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Method for treating the surface of a workpiece

DC
  • US 6,701,941 B1
  • Filed: 03/27/2000
  • Issued: 03/09/2004
  • Est. Priority Date: 05/09/1997
  • Status: Expired due to Term
First Claim
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1. A method for processing one or more workpiece comprising the steps of:

  • placing the workpiece into a chamber;

    heating a liquid;

    applying the heated liquid onto the workpiece in the chamber, with the heated liquid forming a boundary layer on the workpiece;

    providing ozone gas into the chamber, wherein ozone gas moves via diffusion from a region of higher ozone concentration, at the gas/liquid interface at the surface of the heated liquid boundary, through the heated liquid boundary layer, and to a region of lower ozone concentration at the liquid/solid interface at the surface of the workpiece.

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