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Method of removing contamination adhered to surfaces and apparatus used therefor

  • US 6,699,330 B1
  • Filed: 10/02/2000
  • Issued: 03/02/2004
  • Est. Priority Date: 09/30/1999
  • Status: Expired due to Fees
First Claim
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1. A method of removing organic contaminants deposited on a surface of a substrate of an electronic device, comprising bringing a treating solution into contact with said surface, whereinsaid treating solution comprises:

  • a solvent having a concentration of at least 70% by volume of acetic acid and the remaining balance of water, and at least 100 ppm of ozone dissolved in said solvent.

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