Micro-electromechanical optical switch assembly for optical data networks
First Claim
1. A micro-electromechanical optical switch assembly comprising:
- a substrate and a cover disposed over an upper surface of the substrate;
an array of input optical fibers and an array of output optical fibers supported by the substrate;
an array of input reflective switching elements, each one of the input switching elements disposed to receive light transmitted from an associated input optical fiber, each of the input switching elements rotatably supported by the substrate for rotation about an axis parallel with an end portion of the associated input optical fiber;
an array of output reflective switching elements, each one of the output switching elements disposed to transmit light to an associated output optical fiber, each of the output switching elements rotatably supported by the substrate for rotation about an axis parallel with an end portion of the associated output optical fiber;
an intermediate reflective element supported by the cover on an optical path between the input switching elements and the output switching elements and disposed to direct light received from the input switching elements to the output switching elements; and
an actuating mechanism operative to control rotation of the input switching elements and the output switching elements.
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Abstract
A micro-electromechanical optical switch assembly is provided for an optical network. The switch assembly includes arrays of input and output optical fibers and optical components for selecting light paths that connect any selected pair of input and output fibers. The optical components include optical switching elements, such as torsionally supported micromechanical mirrors that are electrostatically actuated to rotate to direct the light beam along the desired light path. The mirrors are bulk micromachined into a semiconductor wafer, preserving their optical qualities, and formed into a chip mated to a cover. The package incorporates alignment elements to ensure correct position and orientation of the optical components in the package.
106 Citations
110 Claims
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1. A micro-electromechanical optical switch assembly comprising:
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a substrate and a cover disposed over an upper surface of the substrate;
an array of input optical fibers and an array of output optical fibers supported by the substrate;
an array of input reflective switching elements, each one of the input switching elements disposed to receive light transmitted from an associated input optical fiber, each of the input switching elements rotatably supported by the substrate for rotation about an axis parallel with an end portion of the associated input optical fiber;
an array of output reflective switching elements, each one of the output switching elements disposed to transmit light to an associated output optical fiber, each of the output switching elements rotatably supported by the substrate for rotation about an axis parallel with an end portion of the associated output optical fiber;
an intermediate reflective element supported by the cover on an optical path between the input switching elements and the output switching elements and disposed to direct light received from the input switching elements to the output switching elements; and
an actuating mechanism operative to control rotation of the input switching elements and the output switching elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110)
a bottom cover; and
the alignment device comprises a hole through the substrate, and a corresponding depression in one of the cover and the bottom cover, and a protrusion on the other of the cover and the bottom cover disposed to extend through the hole and into the corresponding depression.
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28. The micro-electromechanical optical switch assembly of claim 1, further comprising a collimating optical component disposed adjacent an end of each of the input optical fibers.
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29. The micro-electromechanical optical switch assembly of claim 28, wherein the collimating optical component comprises a ball lens or a gradient index lens.
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30. The micro-electromechanical optical switch assembly of claim 1, further comprising:
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an input lower optical turning element and an input upper optical turning element;
the input lower optical turning element disposed to reflect light from the input optical fiber to the input upper optical turning element; and
the input upper optical turning element disposed to reflect light to a selected one of the input switching elements.
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31. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element is supported by the substrate;
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the input upper optical turning element is supported by the cover.
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32. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element is fixedly supported by the substrate.
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33. The micro-electromecnanical optical switch assembly of claim 30, wherein the input lower optical turning element is supported in a groove formed in the substrate.
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34. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element comprises an elongated mirror.
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35. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element comprises a plurality of mirrors.
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36. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element comprises a reflective coating on a surface of the substrate.
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37. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element comprises a mirror attached to a surface of the substrate.
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38. The micro-electromechanical optical switch assembly of claim 37, wherein the mirror is wedge-shaped.
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39. The micro-electromechanical optical switch assembly of claim 30, wherein the cover is optically transparent and includes a protrusion extending into a groove formed in the substrate, and the input lower optical turning element is supported on the protrusion.
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40. The micro-electromechanical optical switch assembly of claim 39, wherein the input lower optical turning element comprises a reflective coating formed on a surface of the protrusion.
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41. The micro-electromechanical optical switch assembly of claim 39, wherein the input lower optical turning element comprises an internal reflective surface formed on the protrusion.
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42. The micro-electromechanical optical switch assembly of claim 30, wherein the input lower optical turning element comprises a collimating optical element.
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43. The micro-electromechanical optical switch assembly of claim 42, wherein the collimating optical element comprises a curved mirror.
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44. The micro-electromechanical optical switch assembly of claim 30, wherein the input upper optical turning element comprises a mirror embedded in the cover.
