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Tester for pressure sensors

  • US 6,688,156 B2
  • Filed: 01/04/2001
  • Issued: 02/10/2004
  • Est. Priority Date: 01/04/2000
  • Status: Expired due to Fees
First Claim
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1. A tester for pressure sensors, either in a wafer structure or isolated, comprising:

  • a recess for receiving the pressure sensors;

    means for electrically connecting at least one of the pressure sensors to an evaluation unit;

    means for exerting one of a static and a dynamic pressure of a specified amount and duration on a sensor element of the at least one selected pressure sensor such that the sensor element is displaced from a resting position.

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