Angular velocity sensor
First Claim
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1. An angular velocity sensor comprising:
- a sensor including a vibrator and a detector for detecting an angular velocity;
a drive unit including a driver circuit and a monitor circuit, wherein said driver circuit supplies a driving signal to the vibrator part of said sensor, and said monitor circuit receives a monitor signal from said sensor;
detection unit including an amplifier unit and a synchronous demodulator, wherein said amplifier unit receives outputs from the detector of said sensor and wherein said synchronous demodulator sample-holds an output from said amplifier unit in synchronous with the driving signal or the monitor signal from said drive unit and outputs an angular velocity signal; and
self diagnosis unit which provides a diagnosis signal to detect an abnormality of at least one of said sensor, said detection unit and said drive unit by providing a displacement signal synchronized with said driving signal or said monitor signal to said detection unit.
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Abstract
The present invention aims to present an angular velocity sensor having a self diagnosis function.
An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element having a driver part and a detector part for detecting an angular velocity and detection means for detecting the angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection means.
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Citations
10 Claims
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1. An angular velocity sensor comprising:
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a sensor including a vibrator and a detector for detecting an angular velocity;
a drive unit including a driver circuit and a monitor circuit, wherein said driver circuit supplies a driving signal to the vibrator part of said sensor, and said monitor circuit receives a monitor signal from said sensor;
detection unit including an amplifier unit and a synchronous demodulator, wherein said amplifier unit receives outputs from the detector of said sensor and wherein said synchronous demodulator sample-holds an output from said amplifier unit in synchronous with the driving signal or the monitor signal from said drive unit and outputs an angular velocity signal; and
self diagnosis unit which provides a diagnosis signal to detect an abnormality of at least one of said sensor, said detection unit and said drive unit by providing a displacement signal synchronized with said driving signal or said monitor signal to said detection unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification