Electrostatic pressure transducer and a method thereof
First Claim
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1. A pressure transducer system comprising:
- a housing with a chamber, at least a portion of the chamber is sealed at a reference pressure;
a non-conducting member with a stored electrical charge, the non-conducting member connected to the housing and extending at least partially across the chamber; and
a pair of electrodes that are at least partially in alignment with each other, with each of the pair of electrodes connected to the housing and spaced from and on substantially opposing sides of the non-conducting member, wherein the non-conducting member is movable with respect to the pair of electrodes or one of the electrodes in the pair of electrodes is movable with respect to the non-conducting member in response to a monitored pressure.
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Abstract
A pressure transducer system includes a housing with a chamber, a member with a stored electrical charge, and a pair of electrodes that are at least partially in alignment with each other. At least a portion of the chamber is at a reference pressure. The member is connected to the housing and extends across at least a portion of the chamber. Each of the pair of electrodes is connected to the housing and is spaced from and on substantially opposing sides of the member. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member in response to a monitored pressure.
39 Citations
24 Claims
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1. A pressure transducer system comprising:
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a housing with a chamber, at least a portion of the chamber is sealed at a reference pressure;
a non-conducting member with a stored electrical charge, the non-conducting member connected to the housing and extending at least partially across the chamber; and
a pair of electrodes that are at least partially in alignment with each other, with each of the pair of electrodes connected to the housing and spaced from and on substantially opposing sides of the non-conducting member, wherein the non-conducting member is movable with respect to the pair of electrodes or one of the electrodes in the pair of electrodes is movable with respect to the non-conducting member in response to a monitored pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for making a pressure transducer system, the method comprising:
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providing a housing with a chamber, at least a portion of the chamber is sealed at a reference pressure;
providing a non-conducting member with a stored electrical charge, the non-conducting member connected to the housing and extending at least partially across the chamber; and
providing a pair of electrodes that are at least partially in alignment with each other, with each of the pair of electrodes connected to the housing and spaced from and on substantially opposing sides of the non-conducting member, wherein the non-conducting member is movable with respect to the pair of electrodes or one of the electrodes in the pair of electrodes is movable with respect to the non-conducting member in response to a monitored pressure. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for measuring pressure, the method comprising:
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exposing a non-conducting member with a stored electrical charge or one of a pair of electrodes to a monitored pressure, the member is connected to a housing with a chamber, at least a portion of the chamber is sealed at a reference pressure, the non-conducting member extends across at least a portion of the chamber, each of a pair of electrodes is connected to the housing and is spaced from and on substantially opposing sides of the non-conducting member, the pair of electrodes are at least partially in alignment with each other;
moving the non-conducting member with respect to the pair of electrodes or one of the electrodes in the pair of electrodes with respect to the non-conducting member in response to a monitored pressure member in response to the monitored pressure; and
measuring the movement of the non-conducting member or one of the electrodes in the pair of electrodes; and
determining the monitored pressure based on the measured movement. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification