Method of manufacturing a piezoelectric filter with an acoustic resonator situated on an acoustic reflector layer formed by a carrier substrate

• US 6,698,073 B2
• Filed: 02/21/2001
• Issued: 03/02/2004
• Est. Priority Date: 02/22/2000
• Status: Expired due to Term

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Maas, Henricus Godefridus Rafael, Dekker, Ronald
• Primary Examiner(s): Tugbang, A. Dexter
• Application Number:
  US09/790,298
• Publication Number:
  US 20010023084A1
• Time in Patent Office: 1,105 Days
• Field of Search: 298/46, 298/25, 298/47, 298/30, 298/31, 29/253.5, 310/335, 427/100, 156/152, 156/278, 156/280
• US Class Current: 29/25.35
• CPC Class Codes: H03H 2003/025 the resonators or networks comprising an acoustic mirror
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/564 implemented with thin-film techniques
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

A method of manufacturing a piezoelectric filter with a resonator comprising a layer of a piezoelectric material (1) which is provided with an electrode (2,3) on either side, which resonator is situated on an acoustic reflector layer (4) formed on a surface (6) of a carrier substrate (7). In the method, the layer of piezoelectric material (1) is provided on a surface (8) of an auxiliary substrate (9), after which a first electrode (2) is formed on the layer of piezoelectric material (1). The acoustic reflector layer (4) is provided on and next to the first electrode (2), and the structure thus formed is secured with the side facing away from the auxiliary substrate (9) on the carrier substrate (7). The auxiliary substrate (9) is removed and a second electrode (3) situated opposite the first electrode (2) is provided.

Claims

1. A method of manufacturing a piezoelectric filter with a resonator comprising the steps of:

providing a layer of a piezoelectric material on a surface of an auxiliary substrate;

providing a resonator on an acoustic reflector layer formed on a surface of a carrier substrate;

forming a first electrode on the layer of piezoelectric material;

providing an acoustic reflector layer on and next to the first electrode;

securing a structure thus formed with a side facing away from the auxiliary substrate on the carrier substrate;

removing the auxiliary substrate; and

providing a second electrode situated opposite the first electrode;

wherein there is started from the auxiliary substrate in the form of a slice of silicon which is provided at the surface of the auxiliary substrate with a layer of silicon oxide, after which the layer of piezoelectric material is deposited on this layer of silicon oxide, the first electrode is formed on the layer of piezoelectric material, the acoustic reflector layer is provided on and next to the first electrode, and the structure thus formed is secured with the side facing away from the auxiliary substrate on the carrier substrate, whereafter the auxiliary substrate is removed and the exposed layer of silicon oxide is removed at the location of the second electrode to be formed, after which the second electrode is provided.

2. A method as claimed in claim 1, wherein the step of securing auxiliary substrate on the carrier substrate by means of a layer of an adhesive which forms part of the acoustic reflector layer.

3. A method as claimed in claim 1, wherein the second electrode is embodied in the form of two adjacent sub-electrodes which are both situated opposite the first electrode, so that a piezoelectric filter with two series-connected resonators is formed between the two sub-electrodes.

4. A method as claimed in claim 1, wherein the step of forming the first electrode on the layer of piezoelectric material forms part of the acoustic reflector layer.