Optical crossconnect using tilting mirror MEMS array

• US 6,690,885 B1
• Filed: 02/24/2000
• Issued: 02/10/2004
• Est. Priority Date: 10/07/1999
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agere Systems Incorporated (Broadcom, Inc.), Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Bishop, David John, Giles, Randy Clinton, Aksyuk, Vladmir Anatolyevich
• Primary Examiner(s): Pascal, Leslie
• Assistant Examiner(s): SEDIGHIAN, REZA
• Application Number:
  US09/512,174
• Time in Patent Office: 1,447 Days
• Field of Search: 359/117, 359/128, 359/139, 385/16, 385/17, 385/18, 385/19, 385/33, 385/119, 398/45, 398/49, 398/51, 398/88, 398/82, 398/50
• US Class Current: 398/45
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3542 Non-blocking switch, e.g. with multiple potential paths between multiple inputs and outputs, the establishment of one switching path not preventing the establishment of further switching paths
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001

Abstract

An optical crossconnect constructed of micro -electromechanical systems (MEMS) tilt mirror arrays for selectively routing optical signals to optic fibers. The crossconnect includes a lens array for directing optical signals from a fiber array to the MEMS mirror array. Individual mirror elements in the mirror array reflect the optic signals to additional optic elements such as a planar mirror, a transmissive/reflective optical element or a second MEMS mirror array for routing the optical signals to output optic fibers.

Claims

1. An optical crossconnect device for directing optical signals received from a plurality of input optic fibers to a plurality of output optic fibers, said plurality of input fibers and said plurality of output fibers forming an array of optic fibers, comprising:

an array of lenses positioned for receiving the optical signals from the plurality of input optic fibers and for directing the optical signals;

a MEMS mirror array having a plurality of mirror elements, with each mirror element having a rotational axis about which each said mirror element is selectively operably tiltable, said mirror array being positioned for receiving optical signals directed by said array of lenses and for reflecting the directed optical signals to the plurality of output optic fibers; and

a reflector element disposed in optical communication with said MEMS mirror array for receiving optical signals from said MEMS mirror array and for reflecting the received optical signals back to said MEMS mirror array, said reflected optical signals being redirected by said MEMS mirror array back to said array of lenses for receipt by the array of optic fibers.

2. The device of claim 1, wherein said each rotational axis comprises a first rotational axis and a second rotational axis and wherein said each mirror element is operatively tiltable relative to said first and second axes.

3. The device of claim 1, wherein said array of lenses comprises an input array of lenses and an output array of lenses which are coplanar with each other.

4. An optical crossconnect device for directing optical signals received from a plurality of input optic fibers to a plurality of output optic fibers, comprising:

an input array of lenses positioned for receiving the optical signals from the plurality of input optic fibers;

an output array of lenses positioned for directing optical signals to the plurality of output optic fibers, said input and output arrays of lenses being distally displaced from each other to define an area therebetween;

a MEMS input mirror array and a MEMS output mirror array, each said array having a plurality of mirror elements, with each mirror element having a rotational axis about which each said mirror element is selectively operably tiltable; and

reflecting element disposed in said area between said input and output arrays of lenses, for receiving optical signals from said input mirror array and for directing optical signals to said output mirror array, said input mirror array being positioned for receiving optical signals directed by said input array of lenses and for reflecting the directed optical signals to said reflecting element, said output mirror array being disposed in optical communication with said input mirror array for receiving reflected optical signals from said reflecting element and for directing the received, reflected optical signals to the plurality of output optic fibers.

5. The device of claim 4, wherein said each rotational axis comprises a first rotational axis and a second rotational axis and wherein said each mirror element is operatively tiltable relative to said first and second axes.

6. The device of claim 4, wherein said input array of lenses is coplanar with said output array of lenses.

7. The device of claim 4, wherein said input and output arrays of lenses are formed on a common substrate.