Flow sensor
First Claim
1. A flow sensor comprising:
- a lower insulator film;
a plurality of resistor films, wherein the resistor films include a patterned heater and thermometer, and wherein at least a section of at least one of the resistor films has a wiring configuration in which resistor elements of a plurality of resistor elements are connected in a parallel manner; and
an upper insulator film, wherein the resistor films are laminated with and located between the upper insulator film and the lower insulator film.
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Accused Products
Abstract
A thin-film type flow sensor having a thin-film part in which a plurality of patterned resistor films are sandwiched between a pair of insulator films. The resistance ratios among the resistor films are minimized from one sensor to another made from the same wafer. The flow sensor has a lower insulator film, the resistor films, and an upper film laminated in succession on a substrate. The resistor films include a patterned fluid thermometer, a temperature detector, and a heater. The heater has a wiring configuration in which resistor elements are connected in a parallel manner. The wiring widths of the heater and the thermometer can thus be made identical, so that the resistance ratios become invariant over the wafer surface, irrespective of a disparity in etching variations.
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Citations
8 Claims
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1. A flow sensor comprising:
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a lower insulator film;
a plurality of resistor films, wherein the resistor films include a patterned heater and thermometer, and wherein at least a section of at least one of the resistor films has a wiring configuration in which resistor elements of a plurality of resistor elements are connected in a parallel manner; and
an upper insulator film, wherein the resistor films are laminated with and located between the upper insulator film and the lower insulator film. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A flow sensor comprising:
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a lower insulator film;
a plurality of resistor films, wherein the resistor films include;
a patterned heater; and
a patterned thermometer, wherein at least one of the thermometer and the heater has a wiring configuration in which a plurality of resistor elements are connected in a parallel manner, wherein the wiring width of the thermometer is the same as that of the heater; and
an upper insulator film, wherein the resistor films are laminated with and located between the upper insulator film and the lower insulator film.
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8. A flow sensor comprising:
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a lower insulator film;
a plurality of resistor films, wherein the resistor films include;
a patterned heater, which is defined by wiring strips; and
a patterned thermometer, which is defined by wiring strips, wherein at least one of the thermometer and the heater has a wiring configuration in which a plurality of resistor elements, which are defined by wiring strips, are connected in a parallel manner, wherein the width of each of the strips defining the thermometer is the same as that of the strips defining the heater; and
an upper insulator film, wherein the resistor films are laminated with and located between the upper insulator film and the lower insulator film.
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Specification