Microgyro tuning using focused ion beams
First Claim
1. A method of tuning a mechanical resonator gyroscope, comprising the steps of:
- mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes an exciting element and a sensing element for measuring a resonant frequency of the gyroscope;
activating the exciting and sensing elements to measure the resonant frequency of the mechanical resonator gyroscope; and
adjusting the resonant frequency of the gyroscope to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.
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Accused Products
Abstract
The present invention discloses methods of manufacturing mechanical resonator microgyroscopes using focused ion beam machining and the mechanical resonator gyroscopes produced therefrom. An exemplary method of tuning a mechanical resonator gyroscope, includes the steps of mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes exciting and sensing elements for measuring a resonant frequency of the gyroscope. The exciting and sensing elements are activated to measure the resonant frequency of the mechanical resonator gyroscope and the resonant frequency of the gyroscope is adjusted to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope.
35 Citations
16 Claims
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1. A method of tuning a mechanical resonator gyroscope, comprising the steps of:
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mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes an exciting element and a sensing element for measuring a resonant frequency of the gyroscope;
activating the exciting and sensing elements to measure the resonant frequency of the mechanical resonator gyroscope; and
adjusting the resonant frequency of the gyroscope to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A mechanical resonator gyroscope manufactured by the steps of:
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mounting a mechanical resonator gyroscope in a vacuum chamber with a controllable focused ion beam where the gyroscope includes an exciting element and a sensing element for measuring at least one resonant frequency of the gyroscope;
activating the exciting and sensing elements to measure the resonant frequency of the mechanical resonator gyroscope; and
adjusting the resonant frequency of the gyroscope to a desired resonant frequency value by controlling the focused ion beam to remove material of the gyroscope. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification