Wafer support system

• US 6,692,576 B2
• Filed: 09/13/2002
• Issued: 02/17/2004
• Est. Priority Date: 09/01/1995
• Status: Expired due to Fees

• Current Assignee: ASM America Incorporated (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: van der Jeugd, Cornelius A., Halpin, Michael W., Foster, Derrick W., Jacobs, Loren R., Hawkins, Mark R., Wengert, John F., Vyne, Robert M.
• Primary Examiner(s): Lund, Jeffrie R.
• Application Number:
  US10/243,579
• Publication Number:
  US 20030075274A1
• Time in Patent Office: 522 Days
• Field of Search: 118/715, 118/725, 118/728, 118/729, 118/730, 118/500, 156/345.51, 156/345.52, 156/345.54, 156/345.55, 392/407, 392/411, 392/414, 392/416, 392/417, 392/418, 219/390, 219/391, 219/392, 219/395, 219/410, 219/411, 219/412, 219/413, 219/414
• US Class Current: 118/730
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H01L 21/68792 characterised by the construction of the shaft
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A wafer support system comprising a segmented susceptor having top and bottom sections and gas flow passages therethrough. A plurality of spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship with respect to the recess. A sweep gas is introduced to the bottom section of the segmented susceptor and travels through the gas flow passages to exit in at least one circular array of outlets in the recess and underneath the spaced wafer. The sweep gas travels radially outward between the susceptor and wafer to prevent back-side contamination of the wafer. The gas is delivered through a hollow drive shaft and into a multi-armed susceptor support underneath the susceptor. The support arms conduct the sweep gas from the drive shaft to the gas passages in the segmented susceptor. The gas passages are arranged to heat the sweep gas prior to delivery underneath the wafer. Short purge channels may be provided to deliver some of the sweep gas to regions surrounding the spacers to cause a continuous flow of protective purge gas around the spacers. A common bottom section may cooperate with a plurality of different top sections to form segmented susceptors suitable for supporting various sized wafers.

Claims

1. An apparatus for processing a semiconductor wafer, comprising a substantially disc-shaped susceptor having one or more gas flow passages formed therein, each of said one or more passages having an upper opening at an upper surface of the susceptor and a lower opening at a lower surface of the susceptor, the lower surface of the susceptor having three or more cavities positioned along a circle centered about a central vertical axis of the susceptor, the cavities configured to receive upper ends of support arms of a multi-armed support member configured to support and rotate the susceptor about the central vertical axis.

2. The apparatus of claim 1, wherein the upper surface of the susceptor has an annular wall that defines a pocket configured to receive a semiconductor wafer.

3. The apparatus of claim 1, further comprising a plurality of spacers extending upwardly from the upper surface of the susceptor and being configured to support a wafer slightly spaced from the upper surface.

4. The apparatus of claim 1, wherein the susceptor is formed of graphite coated with a layer of silicon carbide.

5. The apparatus of claim 1, wherein the lower opening of one of the one or more passages is located in one of the cavities, the lower opening configured to receive gas flow from an interior passage of one of the support arms of the multi-armed support member.

6. The apparatus of claim 1, wherein the one or more passages include horizontal channels.

7. The apparatus of claim 1, wherein the susceptor comprises an upper section and a lower section.

8. An apparatus for processing a semiconductor wafer, comprising:

a reaction chamber;

a susceptor within the reaction chamber, the susceptor having one or more gas flow passages formed therein, each of the one or more passages having an upper opening at an upper surface of the susceptor and a lower opening at a lower surface of the susceptor; and

a support member comprising a substantially vertical shaft and a plurality of support arms extending generally radially outward and upward from an upper section of the shaft, the arms being configured to support the susceptor such that a central vertical axis of the shaft is aligned with a central vertical axis of the susceptor, the support member configured to engage the susceptor such that rotation of the support member about the central vertical axis of the shaft causes the susceptor to rotate about the central vertical axis of the susceptor; and

a plurality of radiant heat elements configured to provide radiant energy to the reaction chamber.

9. The apparatus of claim 8, wherein said support member is substantially transparent to radiant energy.

10. The apparatus of claim 8, wherein the lower surface of the susceptor has three or more cavities positioned along a circle centered about the central vertical axis of the susceptor, the cavities configured to receive upper ends of the arms of the support member.

11. An apparatus for processing a semiconductor wafer, comprising a susceptor having one or more gas flow passages that permit gas flow between a region above the susceptor and a region below the susceptor, a lower surface of the susceptor having three or more cavities positioned along a circle centered about a central vertical axis of the susceptor, the cavities configured to receive upper ends of support arms of a multi-armed support member configured to support and rotate the susceptor about the central vertical axis.