System and method of operation of a digital mass flow controller

• US 6,681,787 B2
• Filed: 12/06/2001
• Issued: 01/27/2004
• Est. Priority Date: 07/09/1999
• Status: Expired due to Term

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Mykrolis Corporation (Entegris Incorporated)
• Inventors: Tariq, Faisal, Tinsley, Kenneth E.
• Primary Examiner(s): Michalsky, Gerald A.
• Application Number:
  US10/006,774
• Publication Number:
  US 20020139418A1
• Time in Patent Office: 782 Days
• Field of Search: 137/10, 137/486, 137/487.5
• US Class Current: 137/10
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/0324 With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/0368 By speed of fluid
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.

Claims

1. A method for calibrating a mass flow controller comprising:

storing one or more variables corresponding to a set of non-setpoint conditions;

sensing current values for the set of conditions;

adjusting calculation of mass flow in the mass flow controller based on the current values for the set of conditions and the one or more variables.

2. The method of claim 1, wherein one or more of the set of conditions are selected from the group consisting of:

a solenoid current;

an ambient temperature;

a base sensor resistance;

an inlet pressure indication;

a power supply voltage; and

a leakage through the control valve.

3. The method of claim 1 wherein adjusting the calculation of mass flow utilizes a multivariable response function describing a response of the mass flow controller to the set of conditions.

4. The method of claim 3 wherein the multivariable response function is represented by a series of constants which represent factor effects for the system variables.

5. A method of calibrating a mass flow controller comprising the steps of:

measuring the real time actual flow through the mass flow controller with a flow measuring instrumentation system;

sensing a series of system variables associated with a mass flow controller;

modeling a predicted flow through the mass flow controller with a regression analysis technique to produce a multivariable response function describing a response of the mass flow controller to the system variables; and

inputting the multivariable response function into an electronic control system operable to regulate the flow through the mass flow controller.

6. The method of claim 5, wherein the system variables comprise:

a desired output flow setpoint;

a solenoid current;

an ambient temperature;

a base resistance of the sensor;

an inlet pressure indication;

at least one power supply voltage;

a leakage through the control valve;

a real time flow error between an actual output flow as compared to the desired output flow set-point.

7. The method of claim 5, further comprising archiving the multivariable response function in a memory location within the electronic control system.

8. The method of claim 7, wherein the multivariable response function is represented by a series of constants which represent factor effects for the system variables.