Flow-switching microdevice

• US 6,702,256 B2
• Filed: 07/17/2001
• Issued: 03/09/2004
• Est. Priority Date: 07/17/2001
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Yin, Hongfeng, Killeen, Kevin
• Primary Examiner(s): Look, Edward K.
• Assistant Examiner(s): Fristoe, Jr., John K.
• Application Number:
  US09/908,292
• Publication Number:
  US 20030015682A1
• Time in Patent Office: 966 Days
• Field of Search: 251/304, 251/318, 251/326, 137/625.46
• US Class Current: 251/304
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 using moulding or stamping
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0011 Gate valves or sliding valves
• CPC Class Codes: F16K 99/0013 Rotary valves
• CPC Class Codes: Y10T 137/86863 Rotary valve unit

Abstract

The present invention relates to a microdevice having a valve structure that contains low or no dead volume. The microdevice comprises a substrate and a cover plate each having a substantially planar contact surface and each contact surface having a fluid-transporting feature associated therewith. The substrate contact surface is positioned in slidable and fluid-tight contact with the cover plate contact surface to allow for controllable alignment between the fluid-transporting features. As a result, fluid communication is provided therebetween through a small area. Where the cover plate fluid-transporting feature comprises a conduit, the conduit may have a substantially constant cross-sectional area. The controllable alignment between the fluid-transporting features may form an alignment-dependent variable-length flow path.

Claims

1. A microdevice for controlling fluid flow, comprising a substrate and a cover plate each having a substantially planar contact surface and each contact surface having a fluid-transporting feature associated therewith, wherein the substrate contact surface is positioned in slidable and fluid-tight contact with the cover plate contact surface such that the fluid-transporting features align to form a fluid-transporting conduit having a controllable cross-sectional area no greater than about 1 mm^2.

2. The microdevice of claim 1, wherein the area is no greater than about 0.1 mm^2.

3. The microdevice of claim 1, wherein the contact surfaces are rotationally slidable with respect to each other.

4. The microdevice of claim 1, wherein at least one of the fluid-transporting features comprises a channel.

5. The microdevice of claim 1, wherein at least one of the fluid-transporting features comprises a conduit.

6. The microdevice of claim 5, wherein the conduit provides for fluid flow in a nonparallel direction with respect to the contact surfaces.

7. The microdevice of claim 6, wherein the fluid flow direction provided by the conduit is substantially orthogonal to either of the planar surfaces.

8. The microdevice of claim 1, wherein at least one of the features is in fluid communication with a separation unit.

9. The microdevice of claim 8, wherein the separation unit is an integral part of the microdevice.

10. The microdevice of claim 8, wherein the separation unit is detachable from the microdevice.

11. The microdevice of claim 8, wherein the separation unit is constructed to carry out chromatography.

12. The microdevice of claim 1, wherein at least one of the features is in fluid communication with a detector.

13. The microdevice of claim 12, wherein the detector represents a component of a mass spectrometer.

14. The microdevice of claim 12, wherein the detector is adapted to detect fluorescence.

15. The microdevice of claim 1, further comprising an additional fluid-transporting feature in the substrate contact surface.

16. The microdevice of claim 15, wherein the substrate features are provided fluid communication with each other upon alignment with the cover plate feature.

17. The microdevice of claim 15, wherein the substrate has an opposing surface substantially parallel to the contact surfaces.

18. The microdevice of claim 17, further comprising an additional cover plate having a contact surface in slidable and fluid-tight contact with the opposing surface of the substrate.

19. The microdevice of claim 18, wherein the cover plates are substantially immobilized with respect to each other, while the cover plate contact surfaces remain in slidable contact with respect to the substrate surfaces.

20. The microdevice of claim 18, further comprising a fluid-transporting feature associated with the additional cover plate contact surface, wherein alignment of the substrate feature, the cover plate feature and the additional cover plate feature provides fluid communication between the fluid-transporting features of the cover plates.

21. The microdevice of claim 1, wherein at least one of the substrate or cover plate comprises a biofouling-resistant polymer.

22. The microdevice of claim 21, wherein the biofouling-resistant polymer is selected from the group consisting of polyimides, polyketone, mixtures thereof, and copolymers thereof.

23. The microdevice of claim 1, wherein the contact surfaces remain in fluid-tight contact under an internal microdevice pressure of up to about 100 megapascals.

24. The microdevice of claim 23, wherein the internal microdevice pressure is about 0.5 to about 40 megapascals.

25. A microdevice for controlling fluid flow, comprising a substrate and a cover plate each having a substantially planar contact surface and each contact surface having a fluid-transporting feature associated therewith, wherein

the substrate contact surface is positioned in slidable and fluid-tight contact with the cover plate contact surface to allow for controllable alignment between the fluid-transporting features resulting in fluid communication therebetween, and further wherein the cover plate fluid-transporting feature comprises a conduit having a substantially constant cross-sectional area.

26. The microdevice of claim 25, wherein the substrate fluid-transporting feature comprises a channel, the channel together with the cover plate contact surface form an additional conduit in fluid communication with the cover plate conduit when properly aligned.

27. The microdevice of claim 25, wherein the substrate fluid transporting feature comprises a substrate conduit.

28. The microdevice of claim 27, wherein the substrate and the cover plate conduits have substantially identical cross-sectional areas.

29. A microdevice for controlling fluid flow, comprising:

a substrate having at least two substantially planar contact surfaces and a conduit extending therethrough to provide fluid communication between the contact surfaces;

a first and a second cover plate, each cover plate having a substantially planar contact surface positioned in substantially fluid-tight contact with a substrate contact surface,

wherein the first cover plate contact surface has a fluid-transporting feature associated therewith and at least one of the first or the second cover plate contact surfaces is positioned in slidable contact with a substrate contact surface to allow for controllable flow path formation involving the fluid-transporting feature and the substrate conduit.

30. The microdevice of claim 29, wherein the first and second cover plates are substantially immobilized with respect to each other, while the cover plate contact surfaces remaining in slidable contact with respect to the substrate contact surfaces.

31. The microdevice of claim 29, wherein the substrate is substantially immobilized with respect to either one of the first and second cover plate, such that the cover plate that is not immobilized remains in slidable contact with respect to a substrate contact surface.

32. The microdevice of claim 30, wherein the substrate contact surfaces are in opposing relationship to each other.

33. The microdevice of claim 32, wherein the substrate contact surfaces are substantially parallel to each other.