Switching device, in particular for optical applications

• US 6,701,039 B2
• Filed: 10/01/2002
• Issued: 03/02/2004
• Est. Priority Date: 10/04/2001
• Status: Expired due to Term

• Current Assignee: Colibrys Incorporated (Safran Sensing Technologies Switzerland SA)
• Original Assignee: Colibrys Incorporated (Safran Sensing Technologies Switzerland SA)
• Inventors: Underbjerg, Carsten, Bourgeois, Claude
• Primary Examiner(s): Lee, John D.
• Application Number:
  US10/260,541
• Publication Number:
  US 20030068118A1
• Time in Patent Office: 518 Days
• Field of Search: 385/16-23
• US Class Current: 385/22
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

There is described a switching device comprising a mobile element (2) that is able to at least move back and forth along a defined trajectory between a zero position (O) and at least one predetermined switching position (A, B), an elastic member (3, 30, 32) connecting the mobile element to a base (4) and at least one stationary actuating electrode (5, 6) located in the vicinity of the predetermined switching position for producing electrostatic forces to cause the mobile element to move to and/or away from the predetermined switching position.

The stationary actuating electrode is disposed to act on at least one edge (20a) of the mobile element which is substantially parallel to the mobile element'"'"'s trajectory. The geometry of the mobile element, elastic member and actuating electrode is such that the mobile element cannot come into contact with the actuating electrode and that the switching position is defined by an equilibrium point (E) between lateral electrostatic forces produced on the mobile element by the stationary actuating electrode and mechanical springs forces produced by the elastic member.

Claims

1. A switching device comprising:

a mobile element that is able to move back and forth along a defined trajectory between a zero position and at least one predetermined switching position;

an elastic member connecting said mobile element to a base, said elastic member allowing said mobile element to at least move back and forth between said zero position and said at least one predetermined switching position; and

at least one stationary actuating electrode located in the vicinity of said at least one predetermined switching position for producing electrostatic forces to cause said mobile element to move to and/or away from said at least one predetermined switching position,

wherein said at least one stationary actuating electrode is disposed to act on at least one edge of said mobile element that is substantially parallel to the mobile element'"'"'s trajectory,

and wherein the geometry of said mobile element, said elastic member and said at least one stationary actuating electrode is such that said mobile element cannot come into contact with said actuating electrode and that said at least one predetermined switching position is defined by an equilibrium point between lateral electrostatic forces produced on said mobile element by said at least one stationary actuating electrode and mechanical springs forces produced by said elastic member, the force resulting from the sum of said lateral electrostatic forces and said mechanical spring forces having opposite directions around said equilibrium point.

2. The switching device according to claim 1, wherein the geometry of said mobile element, said elastic member and said at least one stationary actuating electrode is such that said lateral electrostatic forces exhibit a steep drop of intensity close to said equilibrium point.

3. The switching device according to claim 1, wherein said device further comprises a control circuit for controlling the electrostatic forces produced by said actuating electrode and for adjusting the position of the mobile element near the equilibrium point.

4. The switching device according to claim 1, wherein said switching device is produced in the form of a micro-mechanical structure, said device further comprising a substrate, said mobile element, said elastic member and said actuating electrode being micro-machined into said substrate.

5. The switching device according to claim 4, wherein said substrate includes a crystalline or polycrystalline material such as silicon or polysilicon.

6. The switching device according to claim 4, wherein said substrate includes metal.

7. The switching device according to claim 4, wherein said mobile element comprises a screen plate which is able to move in a plane substantially parallel to the plane of said substrate.

8. The switching device according to claim 7, wherein an opening is provided in the plane of said substrate, said opening being either closed by said screen plate or open depending on whether said mobile element is in said predetermined switching position.

9. The switching device according to claim 7, wherein said elastic member comprises a folded beam structure comprising at least a first beam extending from said base to an intermediate member in a first direction substantially parallel to the plane of said substrate, and at least a second beam extending from said intermediate member to said mobile element in a second direction substantially opposite to said first direction.

10. The switching device according to claim 7, wherein said elastic member comprises a parallel or pantograph-like structure for guiding said mobile element so that its trajectory is substantially linear.

11. The switching device according to claim 10, wherein said parallel or pantograph-like structure comprises a first pair of parallel flexible beams extending from said base to an intermediate member in a first direction substantially parallel to the plane of said substrate, and a second pair of parallel flexible beams extending from said intermediate member to said mobile element in a second direction substantially opposite to said first direction.

12. The switching device according to claim 11, wherein said first pair of parallel flexible beams is located between said second pair of parallel flexible beams so that said base further forms a security stopper against external shocks.

13. The switching device according to claim 7, wherein said actuating electrode acts on an outermost edge of said mobile element, said outermost edge exhibiting a curved profile.

14. The switching device according to claim 7, wherein said mobile element and said actuating electrode each comprise a comb-shaped structure including a plurality of teeth extending in a direction substantially parallel to the mobile element'"'"'s trajectory, each tooth comprising an end portion and a base portion connecting said end portion to said mobile element or said actuating electrode, respectively, said base portion being of smaller diameter than said end portion.

15. The switching device according to claim 14, wherein said comb-shaped structures are designed so that air damping between said teeth is achieved.

16. The switching device according to claim 7, wherein an optical deflecting screen plate is disposed on said screen plate perpendicularly to the plane of said mobile element for selectively deflecting a light beam parallel to said plane.

17. The switching device according to claim 4, wherein said mobile element comprises a screen plate which is substantially parallel, in a zero position, to the plane of said substrate, said screen plate being able to rotate around at least one axis of rotation substantially parallel to the plane of said substrate.

18. The switching device according to claim 17, wherein said mobile element comprises an actuating member extending substantially perpendicularly from said screen plate towards said substrate and at least one torsion beam extending along the direction of said at least one axis of rotation,

said at least one actuating electrode being disposed on said substrate underneath said screen plate, in a direction substantially perpendicular to said at least one axis of rotation, so as to cause a displacement of said actuating member, and thereby rotation of said screen plate around said at least one axis of rotation.

19. The switching device according to claim 17, wherein said screen plate comprises a reflective surface.

20. A switching unit comprising a plurality of switching devices according to claim 1.

21. A method for actuating a switching device comprising:

a mobile element that is able to move back and forth along a defined trajectory between a zero position and at least one predetermined switching position;

an elastic member connecting said mobile element to a base, said elastic member allowing said mobile element to at least move back and forth between said zero position and said at least one predetermined switching position; and

at least one stationary actuating electrode located in the vicinity of said at least one predetermined switching position for producing electrostatic forces to cause said mobile element to at least move to and/or away from said at least one predetermined switching position,

said method comprising the steps of;

placing said stationary actuating electrodes to act on at least one edge of said mobile element which is substantially parallel to the mobile element'"'"'s trajectory; and

selecting the geometry of said mobile element, said elastic member and said at least one stationary actuating electrode so that said mobile element cannot come into contact with said actuating electrode and that said at least one predetermined switching position is defined by an equilibrium point between lateral electrostatic forces produced on said mobile element by said at least one stationary actuating electrode and mechanical springs forces produced by said elastic member, the force resulting from the sum of said lateral electrostatic forces and said mechanical spring forces having opposite directions around said equilibrium point.