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45. The micro-electromechanical optical switch assembly of claim 44, wherein the mirror is shaped to collimate light from a selected one of the input optical fibers.
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46. The micro-electromechanical optical switch assembly of claim 30, wherein the upper optical turning element comprises a mirror and a lens, the lens configured to collimate light transmitted from a selected one of the input optical fibers.
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47. The micro-electromechanical optical switch assembly of claim 30, wherein the input upper optical turning element is operative to collimate light transmitted from a selected one of the input optical fibers.
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48. The micro-electromechanical optical switch assembly of claim 30, wherein the input upper optical turning element is fixedly supported on the cover.
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49. The micro-electromechanical optical switch assembly of claim 30, wherein the input upper optical turning element comprises a mirror.
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50. The micro-electromechanical optical switch assembly of claim 49, wherein the mirror is shaped to collimate light from a selected input optical fiber.
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51. The micro-electromechanical optical switch assembly of claim 30, wherein the input upper optical turning element comprises a plurality of mirrors, each mirror associated with a selected input optical fiber.
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52. The micro-electromechanical optical switch assembly of claim 51, wherein each mirror is shaped to collimate light from the input optical fiber.
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53. The micro-electromechanical optical switch assembly of claim 1, further comprising:
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an output lower optical turning element and an output upper optical turning element;
the output upper optical turning element disposed to reflect light from a selected one of the output switching elements to the output lower optical turning element; and
the output lower optical turning element disposed to reflect light to a selected one of the output optical fibers.
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54. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element is operative to focus light from the selected one of the output switching elements.
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55. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element is supported by the substrate, and
the output upper optical turning element is supported by the cover. -
56. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element is fixedly supported on the substrate.
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57. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element comprises an elongated mirror.
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58. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element comprises a plurality of mirrors.
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59. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element comprises a reflective coating on a surface of the substrate.
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60. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element comprises a mirror attached to a surface of the substrate.
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61. The micro-electromechanical optical switch assembly of claim 60, wherein the mirror is wedge-shaped.
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62. The micro-electromechanical optical switch assembly of claim 53, wherein the cover is optically transparent and includes a protrusion extending into a groove formed in the substrate, and the output lower optical turning element is supported on the protrusion.
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63. The micro-electromechanical optical switch assembly of claim 62, wherein the output lower optical turning element comprises a reflective coating formed on a surface of the protrusion.
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64. The micro-electromechanical optical switch assembly of claim 62, wherein the output lower optical turning element comprises an internal reflective surface formed on the is protrusion.
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65. The micro-electromechanical optical switch assembly of claim 53, wherein the output lower optical turning element comprises a focusing optical element.
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66. The micro-electromechanical optical switch assembly of claim 65, wherein the focusing optical element comprises a curved mirror.
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67. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element comprises a mirror embedded in the cover.
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68. The micro-electromechanical optical switch assembly of claim 67, wherein the mirror is shaped to focus light to a selected one of the output optical fibers.
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69. The micro-electromechanical optical switch assembly of claim 53, wherein the upper optical turning element comprises a mirror and a lens, the lens configured to focus light to a selected one of the output optical fibers.
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70. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element is operative to focus light to a selected one of the output optical fibers.
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71. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element is fixedly supported on the cover.
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72. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element comprises a mirror.
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73. The micro-electromechanical optical switch assembly of claim 72, wherein the mirror is shaped to focus light from the output switching element.
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74. The micro-electromechanical optical switch assembly of claim 53, wherein the output upper optical turning element comprises a plurality of mirrors, each mirror associated with a selected output optical fiber.
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75. The micro-electromechanical optical switch assembly of claim 74, wherein each mirror is shaped to focus light from the output switching element.
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76. The micro-electromechanical optical switch assembly of claim 1, wherein the array of input optical fibers and the array of output optical fibers are aligned in grooves formed in the substrate.
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77. The micro-electromechanical optical switch assembly of claim 76, wherein the cover includes a plurality of grooves formed therein in alignment with the grooves formed in the substrate.
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78. The micro-electromechanical optical switch assembly of claim 1, wherein the cover is formed of an optically transparent material.
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79. The micro-electromechanical optical switch assembly of claim 1, further comprising a bottom cover fixed to a lower surface of the substrate.
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80. The micro-electromechanical optical switch assembly of claim 1, wherein a sealed cavity is provided in the substrate surrounding the optical switching elements.
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81. The micro-electromechanical optical switch assembly of claim 80, further comprising:
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a bottom cover disposed over a lower surface of the substrate; and
the sealed cavity is defined between the cover and bottom cover.
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82. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with air, an inert gas, or a vacuum.
