Active tuning of a torsional resonant structure

• US 6,687,034 B2
• Filed: 01/10/2003
• Issued: 02/03/2004
• Est. Priority Date: 03/23/2001
• Status: Expired due to Term

• Current Assignee: Microvision, Inc.
• Original Assignee: Microvision, Inc.
• Inventors: Helsel, Mark P., Wine, David W., Tegreene, Clarence T.
• Primary Examiner(s): Dunn, Drew
• Assistant Examiner(s): Assaf, Fayez
• Application Number:
  US10/339,953
• Publication Number:
  US 20030161020A1
• Time in Patent Office: 389 Days
• Field of Search: 359/198, 359/199, 359/223, 359/224, 359/872, 359/290, 359/291, 359/212, 359/221, 359/225, 359/226, 310/308, 310/309
• US Class Current: 359/212.2
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/10 Scanning systems
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 27/017 Head mounted
• CPC Class Codes: G09G 2300/0469 Details of the physics of pixel operation
• CPC Class Codes: G09G 3/025 with scanning or deflecting the beams in two directions or dimensions
• CPC Class Codes: G09G 3/346 based on modulation of the reflection angle, e.g. micromirrors micromirrors devices per se G02B26/0833
• CPC Class Codes: G09G 5/005 Adapting incoming signals to the display format of the display terminal
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted moment of inertia changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.

Claims

1. A resonant scanning apparatus having a controllable resonant frequency, comprising:

a first body;

a second body coupled to the first body, the first and second bodies being sized and configured for relative motion at a first resonant frequency; and

a control member coupled to one of the first and second bodies, the control member being responsive to a control signal to produce a damping force on the first or second body, wherein the first and second bodies are responsive to the damping force to move at a second resonant frequency different from the first resonant frequency.

2. The resonant scanning apparatus of claim 1 wherein the second body and the control member are integrally formed from a common material.

3. The resonant scanning apparatus of claim 1 further comprising a torsional arm extending between the first and second bodies.

4. The resonant scanning apparatus of claim 1 further comprising a motion sensor coupled to detect relative motion of the first and second bodies, the motion sensor being operative to produce the control signal in response to the detected relative motion.

5. A resonant scanning system, comprising:

a substrate;

a first body coupled for periodic motion relative to the substrate about a rotational axis;

an electrically driven first mass coupled to the first body and responsive to a control signal to move parallel to the rotational axis;

an electrically driven second mass coupled to the first body and responsive to a contrast signal to move parallel to the rotational axis; and

a control circuit coupled to drive the first and second electrically driven masses.

6. The scanning system of claim 5 wherein the electrically driven masses are positioned symmetrically relative to a center of mass of the first body.

7. The scanning system of claim 6 wherein the control circuit drives the electrically driven masses are different distances.

8. The scanning system of claim 5 wherein the first body carries a mirror.