Thin film forming device, method of forming a thin, and self-light-emitting device
First Claim
1. A method of forming a thin film, wherein a sample boat having an EL material contained therein a substrate having an electrode provided thereon, and a mask between the sample boat and the substrate are provided,wherein the EL material is made to be in a vapor state in the sample boat, wherein the EL material in the vapor state is discharged from the sample boat toward the substrate, wherein the EL material in the vapor state is made to pass through an opening of the mask corresponding to the electrode, and to deposit the EL material on the electrode over the substrate in order to form a thin film, and wherein voltage is applied to the mask in order to control the deposition location of the EL material, and wherein voltage is applied to the electrode in order to control the deposition location of the EL material.
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Accused Products
Abstract
Measure of forming an EL layer by selectively depositing through evaporation a material for forming the EL layer at a desired location is provided. When a material for forming an EL layer is deposited, a mask (113) is provided between a sample boat (111) and a substrate (110). By applying voltage to the mask (113), the direction of progress of the material for forming the EL layer is controlled to be selectively deposited at a desired location.
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Citations
23 Claims
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1. A method of forming a thin film, wherein a sample boat having an EL material contained therein a substrate having an electrode provided thereon, and a mask between the sample boat and the substrate are provided,
wherein the EL material is made to be in a vapor state in the sample boat, wherein the EL material in the vapor state is discharged from the sample boat toward the substrate, wherein the EL material in the vapor state is made to pass through an opening of the mask corresponding to the electrode, and to deposit the EL material on the electrode over the substrate in order to form a thin film, and wherein voltage is applied to the mask in order to control the deposition location of the EL material, and wherein voltage is applied to the electrode in order to control the deposition location of the EL material.
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2. A method of forming a thin film,
wherein a sample boat having an EL material contained therein, a substrate having an electrode provided thereon, and a mask between the sample boat and the substrate are provided, wherein the EL material is made to be in a vapor state in the sample boat, wherein the EL material in the vapor state is discharged from the sample boat toward the substrate, wherein the EL material in the vapor state is made to pass through an opening of the mask corresponding to the electrode, and to deposit the EL material on the electrode over the substrate in order to form a thin film, and wherein voltage is applied to the mask in order to control the deposition location of the EL material, and wherein the EL material in a vapor state is charged when the EL material is made to be in a vapor state in the sample boat, and is discharged from the sample boat toward the substrate.
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3. A method of manufacturing an EL display device comprising a plurality of pixels over a substrate, the method comprising:
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making an EL material to be in a vapor state in a sample boat;
discharging the EL material in a vapor state from the sample boat toward the substrate;
passing the EL material in the vapor state through an opening of a first mask provided between the sample boat and the substrate, wherein voltage is applied to the first mask in order to control the deposition location of the EL material, and wherein each of the plurality of pixels comprises a plurality of pixel electrodes, and the EL material is selectively deposited over the plurality of pixel electrodes, and wherein voltage is applied to the pixel electrode in order to control the deposition location of the EL material.
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4. A method of manufacturing an EL display device comprising:
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making an EL material to be in a vapor state in a sample boat;
discharging the EL material in a vapor state from the sample boat toward a pixel electrode over a substrate;
passing the EL material in the vapor state through an opening of a first mask provided between the sample boat and the substrate;
wherein the voltage is applied to the first mask in order to control the deposition location of the EL material, and wherein the EL material in the vapor state is charged when the EL material is made to be in the vapor state and discharge from the sample boat. - View Dependent Claims (5, 6, 7, 8)
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9. A method of forming a thin film,
wherein a sample boat having an EL material contained therein, a substrate having an electrode provided thereon, and a mask between the sample boat and the substrate are provided, wherein the EL material is made to be in a vapor state in the sample boat, wherein the EL material in the vapor state is discharged from the sample boat toward the substrate, wherein the EL material in the vapor state is made to pass through an opening of the mask corresponding to the electrode, and to deposit the EL material on the electrode over the substrate in order to form a thin film, and wherein voltage is applied to the mask in order to control the deposition location of the EL material by controlling a direction of progress thereof.
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19. A method of manufacturing an EL display device comprising a plurality of pixels over a substrate, the method comprising:
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making an EL material to be in a vapor state in a sample boat;
discharging the EL material in a vapor state from the sample boat toward the substrate;
passing the EL material in the vapor state through an opening of a first mask provided between the sample boat and the substrate, wherein voltage is applied to the first mask in order to control the deposition location of the EL material, and wherein each of the plurality of pixels comprises a plurality of pixel electrodes, and the EL material is selectively deposited over the plurality of pixel electrodes by controlling a direction of progress thereof. - View Dependent Claims (20, 21, 23)
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Specification