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Time base comprising an integrated micromechanical ring resonator

  • US 6,686,807 B1
  • Filed: 05/02/2002
  • Issued: 02/03/2004
  • Est. Priority Date: 11/02/1999
  • Status: Expired due to Term
First Claim
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1. A time base comprising a resonator and an integrated electronic circuit for driving said resonator into oscillation and for producing, in response to said oscillation, a signal having a determined frequency, wherein said resonator is an integrated micromechanical ring resonator supported above a substrate and adapted to oscillate, according to a first oscillation mode, around an axis of rotation substantially perpendicular to said substrate, said ring resonator comprising:

  • a central post extending from said substrate along said axis of rotation;

    a free-standing oscillating structure connected to said central post and including;

    an outer ring coaxial with said axis of rotation and a plurality of spring elements disposed symmetrically around said central post and connecting said outer ring to said central post; and

    at least one pair of diametrically opposed electrode structures disposed around said outer ring and connected to said integrated electronic circuit, and wherein said spring elements have a curved shape and are connected substantially perpendicularly to said central post by first junctions, each of said spring elements extending away from said central post in the prolongation of a radial line crossing said axis of rotation.

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