Electrically isolated support for overlying MEM structure
First Claim
1. A MEM apparatus, comprising:
- a substrate;
an active component supported on said substrate;
a cover, supported on said substrate having an upper surface, defined by peripheral edges, extending at least partially over said active component; and
at least one support structure disposed under said cover interior of said peripheral edges, for supporting said cover.
2 Assignments
0 Petitions
Accused Products
Abstract
MEM devices are fabricated with integral dust covers, cover support posts and particle filters for reduced problems relating to particle contamination. In one embodiment, a MEM device (10) includes an electrostatic actuator (12) that drives a movable frame (14), a displacement multiplier (16) for multiplying or amplifying the displacement of the movable frame (14), and a displacement output element (18) for outputting the amplified displacement. The actuator (12) is substantially encased within a housing formed by a cover (36) and related support components disposed between the cover (36) and the substrate (38). Electrically isolated support posts may be provided in connection with actuator electrodes to prevent contact between the cover and the underlying electrodes. Such a support post may also incorporate an electric filter element for filtering undesired components from a drive signal. Particle filters may be provided in connection with etch release holes or other openings in order to further protect against particle contamination.
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Citations
13 Claims
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1. A MEM apparatus, comprising:
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a substrate;
an active component supported on said substrate;
a cover, supported on said substrate having an upper surface, defined by peripheral edges, extending at least partially over said active component; and
at least one support structure disposed under said cover interior of said peripheral edges, for supporting said cover. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification