Use of multi-layer thin films as stress sensor

• US 6,694,822 B1
• Filed: 02/10/2000
• Issued: 02/24/2004
• Est. Priority Date: 07/20/1999
• Status: Expired due to Term

• Current Assignee: Lenovo PC International Limited (Lenovo Group Ltd.)
• Original Assignee: Fidelica Microsystems, Inc. (Petters Group Worldwide LLC)
• Inventors: Prakash, Shiva, Ganapathi, Srinivasan K.
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): ALLEN, ANDRE J
• Application Number:
  US09/502,406
• Time in Patent Office: 1,475 Days
• Field of Search: 737/28, 737/63, 324/252, 204/192.11, 360/325, 360/324, 338/32.R
• US Class Current: 73/763
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01L 1/125 by using magnetostrictive means magnetostrictive sensors H10N35/101

Abstract

The present invention provides a pressure sensing device that includes at least one GMR sensor, and preferably an array of GMR sensors, with each GMR sensor having a conducting spacer layer interposed between two ferromagnetic layers. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a current, however, the magnetization vector of each ferromagnetic layer is changed, preferably to an antiparallel position, in which state the sensor is used to then sense stress applied thereto. Upon application of stress, the magnetization vectors of both free magnetic layers will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.

Claims

1. A method of sensing pressure in which applied pressure causes a change in magnetization vectors of ferromagnetic layers and a corresponding change in resistance comprising the steps of:

providing a sensing device with a sensor including a plurality of layers, the plurality of layers comprising a non magnetic conducting layer disposed between at least two ferromagnetic layers, at least one of the ferromagnetic layers having a non-zero magnetostriction;

biasing at least one of the two ferromagnetic layers with an externally supplied current such that the magnetization vectors of each ferromagnetic layer in a biased state are changed from an initial state; and

sensing a resistance in the plurality of layers upon application of pressure while the externally supplied current is being applied, the applied pressure causing the magnetization vectors of at least one of the ferromagnetic layers to change from the biased state, and thereby result in a change in resistance.

2. A method according to claim 1 wherein the externally supplied current is applied parallel to a plane created by the plurality of layers.

3. A method according to claim 2 wherein the non magnetic conducting layer provides ferromagnetic coupling of the two ferromagnetic layers which affects the magnetization vectors of the two ferromagnetic layers in an initial state.

4. A method according to claim 3 wherein the sensing device includes a plurality of sensors that are formed in a two dimensional array and operate as the one sensor such that each sensor detects the pressure of an area associated with that sensor.

5. A method according to claim 2 wherein the sensing device includes a plurality of sensors that are formed in a two dimensional array and operate as the one sensor such that each sensor detects the pressure of an area associated with that sensor.

6. A method according to claim 2 further comprising the step of sensing a reference resistance of the sensing device when the ferromagnetic layers are in the biased state without the application of pressure.

7. A method according to claim 6, wherein the step of sensing the reference resistance is sensed either immediately prior to or immediately following the sensing of applied pressure.

8. A method according to claim 6, further comprising the step of determining the pressure applied to the sensing device, the step of determining using both the reference resistance and the sensed resistance in order to minimize the influence of external conditions on the determined pressure.

9. A method according to claim 8, wherein an external condition is a liquid film applied over the sensing device.

10. A method according to claim 8, wherein the sensing device includes a plurality of sensors that are each formed and operate as the one sensor such that each sensor detects the pressure of an area associated with that sensor.

11. A method according to claim 10, wherein the step of sensing senses the resistance that exists during the obtaining of a fingerprint and further includes the step of using the resistance sensed by each sensor to determine the fingerprint.

12. A method according to claim 2, wherein only compressive forces are sensed in the step of sensing.

13. A method according to claim 2, wherein compressive and tensile forces are sensed in the step of sensing.

14. A method according to claim 13, wherein the step of biasing biases the magnetization vectors so that substantially equal compressive and tensile forces can be sensed.

15. A method according to claim 2, wherein the step of biasing adjusts sensitivity and dynamic range of the sensing device by altering the externally supplied current.

16. A method according to claim 2, wherein both of the ferromagnetic layers have non-zero magnetostriction.

17. A method according to claim 16, wherein the non-zero magnetostriction of both of the ferromagnetic layers is substantially equal.

18. A method according to claim 2, wherein only one of the ferromagnetic layers has a non-zero magnetostriction to allow rotation of the one ferromagnetic layer under the application of stress, while the other ferromagnetic layer has one of a near zero magnetostriction or magnetostriction of a sign opposite to that of the one ferromagnetic layer, in order to allow sensing of stress of either sign.

19. A method according to claim 2, further including the step of supplying a current pulse to allow for automatic temperature compensation.