×

Micromachined parylene membrane valve and pump

  • US 6,699,394 B2
  • Filed: 12/22/2000
  • Issued: 03/02/2004
  • Est. Priority Date: 11/12/1997
  • Status: Expired due to Term
First Claim
Patent Images

1. A method of forming a composite membrane, comprising:

  • obtaining a silicon substrate;

    opening front and rear windows on said silicon substrate which are adjacent to one another, and have a thinned silicon membrane between them;

    forming a layer of thermopneumatically impermeable material on a first side of the substrate;

    covering the impermeable material with an elastomeric material on the first side of the substrate; and

    removing the thin layer of silicon to leave a free standing material which is a composite of said impermeable material and said elastomeric material.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×