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Electrically isolated support for overlying MEM structure

  • US 6,700,173 B1
  • Filed: 08/20/2002
  • Issued: 03/02/2004
  • Est. Priority Date: 08/20/2002
  • Status: Expired due to Term
First Claim
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1. A MEM apparatus, comprising:

  • a substrate;

    an active component supported on said substrate;

    a cover, supported on said substrate having an upper surface, defined by peripheral edges, extending at least partially over said active component; and

    at least one support structure disposed under said cover interior of said peripheral edges, for supporting said cover.

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