Minimization and linearization of ESD parasitic capacitance in integrated circuits

• US 6,690,066 B1
• Filed: 10/18/2002
• Issued: 02/10/2004
• Est. Priority Date: 10/18/2002
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Haroun, Baher, Duvvury, Charvaka, Lin, Heng-Chih
• Primary Examiner(s): Flynn, Nathan J.
• Assistant Examiner(s): Quinto, Kevin
• Application Number:
  US10/274,163
• Time in Patent Office: 480 Days
• Field of Search: 257/288, 257/355, 257/356, 257/357, 257/358, 257/359, 257/360, 257/361, 257/362, 257/363
• US Class Current: 257/355
• CPC Class Codes: H01L 27/0266 using field effect transistors as protective elements

Abstract

An integrated circuit protecting an I/O pad 303 against an ESD pulse, the circuit having in the same substrate a discharge sub-circuit 301 and a drive sub-circuit 302, each sub-circuit including an MOS transistor. The circuit comprises a direct connection between the I/O pad 303 and the drain 321 of the drive sub-circuit MOS transistor 306, and further a forward diode 360 inserted between the I/O pad 303 and the drain 311 of the discharge sub-circuit MOS transistor 305 to isolate the junction capacitance of the discharge sub-circuit MOS transistor, whereby electrical noise coupling to the substrate is reduced, RF/analog input signals are improved, and leakage at the I/O pad is reduced.

Claims

1. An integrated circuit protecting an I/O pad against an ESD pulse, said circuit having in the same substrate a discharge sub-circuit and a drive sub-circuit, each sub-circuit including an MOS transistor, comprising:

a direct connection between said I/O pad and the drain of said drive sub-circuit MOS transistor; and

a forward diode inserted between said I/O pad and the drain of said discharge sub-circuit MOS transistor to isolate the junction capacitance of said discharge sub-circuit MOS transistor, whereby electrical noise coupling to said substrate is reduced, RF/analog input signals are improved, and leakage at said I/O pad is reduced.

2. The integrated circuit according to claim 1 wherein protection against one polarity of ESD stress is provided by said connection of said I/O pad to said drain of said discharge sub-circuit MOS transistor, and concurrently against the opposite polarity of ESD stress by said connection to the anode of said forward diode.

3. The integrated protection circuit according to claim 1 further comprising:

a size correlation between said forward diode junction capacitance, having a positive voltage coefficient, and said drive sub-circuit MOS transistor junction capacitance, having a negative voltage coefficient, whereby the combined capacitances are substantially constant with respect to said I/O pad voltage.

4. The integrated protection circuit according to claim 1 further comprising:

two accumulation capacitors, one coupled between said I/O pad and said drive circuit MOS transistor the other coupled between said diode and said drive circuit MOS transistor, whereby differential booting is provided to maintain uniform substrate bias.

5. The integrated protection circuit according to claim 1 wherein the material of said substrate is selected from a group consisting of silicon, silicon germanium, gallium arsenide and any other semiconductor material customarily used on semiconductor manufacturing.

7. The circuit according to claims 1 or 6 wherein said pad is an input or a power pad.

8. The circuit according to claims 1 or 6 wherein said MOS transistors are multi-fingered transistors.

9. The circuit according to claims 1 or 6 wherein said diode is a finger-shaped diode.

6. A protection circuit for protecting a failsafe CMOS integrated circuit in a substrate of a first conductivity type against an ESD pulse at an I/O pad, comprising:

a discharge circuit formed in said substrate, operable to ground said ESD pulse, said circuit comprising a first MOS transistor having source, gate and drain, said source and gate coupled to ground potential;

a forward diode between said I/O pad and said first MOS transistor drain to isolate the junction capacitance of said first MOS transistor, said diode formed in a well of the opposite conductivity type;

a drive circuit operable to use a portion of an ESD pulse voltage to provide a substrate current, and consequently a substrate voltage drop, for allowing said discharge circuit to turn on uniformly and thus to discharge said ESD pulse effectively, said drive circuit including a second MOS transistor having source, gate and drain, said source coupled to said substrate, said drain to said I/O pad, and said gate to an accumulation capacitor, said capacitor biased in the accumulation region to achieve a linear capacitance; and

a compensation between the voltage dependences of the parasitic diode junction capacitance, having a positive voltage coefficient, and the second MOS transistor junction capacitance, having a negative voltage coefficient.

10. The circuit according to claim 6 wherein said well of opposite conductivity is embedded in a well of first conductivity and separated by trench isolations.

11. The circuit according to claim 6 wherein said first conductivity type is p-type and said MOS transistors are nMOS transistors.

12. The circuit according to claim 6 wherein said first conductivity type is n-type and said MOS transistors are pMOS transistors.