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83. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with an optically transparent, non-electrically conductive dielectric liquid.
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84. The micro-electromechanical optical switch assembly of claim 83, wherein the liquid comprises an oil or glycerin.
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85. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with a liquid selected to provide damping of the switching elements.
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86. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with a liquid selected to provide shock resistance.
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87. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with a liquid having a dielectric constant selected to amplify electrostatic force acting on the switching elements.
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88. The micro-electromechanical optical switch assembly of claim 80, wherein the sealed cavity is filled with a liquid having an index of refraction selected to reduce optical divergence of light transmitted through the sealed cavity.
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89. The micro-electromechanical optical, switch assembly of claim 80, wherein the sealed cavity is filled with a fluorinated solvent.
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90. The micro-electromechanical optical switch assembly of claim 1, further comprising an optical detector element disposed on an optical path and in communication with the actuating mechanism.
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91. The micro-electromechanical optical switch assembly of claim 90, wherein the optical detector element is disposed behind the input switching element.
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92. The micro-electromechanical optical switch assembly of claim 90, wherein the optical detector element is disposed at an end of the input optical fibers.
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93. The micro-electromechanical optical switch assembly of claim 90, further comprising:
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an input optical turning element disposed to reflect light from the input optical fiber to the input turning element; and
the optical detector element is disposed behind the input optical turning element.
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94. The micro-electromechanical optical switch assembly of claim 93, wherein the input optical turning element is supported by the substrate.
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95. The micro-electromechanical optical switch assembly of claim 93, wherein the input optical turning element is supported by the cover.
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96. The micro-electromechanical optical switch assembly of claim 90, further comprising:
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an output optical turning element disposed to transmit light from to the output switching element to the output optical fiber; and
the optical detector element is disposed behind the output optical turning element.
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97. The micro-electromechanical optical switch assembly of claim 96, wherein the output optical turning element is supported by the substrate.
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98. The micro-electromechanical optical switch assembly of claim 96, wherein the output optical turning element is supported by the cover.
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99. The micro-electromechanical optical switch assembly of claims 1, 16, or 17, wherein the actuating mechanism comprises first actuation pads on a bottom of each of the input and output reflective switching elements and second actuation pads supported on a bottom surface of the substrate in opposition to the first actuation pads.
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100. The micro-electromechanical optical switch assembly of claim 99, wherein the second actuation pads extend parallel to the respective rotation axis of an associated one of the input and output reflective switching elements.
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101. The micro-electromechanical optical switch assembly of claim 99, wherein the second actuation pads are cantilevered from the bottom surface of the substrate.
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102. The micro-electromechanical optical switch assembly of claims 16 or 17, wherein:
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the actuating mechanism comprises first actuation pads on a bottom of each of the input and output reflective switching elements and second actuation pads supported on a bottom surface of the substrate in opposition to the first actuation pads; and
the second actuation pads extend at angle intermediate the rotation axis and the further rotation axis of an associated one of the input and output reflective switching elements.
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103. The micro-electromechanical optical switch assembly of claims 16 or 17, wherein:
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the actuating mechanism comprises first actuation pads on a bottom of each of the input and output reflective switching elements and second actuation pads supported on a bottom surface of the substrate i n opposition to the first actuation pads; and
the second actuation pads include pads extending parallel to the rotation axis and to the further rotation axis of an associated one of the input and output reflective switching elements.
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104. The micro-electromechanical optical switch assembly of claims 1, 16, or 17, wherein the actuating mechanism comprises first actuation pads on a bottom of each of the input and output reflective switching elements and second actuation pads disposed in opposition to the first actuation pads and supported on a second substrate bonded to a lower surface of the substrate.
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105. The micro-electromechanical optical switch assembly of claim 15, wherein the input fibers and the output fibers are supported in a substrate stack comprising a plurality of substrate layers.
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106. The micro-electromechanical optical switch assembly of claim 105, wherein end faces of the input fibers and the output fibers protrude beyond an end face of the substrate stack.
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107. The micro-electromechanical optical switch assembly of claim 105, wherein the substrate stack is mounted to a bottom surface of the substrate and the end faces of the input fibers and the output fibers extend into through-holes formed in the substrate.
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108. The micro-electromechanical optical switch assembly of claim 1, further including a, bottom cover, a chamber defined between the cover and the bottom cover.
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109. The micro-electromechanical optical switch assembly of claim 108, wherein a cavity is defined between the cover and the bottom cover, and an optically clear fluid is disposed within the cavity.
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110. The micro-electromechanical optical switch assembly of claim 109, wherein the fluid comprises a fluorinated solvent.
Specification