Process monitoring system for lithography lasers

• US 6,687,562 B2
• Filed: 12/08/2000
• Issued: 02/03/2004
• Est. Priority Date: 02/16/2000
• Status: Expired due to Term

• Current Assignee: Cymer Incorporated (ASML Holding NV)
• Original Assignee: Cymer Incorporated (ASML Holding NV)
• Inventors: Patel, Parthiv S., Carlesi, Jason R., Green, Roger L., Conway, Joseph E., Rowan, Christopher G., Moen, Jeffrey W., Tantra, Muljadi, Watson, Tom A.
• Primary Examiner(s): Voeltz, Emanuel Todd
• Assistant Examiner(s): GAIN, EDWARD F
• Application Number:
  US09/733,194
• Publication Number:
  US 20010020195A1
• Time in Patent Office: 1,152 Days
• Field of Search: 700/9, 700/2, 700/3, 700/108, 700/121, 702/188, 702/182, 702/183, 702/184, 438/14, 438/16, 438/17
• US Class Current: 700/121
• CPC Class Codes: G03F 7/70025 by lasers
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
• CPC Class Codes: G03F 7/70591 Testing optical components
• CPC Class Codes: G05B 19/00 Programme-control systems
• CPC Class Codes: G05B 2219/31205 Remote transmission of measured values from site, local to host
• CPC Class Codes: G05B 2219/31485 Verify and update all related data in relational database
• CPC Class Codes: G07C 3/005 during manufacturing process
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.

Claims

1. A system for monitoring lithography lasers at at least one integrated circuit fabrication plant, said system, comprising:

A) a plurality of lasers each being configured for use as illumination sources in an integrated circuit lithography process,

B) a terminal server associated with each one of said plurality of lasers;

C) a central fabrication plant server unit in communication through a local area network with each of said plurality of lasers;

said central fabrication plant unit being programmed to acquire data from each of said lasers and to store at least portions of the data in raw form and/or summary form;

D) a second server unit providing communication through a communication network between said first server unit and computers utilized by persons having access authorization to the information stored by said first server unit.

2. A system as in claim 1 wherein said plurality of lasers are narrow band excimer lasers.

3. A system as in claim 1 wherein each terminal server is provided with a unique internet address.

4. A system as in claim 1 wherein said second server is located at facilities of a laser manufacturer.

5. A system as in claim 1 wherein said central fabrication plant server unit is programmed with software created in modular form said software comprising:

(a) a data acquisition module

(b) a parser module

(c) a database module and

(d) a user interface module.

6. A system as in claim 5 wherein said data acquisition module comprises software components comprising:

(a) laser read and write

(b) command write to lasers

(c) command write queue

(d) data read from lasers

(e) master scheduler

(f) interface to parser

(g) database write queue

(h) system error logs and error daemon.

7. A system as in claim 1 wherein data acquired from said lasers is presented at a web site created by said central fabrication plant server unit.

8. A system as in claim 7 wherein said data acquired from said laser is presented in the form of summary charts.

9. A system as in claim 8 wherein said charts comprise:

(a) chamber lifetime charts

(b) LNM charts

(c) Stabilization module charts

(d) Uptime or downtime charts

(e) Maintenance related charts.

10. A system as in claim 7 wherein said web site comprises web pages.

11. A system as in claim 10 wherein said web pages comprise:

(a) an administration page

(b) summary pages regarding particular lasers

(c) service log pages

(d) error pages.

12. A system as in claim 1 wherein said communication network is the Internet.

13. A system as in claim 1 wherein said communication network is an intranet system.

14. A system as in claim 1 wherein said terminal server is an embedded network card.