Static charge dissipation for an active circuit surface

• US 6,686,546 B2
• Filed: 12/30/1998
• Issued: 02/03/2004
• Est. Priority Date: 12/30/1998
• Status: Expired due to Term

• Current Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Original Assignee: STMicroelectronics Incorporated (STMicroelectronics NV)
• Inventors: Chiu, Anthony M.
• Primary Examiner(s): Hjerpe, Richard
• Assistant Examiner(s): ABDULSELAM, ABBAS I
• Application Number:
  US09/224,812
• Publication Number:
  US 20020067344A1
• Time in Patent Office: 1,861 Days
• Field of Search: 178/18.01, 178/18.06, 178/180.04, 345/173, 345/171, 345/174, 361/212, 361/220
• US Class Current: 178/18.01
• CPC Class Codes: G06V 40/1329 Protecting the fingerprint sensor against damage caused by the finger

Abstract

A structure and method is disclosed for dissipating electrostatic charges comprising an insulating layer between and over a plurality of conductive plates, wherein the insulating layer isolates the conductive plates and protects the conductive plates from damage, and wherein the insulating layer comprises a conductive discharge grid adjacent the conductive plates.

Claims

1. A method of forming an electrostatic discharge device comprising the steps of:

forming a composite protective layer including an insulating layer between and over a plurality of conductive plates within an array of capacitive sensor pixels operable to sense surface features on an object proximate to the conductive plates,

wherein the protective layer isolates the conductive plates and protects the conductive plates from damage, and

wherein the protective layer comprises a conductive grid including lines extending along logical boundaries between adjoining capacitive sensor pixels and separated by open regions in the conductive grid over at least portions of the conductive plates.

2. The method of claim 1, further comprising the step of:

forming a passivation layer over the insulating layer, wherein the passivation layer further protects the conductive plates from damage.

3. A method of forming an electrostatic discharge device comprising the steps of:

forming a dielectric layer over a plurality of conductive plates within an array of capacitive sensor pixels operable to sense surface features on an object proximate to the conductive plates, the dielectric layer isolating the conductive plates; and

forming a conductive grid disposed over at least a portion of the dielectric layer and including lines extending along logical boundaries between adjoining capacitive sensor pixels and separated by open regions in the conductive grid over at least portions of the conductive plates, wherein the conductive grid dissipates an electrostatic charge and prevents the electrostatic charge from reaching the plurality of conductive plates.

4. The method of claim 3, wherein the conductive grid has a sheet resistance low enough to adequately dissipate the electrostatic charge.

5. The method of claim 3, further comprising the step of:

forming a passivation layer disposed over at least a portion of the dielectric layer.

6. The method of claim 5, wherein the passivation layer has an optimum thickness to prevent damage to the underlying conductive plates due to use and environment while also allowing an electrostatic charge to dissipate through the conductive grid.

7. The method of claim 5, wherein the discharge grid is integral with the passivation layer.

8. The method of claim 5, wherein the passivation layer comprises silicon carbide.

9. The method of claim 5, wherein the passivation layer comprises silicon nitride.

10. The method of claim 5, wherein the passivation layer has a thickness of between approximately 2,000 and 3,000 angstroms.

11. A portion of an integrated circuit having sensor cells, comprising:

a protective layer including an insulating layer between and over a plurality of conductive plates within an array of capacitive sensor cells operable to sense surface features on an object proximate to the conductive plates,

wherein the protective layer isolates the conductive plates and protects the conductive plates from damage, and

wherein the protective layer comprises a conductive discharge grid including lines extending along logical boundaries between adjoining capacitive sensor cells and separated by open regions in the conductive grid over at least portions of the conductive plates.

12. The integrated circuit of claim 11, wherein the protective layer further comprises a passivation layer to further protect the conductive plates from damage.

19. The integrated circuit of claim 11, wherein the conductive grid is disposed over substantially all logical boundaries for capacitive sensor cells within the array, and wherein the conductive grid is disposed over substantially all of a gap between conductive plates within adjacent sensor cells.

20. The integrated circuit of claim 11, wherein the conductive grid is disposed over substantially all of logical boundaries for capacitive sensor cells within the array, and wherein the conductive grid is disposed over a portion of the conductive plates within each sensor cell.

13. A portion of an integrated circuit, comprising:

a dielectric layer over a plurality of conductive plates within an array of capacitive sensor cells operable to sense surface features on an object proximate to the conductive plates, the dielectric layer isolating the conductive plates; and

a conductive grid disposed over at least a portion of the dielectric layer and including lines extending along logical boundaries between adjoining capacitive sensor pixels and separated by open regions in the conductive grid over at least portions of the conductive plates, wherein the conductive grid dissipates an electrostatic charge in a manner that prevents the electrostatic charge from reaching the plurality of conductive plates.

14. The integrated circuit of claim 13, further comprising:

a passivation layer disposed over at least a portion of the dielectric layer.

15. The integrated circuit of claim 13, wherein the discharge grid is planar with the passivation layer.

16. The integrated circuit of claim 13, wherein the discharge grid is planar with the passivation layer.

17. The integrated circuit of claim 13, wherein the discharge grid is under the passivation layer.

18. The integrated circuit of claim 13, wherein the discharge grid is adjacent the passivation layer.

21. The integrated circuit of claim 13, wherein the conductive grid is disposed over a portion of the dielectric layer adjacent to and surrounding the conductive plates, and wherein the passivation layer is disposed over the conductive grid.

22. The integrated circuit of claim 13, wherein the conductive grid is disposed over a portion of the dielectric layer adjacent to the conductive plates, and wherein the passivation layer is disposed adjacent the conductive grid and over the dielectric layer not covered by the conductive grid.

23. The integrated circuit of claim 13, wherein the conductive grid is disposed over a portion of the dielectric layer adjacent to the conductive plates, and wherein the conductive grid is disposed over the passivation layer.

24. The integrated circuit of claim 13, wherein the conductive grid and the passivation layer are substantially planar.

25. The integrated circuit of claim 13, wherein each capacitive sensor cell contains a pair of the conductive plates and wherein the conductive grid is only disposed over gaps between conductive plates.

26. A portion of an integrated circuit package having a sensor chip comprising:

a sensor chip having disposed thereon an array of sensor cells;

an insulating layer on the sensor circuitry, the insulating layer electrically isolating the sensor circuitry from subsequent layers;

a first group of substantially parallel electrically conductive lines on the insulating layer; and

a second group of substantially parallel electrically conductive lines disposed on the insulating layer substantially perpendicular to the first group of conductive lines, wherein the first and second groups of electrically conductive lines dissipate an electrostatic charge and protect the plurality of conductive plates.

27. The integrated circuit package of claim 26, wherein each of the first and second groups of conductive lines are grounded to an off-chip ground.

28. The integrated circuit package of claim 26, wherein the first and second groups of conductive lines form a discharge grid that has a sheet resistance low enough to adequately dissipate the electrostatic charge.