Magnetic transducer having inverted write element with zero delta in pole tip width
First Claim
1. A method of fabricating a magnetic transducer, the method comprising:
- depositing a bottom pole layer on a substrate;
patterning a photo-resist layer having a desired width on a portion of the bottom pole layer, wherein the photo-resist layer shields the portion of the bottom pole layer from milling;
milling the bottom pole layer around the photo-resist layer to form an inverted bottom pole, the inverted bottom pole having upper and lower portions, the bottom pole upper portion being shielded by the photo-resist layer and having an upper portion width substantially equal to the desired width of the photo-resist layer, the bottom pole lower portion having a lower portion width, wherein the bottom pole upper portion width is less than the bottom pole lower portion width;
stripping away the photo-resist layer to expose the bottom pole upper portion;
depositing a planar alumina layer on both the bottom pole upper and lower portions;
polishing the planar alumina layer to again expose the bottom pole upper portion and form planar alumina layers on each side of the inverted bottom pole;
depositing a second alumina layer on the bottom pole upper portion and the planar alumina layers;
milling the second alumina layer such that the bottom pole upper portion is again exposed with second alumina layers being formed on each side of the bottom pole upper portion at a level above the bottom pole upper portion and on the planar alumina layers, the second alumina layers forming a recess having tapered side surfaces above the bottom pole upper portion;
depositing a write gap layer in the recess over the bottom pole upper portion and over the second alumina layers; and
depositing a top pole layer over the write gap layer, wherein in the recess the top pole layer forms a top pole having a top pole main portion opposite to the bottom pole upper portion, the top pole main portion having a width which is substantially equal to the bottom pole upper portion width.
3 Assignments
0 Petitions
Accused Products
Abstract
A method of fabrication and a magnetic transducer having an inverted write element with a zero delta in pole tip width to provide improved bi-directional control over write track width and written erase bands on media. The transducer includes a top pole and a bottom pole configured to provide the same write track width and relatively small erase bands when either pole is the trailing pole depending on direction of movement of the media relative to the transducer. The bottom pole has an upper portion and a lower portion. The bottom pole upper portion width is less than the bottom pole lower portion width. The top pole has a main portion formed opposite to the bottom pole upper portion. The top pole main portion has a main portion width which is equal to the bottom pole upper portion width.
84 Citations
3 Claims
-
1. A method of fabricating a magnetic transducer, the method comprising:
-
depositing a bottom pole layer on a substrate;
patterning a photo-resist layer having a desired width on a portion of the bottom pole layer, wherein the photo-resist layer shields the portion of the bottom pole layer from milling;
milling the bottom pole layer around the photo-resist layer to form an inverted bottom pole, the inverted bottom pole having upper and lower portions, the bottom pole upper portion being shielded by the photo-resist layer and having an upper portion width substantially equal to the desired width of the photo-resist layer, the bottom pole lower portion having a lower portion width, wherein the bottom pole upper portion width is less than the bottom pole lower portion width;
stripping away the photo-resist layer to expose the bottom pole upper portion;
depositing a planar alumina layer on both the bottom pole upper and lower portions;
polishing the planar alumina layer to again expose the bottom pole upper portion and form planar alumina layers on each side of the inverted bottom pole;
depositing a second alumina layer on the bottom pole upper portion and the planar alumina layers;
milling the second alumina layer such that the bottom pole upper portion is again exposed with second alumina layers being formed on each side of the bottom pole upper portion at a level above the bottom pole upper portion and on the planar alumina layers, the second alumina layers forming a recess having tapered side surfaces above the bottom pole upper portion;
depositing a write gap layer in the recess over the bottom pole upper portion and over the second alumina layers; and
depositing a top pole layer over the write gap layer, wherein in the recess the top pole layer forms a top pole having a top pole main portion opposite to the bottom pole upper portion, the top pole main portion having a width which is substantially equal to the bottom pole upper portion width. - View Dependent Claims (2, 3)
after polishing the planar alumina layer and prior to depositing the second alumina layer, depositing a lap strap layer on the bottom pole upper portion and the planar alumina layers; and
using the lap strap layer as a mill stop while milling the second alumina layer.
-
-
3. The method of claim 1 further comprising:
-
after polishing the planar alumina layer and prior to depositing the second alumina layer, measuring the width of the bottom pole upper portion to determine whether the bottom pole upper portion width is within a given tolerance; and
stripping the inverted bottom pole and the planar alumina layers away from the substrate if the bottom pole upper portion width is out of the given tolerance, and then repeating the steps of depositing a bottom pole layer, patterning a photo-resist layer, milling the bottom pole layer, stripping away the photo-resist layer, depositing a planar alumina layer, and polishing the planar alumina layer.
-
Specification