Assembly having variable capacitance
First Claim
1. Assembly of variable capacitance comprising a variable coverage or a variable distance of at least one first electrically conductive area and at least one second electrically conductive area, with said at least one first electrically conductive area being configured on or in a substrate and with said at least one second electrically conductive area being on or in an actuator element of a first micro-mechanical actuator that is disposed on said substrate in such a way that said first micro-mechanical actuator is capable of performing, by means of a first drive system, movement of said actuator element with said at least one second electrically conductive area along a surface of said substrate at different positions relative to said at least one first electrically conductive area at which positions said at least one second electrically conductive area overlaps said at least one first electrically conductive area at least partly;
- and holding means capable, by means of a second drive system independent of said first drive system, of pulling or pushing said actuator element in said different positions towards said substrate or a mechanical stop on said substrate and of holding said actuator element in such positions.
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Accused Products
Abstract
The present invention relates to an assembly of variable capacitance as well as to a method of operating the assembly. In the assembly, a variable capacitor is formed by a variable coverage or a variable distance of at least one first (4) and one second electrically conductive region (5). The first electrically conductive region (4) is configured on or in a substrate (1) and said second electrically conductive region (5) is configured on or in an actuator element (3) of a first micro-mechanical actuator (2). The actuator (2) is disposed on the substrate (1) in such a way that it can perform a movement of the actuator element (3) with the second region (5) along a surface of the substrate (1) at different positions relative to the first region (4), at which positions the second region (5) overlaps the first region (4) at least partly. Moreover, holding means (6, 10, 11) are provided which are capable of pulling or pushing the actuator element (3) in the different positions towards the substrate (1) or a mechanical stop (13) on the substrate (1), and of holding it in these positions.
The inventive assembly serves to implement a variable capacitance that presents a high stability in resistance to outside influences according to its respective setting.
14 Citations
20 Claims
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1. Assembly of variable capacitance comprising a variable coverage or a variable distance of at least one first electrically conductive area and at least one second electrically conductive area, with said at least one first electrically conductive area being configured on or in a substrate and with said at least one second electrically conductive area being on or in an actuator element of a first micro-mechanical actuator that is disposed on said substrate in such a way that said first micro-mechanical actuator is capable of performing, by means of a first drive system, movement of said actuator element with said at least one second electrically conductive area along a surface of said substrate at different positions relative to said at least one first electrically conductive area at which positions said at least one second electrically conductive area overlaps said at least one first electrically conductive area at least partly;
- and holding means capable, by means of a second drive system independent of said first drive system, of pulling or pushing said actuator element in said different positions towards said substrate or a mechanical stop on said substrate and of holding said actuator element in such positions.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
Specification