to claim 13, wherein the slab waveguide has a core, and

wherein said slab waveguide is formed by forming a set of antiresonance reflecting structure between the substrate and the core of said slab waveguide.