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Flow sensor

  • US 6,705,160 B2
  • Filed: 07/18/2002
  • Issued: 03/16/2004
  • Est. Priority Date: 07/19/2001
  • Status: Expired due to Fees
First Claim
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1. A flow sensor comprising:

  • a lower insulator film;

    a plurality of resistor films, wherein the resistor films include a patterned heater and thermometer, and wherein at least a section of at least one of the resistor films has a wiring configuration in which resistor elements of a plurality of resistor elements are connected in a parallel manner; and

    an upper insulator film, wherein the resistor films are laminated with and located between the upper insulator film and the lower insulator film.

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