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Apparatus and methods for surface contour measurement

  • US 6,690,474 B1
  • Filed: 01/10/2000
  • Issued: 02/10/2004
  • Est. Priority Date: 02/12/1996
  • Status: Expired due to Term
First Claim
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1. A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of:

  • a) providing two sources of radiation having a spatial distribution of spectral regions;

    b) illuminating said surface with said radiation from each of said sources to produce a first fringe pattern at a first position on said surface;

    c) moving said first fringe pattern to a second position;

    d) generating a first wrapped cycle map in response to said first and second positions of said first fringe pattern;

    e) estimating fringe numbers in said first fringe pattern;

    f) changing said first fringe pattern to generate a second fringe pattern at a first position;

    g) moving said second fringe pattern to a second position;

    h) generating a second wrapped cycle map in response to said first and second positions of said second fringe pattern;

    i) estimating fringe numbers in said second fringe pattern in response to said estimated fringe numbers in said first fringe pattern; and

    j) determining said three-dimensional position information of said point on said surface in response to said estimated fringe numbers in said second fringe pattern and said second wrapped cycle map.

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