Method for treating the surface of a workpiece

• US 6,701,941 B1
• Filed: 03/27/2000
• Issued: 03/09/2004
• Est. Priority Date: 05/09/1997
• Status: Expired due to Term

• Current Assignee: OEM Group, LLC
• Original Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Inventors: Bergman, Eric J., Hess, Mignon P.
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US09/536,251
• Time in Patent Office: 1,443 Days
• Field of Search: 134/102.1, 134/102.3, 134/102.2, 134/902, 134/186, 134/148, 134/153, 134/25.4, 134/33
• US Class Current: 134/25.4
• CPC Class Codes: B08B 2203/005 the liquid being ozonated
• CPC Class Codes: B08B 2230/01 Cleaning with steam
• CPC Class Codes: B08B 3/02 Cleaning by the force of jets or sprays
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: H01L 21/02052 Wet cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02054 combining dry and wet cleaning steps H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/6704 for wet cleaning or washing
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus comprises a liquid supply line that is used to provide fluid communication between a reservoir containing the treatment liquid and a treatment chamber housing the workpiece. A heater is disposed to heat the workpiece, either directly or indirectly. Preferably, the workpiece is heated by heating the treatment liquid that is supplied to the workpiece. One or more nozzles accept the treatment liquid from the liquid supply line and spray it onto the surface of the workpiece while an ozone generator provides ozone into an environment containing the workpiece.

Claims

1. A method for processing one or more workpiece comprising the steps of:

placing the workpiece into a chamber;

heating a liquid;

applying the heated liquid onto the workpiece in the chamber, with the heated liquid forming a boundary layer on the workpiece;

providing ozone gas into the chamber, wherein ozone gas moves via diffusion from a region of higher ozone concentration, at the gas/liquid interface at the surface of the heated liquid boundary, through the heated liquid boundary layer, and to a region of lower ozone concentration at the liquid/solid interface at the surface of the workpiece.

2. The method of claim 1 further comprising the steps of:

exposing the surface to electromagnetic radiation.

3. The method of claim 1 wherein the liquid comprises de-ionized water and a member selected from the group consisting of:

hydrochloric acid;

sulfuric acid; and

ammonium hydroxide.

4. The method of claim 1 further including the step of controlling the thickness of the boundary layer by rotating the workpiece.

5. The method of claim 1 further including the step of controlling the thickness of the boundary layer by adding a surfactant to the liquid.

6. The method of claim 1 wherein the step of forming the boundary layer comprises the step of spraying the liquid onto the surface of the workpiece at a controlled rate.

7. The method of claim 1 wherein the ozone is introduced as a dry gas into the chamber from an ozone generator.

8. The method of claim 1 wherein at least some of the ozone is injected or mixed into the liquid outside of the chamber and dissolves into the liquid, before the liquid is applied onto the workpieces.

9. The method of claim 1 further comprising the step of treating the workpiece in a process chamber having a pressurized atmosphere.

10. The method of claim 9 further comprising the step of supplying steam under pressure into the process chamber.

11. The method of claim 1 further comprising the step of irradiating the workpiece with UV light, to enhance reaction kinetics.

12. The method of claim 1 further comprising the steps of rinsing and drying the workpieces.

13. The method of claim 1 wherein the liquid comprises superheated de-ionized water.

14. The method of claim 1 wherein the ozone is provided separately from the heated liquid.

15. A method for treating a workpiece comprising the steps of:

placing the workpiece into a chamber;

heating a liquid;

applying the liquid onto a surface of the workpiece within the chamber, with the liquid comprising de-ionized water, and at least one of hydrochloric acid and hydrofluoric acid;

forming the liquid into a layer on the surface of the workpiece; and

providing ozone gas into the chamber, wherein ozone gas moves via diffusion from a region of higher ozone concentration, at the gas/liquid interface at the surface of the heated liquid boundary, through the heated liquid boundary layer, and to a region of lower ozone concentration at the liquid/solid interface at the surface of the workpiece.

16. A method for treating a workpiece comprising the steps of:

placing the workpiece into a chamber;

heating a liquid;

spraying the heated liquid onto a surface of the workpiece,

forming the heated liquid into a boundary layer on the surface of the workpiece;

controlling the thickness of the boundary layer; and

providing ozone gas into the chamber, wherein ozone gas moves via diffusion from a region of higher ozone concentration, at the gas/liquid interface at the surface of the heated liquid boundary, through the heated liquid boundary layer, and to a region of lower ozone concentration at the liquid/solid interface at the surface of the workpiece.

17. A method for treating a workpiece comprising the steps of:

heating a liquid;

spraying droplets of the heated liquid onto a surface of the workpiece at a controlled rate;

controlling the size of the droplets sprayed onto the surface of the workpiece;

forming the heated liquid into a boundary layer on the surface of the workpiece; and

diffusing ozone through the boundary layer, to cause a reaction at the surface of the workpiece.